本文關(guān)鍵詞：硅探測(cè)器結(jié)構(gòu)中激光超聲及粘接缺陷檢測(cè)研究　出處：《南京理工大學(xué)》2017年碩士論文　論文類型：學(xué)位論文

  更多相關(guān)文章： 粘接結(jié)構(gòu) 激光超聲 有限元模擬 光纖干涉儀

【摘要】：本文針對(duì)硅探測(cè)器結(jié)構(gòu)中激光超聲及其粘接缺陷檢測(cè)進(jìn)行了研究。首先,從理論和實(shí)驗(yàn)兩方面,介紹了粘接類型結(jié)構(gòu)的研究背景。從對(duì)其缺陷進(jìn)行檢測(cè)的激光超聲入手,基于激光超聲的激發(fā)機(jī)理,建立了硅探測(cè)器結(jié)構(gòu)中激光激發(fā)超聲及其與缺陷相互作用的物理模型,所選模型結(jié)構(gòu)上具有超薄表層特點(diǎn),根據(jù)變分原理,進(jìn)而建立相應(yīng)的有限元模型,編制相對(duì)應(yīng)算法;在此基礎(chǔ)上,理論模擬了硅探測(cè)器結(jié)構(gòu)中激光超聲的激發(fā)、傳播過程,主要考慮激發(fā)中心點(diǎn)和對(duì)心點(diǎn),以及上表面距離激發(fā)中心點(diǎn)不同位置的接收點(diǎn),給出這些位置處一定時(shí)間范圍內(nèi)的垂直表面位移波形。對(duì)這類模型中粘接缺陷的檢測(cè)方法進(jìn)行了理論上的探索。其次,針對(duì)斐索干涉儀的結(jié)構(gòu)功能特性,進(jìn)行了理論分析;在此基礎(chǔ)上,研究適用于激光超聲檢測(cè)的光纖斐索干涉儀并完成其制作。最后,搭建激光超聲實(shí)驗(yàn)裝置,完成該型干涉儀接收振動(dòng)波形測(cè)試,測(cè)量鋁材聲表面波的振幅及聲速,利用制作的光纖斐索干涉儀對(duì)理想粘接條件下激光激發(fā)硅探測(cè)器的對(duì)心超聲波形進(jìn)行了探測(cè)。
[Abstract]:In this paper, the detection of laser ultrasonic and its bonding defects in silicon detector structure is studied. Firstly, the theoretical and experimental aspects are discussed. This paper introduces the research background of bonding type structure, starting with laser ultrasonic which detects its defects, and based on the excitation mechanism of laser ultrasonic. The physical model of laser excited ultrasound and its interaction with defects in the structure of silicon detector is established. The selected model has the characteristics of ultra-thin surface layer. According to the variational principle, the corresponding finite element model is established. Compiling corresponding algorithm; On this basis, the laser ultrasonic excitation and propagation process in the structure of silicon detector are simulated theoretically, mainly considering the excitation center point and the center point, as well as the receiving points at different positions from the upper surface to the excitation center point. The vertical surface displacement waveforms at these positions in a certain time range are given, and the detection methods of bonding defects in these models are explored theoretically. Secondly, the structural and functional characteristics of the Fisso interferometer are analyzed. Theoretical analysis is carried out; On this basis, the fiber-optic Fessel interferometer suitable for laser ultrasonic detection is studied and fabricated. Finally, a laser ultrasonic experimental device is built to test the vibration waveform of this type of interferometer. The amplitude and velocity of surface acoustic wave of aluminum were measured. The ultrasonic shape of laser excited silicon detector was detected by using the fiber-optic Fieso interferometer.
【學(xué)位授予單位】：南京理工大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TN249

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