【摘要】：隨著科學(xué)技術(shù)的不斷發(fā)展,非球面光學(xué)元件得到了越來越廣泛地應(yīng)用,特別是對于具有大口徑或者超大口徑等特殊要求的光學(xué)儀器。這些光學(xué)儀器中的光學(xué)元件大多采用拼接結(jié)構(gòu),所使用的非球面光學(xué)元件數(shù)量眾多,形狀特殊,精度要求高,研制周期短。這些廣泛的應(yīng)用需求給光學(xué)制造行業(yè)帶來了蓬勃發(fā)展生機(jī)的同時(shí),也使其面臨前所未有的挑戰(zhàn),傳統(tǒng)的光學(xué)加工方式已經(jīng)無法滿足現(xiàn)在光學(xué)元件研制的需要了。主動(dòng)應(yīng)力加工技術(shù)是在傳統(tǒng)加工方式的基礎(chǔ)上發(fā)展起來的一種新型拋光方法,它可以按照加工球面或平面的工藝來加工光學(xué)非球面,大大提高了非球面的加工效率。但由于加工精度不高,主動(dòng)應(yīng)力加工技術(shù)的發(fā)展受到了一定的制約。本論文對應(yīng)力加工過程中造成加工精度不高的原因進(jìn)行了分析,從應(yīng)力加工支撐裝置輸出力的測量和控制著手,以提高輸出力的精度和穩(wěn)定性,進(jìn)而提高主動(dòng)應(yīng)力加工的精度為目標(biāo),在氣動(dòng)伺服機(jī)構(gòu)和控制系統(tǒng)這兩個(gè)方面開展了研究。本文首先分析了各種主流力促動(dòng)器的優(yōu)勢和劣勢,接著對氣動(dòng)式力促動(dòng)器進(jìn)行了數(shù)學(xué)建模,并對氣動(dòng)式力促動(dòng)器主要參數(shù)進(jìn)行了分析。隨后在控制系統(tǒng)方面進(jìn)行硬件選型和設(shè)計(jì)、力促動(dòng)器控制系統(tǒng)和硬點(diǎn)控制系統(tǒng)的軟件的編寫。其中硬件部分,采用了NI cRIO-9068嵌入式控制器,3塊NI 9205采集卡作為輸入模塊,5塊NI 9264采集卡作為輸出模塊,一塊DMC2410C-A四軸運(yùn)動(dòng)控制卡用于控制步進(jìn)電機(jī)。以減小干擾、提高精度為目標(biāo),優(yōu)化了電氣連接方式。軟件部分,在labVIEW開發(fā)環(huán)境下,采用標(biāo)準(zhǔn)狀態(tài)機(jī)模式,完成了消息處理模塊、通訊模塊、開環(huán)和閉環(huán)控制模塊,人機(jī)界面,以及兩個(gè)控制系統(tǒng)各自相對應(yīng)的各種功能性操作模塊,控制算法綜合采用了帶死區(qū)的PID控制算法、積分和矯正算法、可自調(diào)整的“野點(diǎn)”值弱化算法。最后,結(jié)合一套單點(diǎn)力測試裝置和一塊1.2m薄主鏡,其中,1.2m薄主鏡采用37點(diǎn)力支撐,并使用3個(gè)硬點(diǎn)對鏡面進(jìn)行定位,設(shè)計(jì)和進(jìn)行了相關(guān)實(shí)驗(yàn),對系統(tǒng)性能進(jìn)行了綜合測試。實(shí)驗(yàn)結(jié)果表明:將現(xiàn)有支撐力的精度提高到了目標(biāo)精度,滿足了光學(xué)元件進(jìn)行應(yīng)力加工的需要。
[Abstract]:With the continuous development of science and technology, aspherical optical elements have been more and more widely used, especially for optical instruments with special requirements such as large aperture or super large aperture. Most of the optical elements in these optical instruments use splicing structure, the number of aspherical optical elements used is large, the shape is special, the precision requirement is high, and the development cycle is short. These extensive application requirements not only bring vitality to the optical manufacturing industry, but also make it face unprecedented challenges. The traditional optical processing methods can no longer meet the needs of the development of optical components. Active stress machining technology is a new polishing method developed on the basis of traditional machining methods. It can process optical aspherical surface according to the process of machining sphere or plane, which greatly improves the machining efficiency of aspherical surface. However, due to the low machining accuracy, the development of active stress machining technology is restricted to a certain extent. In this paper, the reasons for the low machining accuracy in the process of stress machining are analyzed, and the measurement and control of the output force of the stress machining support device are started in order to improve the accuracy and stability of the output force. In order to improve the accuracy of active stress machining, the pneumatic servo mechanism and control system are studied. In this paper, the advantages and disadvantages of various main flow force actuators are analyzed, then the mathematical modeling of pneumatic force actuators is carried out, and the main parameters of pneumatic force actuators are analyzed. Then the hardware selection and design are carried out in the control system, and the software of the force actuator control system and the hard point control system is compiled. In the hardware part, NI cRIO-9068 embedded controller is used, three NI 9205 acquisition cards are used as input modules, five NI 9264 acquisition cards are used as output modules, and a DMC2410C-A four-axis motion control card is used to control stepping motor. In order to reduce the interference and improve the accuracy, the electrical connection mode is optimized. In the software part, under the labVIEW development environment, the message processing module, the communication module, the open-loop and closed-loop control module, the man-machine interface, and the corresponding functional operation modules of the two control systems are completed by using the standard state machine mode. The control algorithm adopts PID control algorithm with dead zone, integral and correction algorithm, and self-adjusting "wild point" weakening algorithm. Finally, a set of single point force testing device and a 1.2m thin main mirror are combined, in which 1.2m thin main mirror is supported by 37 points force, and three hard points are used to locate the mirror surface, and the related experiments are designed and carried out. The performance of the system is tested comprehensively. The experimental results show that the accuracy of the existing support force is improved to the target accuracy, which meets the needs of stress machining of optical elements.
【學(xué)位授予單位】：中國科學(xué)院大學(xué)(中國科學(xué)院光電技術(shù)研究所)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：TP273

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