【摘要】：以預(yù)燒結(jié)復(fù)合粉體為原料,采用放電等離子燒結(jié)(SPS)方法制備IGZO靶材,并采用密度測(cè)定、XRD、SEM等手段對(duì)不同燒結(jié)溫度條件下的靶材結(jié)構(gòu)性能進(jìn)行了表征分析。結(jié)果表明,在一定的燒結(jié)溫度區(qū)間,隨燒結(jié)溫度升高,燒結(jié)體相對(duì)密度增加,體積電阻率降低,燒結(jié)溫度1 100℃條件下燒結(jié)體的結(jié)構(gòu)性能較好,相對(duì)密度97.44%,體積電阻率3.66 mΩ/cm~3。
[Abstract]:Presintered composite powder was used as raw material to prepare IGZO target by spark plasma sintering (SPS) (SPS) method. The structure and properties of the target at different sintering temperature were characterized by density measurement and XRD,SEM. The results show that with the increase of sintering temperature, the relative density of the sintered body increases, the volume resistivity decreases, and the sintering temperature at 1 100 鈩，

本文編號(hào)：2348511