【摘要】：隨著世界各大研究機(jī)構(gòu)以及國(guó)內(nèi)外學(xué)者對(duì)精密工作臺(tái)技術(shù)研究的大力推進(jìn),精密工作臺(tái)技術(shù)取得了很大的突破,使得該項(xiàng)技術(shù)正朝著大行程、高精度、高速度方面研究。宏微驅(qū)動(dòng)超精密定位平臺(tái)的作用至關(guān)重要,但是它的發(fā)展離不開(kāi)測(cè)量技術(shù),未來(lái)宏微驅(qū)動(dòng)超精密定位平臺(tái)的不斷發(fā)展離不開(kāi)測(cè)量技術(shù)和測(cè)量裝置,測(cè)量技術(shù)和測(cè)量裝置的不斷創(chuàng)新與進(jìn)步將帶動(dòng)宏微驅(qū)動(dòng)超精密定位平臺(tái)技術(shù)的快速發(fā)展。本文利用電容式微位移測(cè)量?jī)x、激光測(cè)振儀等作為硬件基礎(chǔ),以虛擬儀器Labview為軟件基礎(chǔ),建立了一套超聲電機(jī)宏微位移檢測(cè)系統(tǒng),實(shí)現(xiàn)對(duì)超聲電機(jī)運(yùn)行狀態(tài)下的定子振動(dòng)的宏微位移進(jìn)行測(cè)量,構(gòu)建穩(wěn)定可靠的測(cè)試系統(tǒng)。本文主要研究?jī)?nèi)容包括:(1)簡(jiǎn)明闡述了超聲電機(jī)定子振動(dòng)的宏微位移檢測(cè)背景及意義,概述了宏微位移檢測(cè)國(guó)內(nèi)外的研究現(xiàn)狀及存在問(wèn)題,闡明了本文的研究重點(diǎn)及難點(diǎn)。(2)以電容式微位移測(cè)量?jī)x、激光測(cè)振儀為主要硬件,以傳感器、驅(qū)動(dòng)電路、各種元器件等為輔助搭建了一套穩(wěn)定可靠的宏微位移檢測(cè)系統(tǒng)硬件平臺(tái)。(3)以Labview為主要語(yǔ)言編寫(xiě)了上位機(jī)檢測(cè)程序,完成了軟件的設(shè)計(jì)編寫(xiě)調(diào)試工作,建立了一套可視化界面,實(shí)現(xiàn)對(duì)超聲電機(jī)運(yùn)行狀態(tài)下定子振動(dòng)的宏微位移測(cè)量。(4)對(duì)檢測(cè)數(shù)據(jù)進(jìn)行分析處理,利用origin8.0,matlab2010等軟件對(duì)測(cè)量的數(shù)據(jù)進(jìn)行線性相關(guān)性檢測(cè)等操作,對(duì)實(shí)驗(yàn)數(shù)據(jù)的穩(wěn)定可靠性進(jìn)行了驗(yàn)證。(5)將程序生成可執(zhí)行文件,方便其他超聲電機(jī)使用,建立了一套穩(wěn)定可靠通用的檢測(cè)系統(tǒng)。通過(guò)實(shí)驗(yàn)證明本系統(tǒng)測(cè)量結(jié)果較為可靠,本文在上述基礎(chǔ)上,對(duì)超聲電機(jī)宏微檢測(cè)進(jìn)行了總結(jié)與展望。
[Abstract]:With the advance of the research on precision worktable technology by various research institutions and scholars both at home and abroad, the technology of precision table has made a great breakthrough, which makes the technology research towards large stroke, high precision and high speed. The function of macro-micro-drive ultra-precision positioning platform is very important, but its development can not be separated from measurement technology, and the development of macro-micro-drive ultra-precision positioning platform in the future cannot be separated from measurement technology and measurement equipment. The continuous innovation and progress of measurement technology and equipment will lead to the rapid development of macro-micro-drive ultra-precision positioning platform technology. In this paper, a set of ultrasonic motor macro-and micro-displacement detection system is established by using capacitive micro-displacement measuring instrument and laser vibration measuring instrument as hardware foundation and virtual instrument Labview as software foundation. The measurement of macro and micro displacement of stator vibration in ultrasonic motor is realized, and a stable and reliable testing system is constructed. The main contents of this paper are as follows: (1) the background and significance of macro-and micro-displacement detection of ultrasonic motor stator vibration are briefly described, and the research status and existing problems of macro-micro-displacement detection at home and abroad are summarized. The research emphases and difficulties of this paper are expounded. (2) the main hardware of this paper is capacitive micro-displacement measuring instrument, laser vibration measuring instrument, sensor and driving circuit. A set of stable and reliable hardware platform for macro and micro displacement detection system has been built up by various components and other components. (3) the upper computer detection program has been compiled with Labview as the main language, and the software design and debugging has been completed. A set of visual interface is established to measure the macro and micro displacement of the stator vibration under the running state of the ultrasonic motor. (4) the measured data are analyzed and processed, and the origin8.0, is used to measure the vibration of the stator. Matlab2010 and other software to test the linear correlation of the measured data and other operations to verify the stability and reliability of the experimental data. (5) the program is generated executable file to facilitate the use of other ultrasonic motors. A stable and reliable general detection system is established. The experimental results show that the measurement results of the system are reliable. On the basis of the above, this paper summarizes and looks forward to the macro-and micro-testing of ultrasonic motor.
【學(xué)位授予單位】：華南農(nóng)業(yè)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2016
【分類號(hào)】：TP274

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