柔性熱膜質(zhì)量流量傳感器的制備與性能研究
發(fā)布時(shí)間：2019-06-21 02:39
【摘要】：航空飛行器表面氣體流量的測(cè)量對(duì)部件本身的工作性能和使用壽命具有重大影響。它不僅提供了近壁流場(chǎng)的清晰診斷,顯示層流或湍流特征,而且還與主動(dòng)控制阻力直接相關(guān)。航空工業(yè)(例如飛行器機(jī)翼、航空發(fā)動(dòng)機(jī))對(duì)于流量傳感器性能(尤其是器件的靈敏度,穩(wěn)定性,測(cè)量范圍等)具有非常高的要求。傳統(tǒng)的測(cè)量方法存在干擾流場(chǎng),測(cè)試精度低和響應(yīng)速度慢等缺點(diǎn),而柔性熱膜質(zhì)量流量傳感器具有體積小、響應(yīng)速度快,對(duì)流場(chǎng)無(wú)干擾等優(yōu)點(diǎn),對(duì)氣體流量測(cè)量具有明顯的優(yōu)勢(shì)。本文針對(duì)飛機(jī)機(jī)翼表面流量測(cè)量的需求,設(shè)計(jì)了一種柔性熱膜質(zhì)量流量傳感器,開(kāi)展了對(duì)熱敏Ni薄膜制備工藝及電阻溫度系數(shù)的研究,重點(diǎn)對(duì)柔性熱膜質(zhì)量流量傳感器的靈敏度及標(biāo)定進(jìn)行探究。首先,利用ANSYS流體仿真軟件對(duì)傳感器模型尺寸進(jìn)行設(shè)計(jì):包括襯底厚度、熱敏薄膜之間的間距尺寸。并對(duì)熱敏電阻的大小、傳感器排列方式和導(dǎo)線分布加以設(shè)計(jì),結(jié)果表明:當(dāng)熱膜的間距一定,基底厚度越小、熱量損失越小,測(cè)量結(jié)果越準(zhǔn)確,故設(shè)定基底厚度為0.05mm;當(dāng)氣流速度一定時(shí),隨著相鄰熱敏電阻間距的增大,擴(kuò)散的熱量對(duì)彼此干擾越來(lái)越小,故設(shè)定熱敏電阻的間距為2mm;當(dāng)柔性熱膜質(zhì)量流量傳感器的基底厚度和間距一定時(shí),隨著流速的增加,相鄰熱敏電阻的熱量擴(kuò)散相互干擾越小,更加有益于改善傳感器的靈敏度。將電阻溫度系數(shù)比較高的金屬Ni作為熱敏材料,絕熱系數(shù)非常大的有機(jī)物聚酰亞胺(PI)作為基底,采用硬質(zhì)掩膜版技術(shù)與微機(jī)電加工工藝技術(shù)結(jié)合的方法,制備出柔性熱膜質(zhì)量流量傳感器。并對(duì)傳感器制備工藝進(jìn)行探究,在濺射功率為120W,氬氣壓強(qiáng)在0.6Pa,厚度為1μm時(shí),測(cè)得比較高的電阻溫度系數(shù),其TCR值為4.41×10-3/℃。其次,采用風(fēng)洞實(shí)驗(yàn)對(duì)柔性熱膜質(zhì)量流量傳感器在不同氣流速度下進(jìn)行測(cè)量,結(jié)果表明:隨著氣流速度的增大,熱敏電阻輸出電壓越大;當(dāng)風(fēng)速達(dá)到30m/s以上時(shí),氣流從層流狀態(tài)向湍流過(guò)渡。在0~30m/s的氣流速度下,對(duì)柔性熱膜質(zhì)量流量傳感器進(jìn)行標(biāo)定,結(jié)果表明:氣流速度與輸出電壓具有較好的線性度,柔性熱膜質(zhì)量流量傳感器靈敏度較高,其靈敏度為0.388V/Pa,非線性度的誤差在1.2%以下,可實(shí)現(xiàn)機(jī)翼表面氣流在0~30m/s流速范圍內(nèi)的質(zhì)量流量及剪切應(yīng)力測(cè)量。
[Abstract]:The measurement of surface gas flow rate of aircraft has a great influence on the working performance and service life of the components themselves. It not only provides a clear diagnosis of the near-wall flow field and shows the characteristics of laminar flow or turbulence, but also is directly related to the active control resistance. The aviation industry (such as aircraft wings, aero-engines) has very high requirements for the performance of flow sensors (especially the sensitivity, stability, measurement range, etc.) of the devices. The traditional measurement method has some disadvantages, such as interference flow field, low test accuracy and slow response speed, while the flexible hot film mass flow sensor has the advantages of small volume, fast response speed and no interference to the flow field, so it has obvious advantages in gas flow measurement. In this paper, a flexible hot film mass flow sensor is designed to meet the needs of aircraft wing surface flow measurement. The preparation process and resistance temperature coefficient of thermistor Ni thin film are studied, with emphasis on the sensitivity and calibration of flexible hot film mass flow sensor. Firstly, the sensor model size is designed by ANSYS fluid simulation software, including substrate thickness and spacing size between thermosensory films. The size of thermistor, the arrangement of sensors and the distribution of conductors are designed. The results show that when the distance between hot film is certain, the smaller the thickness of substrate is, the smaller the heat loss is, the more accurate the measurement results are, so the thickness of substrate is set to be 0.05mm. When the air flow velocity is constant, with the increase of the distance between adjacent thermistors, the interference of diffusion heat to each other becomes smaller and smaller, so the distance between thermistors is set to be 2mm. When the thickness and spacing of the substrate of the flexible hot film mass flow sensor are fixed, with the increase of the flow rate, the smaller the thermal diffusion of the adjacent thermistors interferes with each other, the more beneficial to improve the sensitivity of the sensor. The flexible hot film mass flow sensor was prepared by using metal Ni with high resistance temperature coefficient as thermal sensitive material and organic polyimide (PI) with very large insulation coefficient as substrate. The flexible hot film mass flow sensor was prepared by combining hard mask technology with micro-electromechanical processing technology. The preparation technology of the sensor is studied. when the sputter power is 120W, the argon pressure is 0.6Paand the thickness is 1 渭 m, the high resistance temperature coefficient is measured, and the TCR value is 4.41 脳 10 ~ (- 3) / 鈩，
本文編號(hào)：2503719
[Abstract]:The measurement of surface gas flow rate of aircraft has a great influence on the working performance and service life of the components themselves. It not only provides a clear diagnosis of the near-wall flow field and shows the characteristics of laminar flow or turbulence, but also is directly related to the active control resistance. The aviation industry (such as aircraft wings, aero-engines) has very high requirements for the performance of flow sensors (especially the sensitivity, stability, measurement range, etc.) of the devices. The traditional measurement method has some disadvantages, such as interference flow field, low test accuracy and slow response speed, while the flexible hot film mass flow sensor has the advantages of small volume, fast response speed and no interference to the flow field, so it has obvious advantages in gas flow measurement. In this paper, a flexible hot film mass flow sensor is designed to meet the needs of aircraft wing surface flow measurement. The preparation process and resistance temperature coefficient of thermistor Ni thin film are studied, with emphasis on the sensitivity and calibration of flexible hot film mass flow sensor. Firstly, the sensor model size is designed by ANSYS fluid simulation software, including substrate thickness and spacing size between thermosensory films. The size of thermistor, the arrangement of sensors and the distribution of conductors are designed. The results show that when the distance between hot film is certain, the smaller the thickness of substrate is, the smaller the heat loss is, the more accurate the measurement results are, so the thickness of substrate is set to be 0.05mm. When the air flow velocity is constant, with the increase of the distance between adjacent thermistors, the interference of diffusion heat to each other becomes smaller and smaller, so the distance between thermistors is set to be 2mm. When the thickness and spacing of the substrate of the flexible hot film mass flow sensor are fixed, with the increase of the flow rate, the smaller the thermal diffusion of the adjacent thermistors interferes with each other, the more beneficial to improve the sensitivity of the sensor. The flexible hot film mass flow sensor was prepared by using metal Ni with high resistance temperature coefficient as thermal sensitive material and organic polyimide (PI) with very large insulation coefficient as substrate. The flexible hot film mass flow sensor was prepared by combining hard mask technology with micro-electromechanical processing technology. The preparation technology of the sensor is studied. when the sputter power is 120W, the argon pressure is 0.6Paand the thickness is 1 渭 m, the high resistance temperature coefficient is measured, and the TCR value is 4.41 脳 10 ~ (- 3) / 鈩，
本文編號(hào)：2503719
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