【摘要】：YBCO外延地生長在傾斜的SrTiO3襯底上時,YBCO薄膜表面法向與YBCO的c軸成α角,若有激光光沿z軸方向入射YBCO表面時,z軸有激光感生熱電電壓產(chǎn)生。這種熱電材料稱為原子層熱電材料。這種激光感生熱電電壓器件(LITV)具有響應(yīng)快(納秒到皮秒)、響應(yīng)光譜寬(光譜范圍從紫外到紅外)、靈敏度高、非制冷探測、高穩(wěn)定性、易集成、成本低廉的特點,有很廣闊的應(yīng)用前景。本文就YBCO的制備、薄膜的生長條件、不同條件對薄膜的影響,以及YBCO原子層熱電堆進(jìn)行了研究： 1、采用固相法制備YBCO,對不同的燒結(jié)溫度進(jìn)行了研究。分別對890℃、900℃、910℃、920℃、930℃溫度下制備的YBCO經(jīng)XRD分析發(fā)現(xiàn),920℃溫度下制備的YBCO雜相少,質(zhì)量最好。 2、采用直流磁控濺射法制備了YBCO薄膜,研究了YBCO薄膜生長過程中不同條件對薄膜生長的影響,包括不同總氣壓、氧氬比、厚度和退火溫度,通過XRD分析,當(dāng)總氣壓為40Pa、氧氬比為1：2、厚度為1μm、退火溫度為800℃時,是薄膜生長的最佳條件。 3、以總氣壓為40Pa、氧氬比為1：2、厚度為1μm、退火溫度為800℃為實驗條件,在傾斜角為20。的SrTiO3上生長了厚度為1μm的YBCO薄膜,制作成為激光感生熱電電壓器件,并設(shè)計了測量系統(tǒng)進(jìn)行了測量,結(jié)果表明LITV與激光能量成線性關(guān)系。
[Abstract]:When YBCO epitaxially grows on an inclined SrTiO3 substrate, the surface of YBCO films is normally 偽 -angled with the c axis of YBCO. If laser light is incident into the YBCO surface along the z axis, the laser induced thermoelectric voltage is generated in the z axis. This thermoelectric material is called atomic layer thermoelectric material. This laser-induced thermoelectric voltage device (LITV) is characterized by fast response (nanosecond to picosecond), wide response spectrum (spectrum range from ultraviolet to infrared), high sensitivity, uncooled detection, high stability, easy integration and low cost. It has a broad application prospect. In this paper, the preparation of YBCO, the growth conditions of the films, the effects of different conditions on the films, and the YBCO atomic layer thermoelectric stacks are studied. 1. The preparation of YBCO, by solid phase method has been studied at different sintering temperatures. The YBCO prepared at 890 鈩，

本文編號：2209533