本文關鍵詞： 多孔陽極氧化物模板 石英基片 銀 光電學性質　出處：《福建師范大學》2010年碩士論文　論文類型：學位論文

【摘要】：多孔氧化物薄膜因其有序的納米級孔洞結構使之成為合成納米材料的常用模板,氧化物模板的制備和應用在納米時代成為人們關注的熱點。因而,開展多孔氧化物模板的制備及其特性的研究具有十分重要的現(xiàn)實意義。本論文針對石英基片上多孔氧化物模板的制備、模板性能及其應用等方面展開研究,具體內(nèi)容有： (1)直流磁控濺射沉積鈦膜進行不同時間的陽極氧化,獲得多孔陽極氧化鈦(PATO)薄膜。結果表明,制得的氧化鈦薄膜是多晶的Ti10O18；氧化時間影響樣品的孔洞結構和樣品的光學性質。氧化時間為120 min的PATO薄膜在可見光區(qū)的折射率小于2.0,孔隙率約為0.32：粗糙的表面和內(nèi)部的孔洞結構使其消光系數(shù)大于0.1。 (2)石英基片上蒸發(fā)鍍金屬鋁膜后對其陽極氧化,探討氧化時間以及擴孔除鋁處理對多孔氧化鋁(AAO)光學性質的影響。在石英基片上雙面鍍鋁后陽極氧化,制備高透射率的雙面氧化鋁薄膜。結果表明,增加氧化時間和擴孔除鋁處理使薄膜透射率逐漸增大,使AAO薄膜對石英基片起增透作用。石英基片上雙面AAO薄膜腐蝕15min后在整個可見光波長范圍有很高的透射率(最高透過率超過99%)。 (3)以石英基片上多孔氧化鋁薄膜為基底濺射沉積不同厚度的銀薄膜(AAOAg),研究Ag薄膜的厚度對AAOAg薄膜的結構形貌和光電學性質的影響,并與在石英基片上沉積的銀薄膜(QuartzAg)性質進行比較。結果表明,AAOAg薄膜的成膜過程經(jīng)歷由顆粒膜轉化為網(wǎng)狀膜,最后形成連續(xù)膜,形成連續(xù)薄膜時間長；形成連續(xù)薄膜前AAOAg的光電學性質與QuartzAg有很大差別,而形成連續(xù)薄膜后的AAOAg與QuartzAg薄膜的光電學性質大致相同。
[Abstract]:Porous oxide films have become a common template for the synthesis of nanomaterials because of their ordered pore structure. The preparation and application of oxide templates have become the focus of attention in the nanometer era. It is of great practical significance to study the preparation and characteristics of porous oxide templates. In this paper, the preparation, properties and applications of porous oxide templates on quartz substrates are studied. 1) the porous anodic titanium oxide (PATO) films were obtained by anodic oxidation of titanium films deposited by DC magnetron sputtering. The prepared titanium oxide thin films are polycrystalline Ti10O18.The oxidation time affects the pore structure of the samples and the optical properties of the samples. The refractive index of the PATO films with the oxidation time of 120 min is less than 2.0 in the visible region, and the porosity is about 0.32: rough surface. The internal pore structure makes the extinction coefficient greater than 0.1. (2) the anodizing of quartz substrate by evaporation of aluminum film, the effect of oxidation time and the treatment of reaming and removing aluminum on the optical properties of porous alumina (AAO) were discussed. The anodic oxidation of aluminum on both sides of quartz substrate was studied. The results show that the transmittance of the films increases gradually with the increase of oxidation time and the treatment of removing aluminum from holes. After 15 minutes corrosion, the AAO film has a high transmittance over the whole visible wavelength range (the highest transmittance is more than 99g). Silver thin films with different thickness were deposited by sputtering on the substrate of porous alumina film on quartz substrate. The influence of Ag film thickness on the structure, morphology and photoelectric properties of AAOAg thin films was studied. The results show that the film formation process of AAOAg film changes from granular film to reticular film, and finally forms a continuous film, forming a continuous film for a long time. The optoelectronic properties of AAOAg before the formation of continuous films are quite different from those of QuartzAg, while the photovoltaic properties of AAOAg and QuartzAg films after the formation of continuous films are approximately the same.
【學位授予單位】：福建師范大學
【學位級別】：碩士
【學位授予年份】：2010
【分類號】：TB383.2

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