【摘要】：智能化是機器人技術最新發(fā)展的一個重要方向,而實現(xiàn)智能化的一個關鍵技術——觸覺傳感器技術,是制約其發(fā)展的重要因素。對于人類觸覺的模擬,既要滿足三維力測量的高靈敏度,又要有人類皮膚的柔性。目前針對強力信號(10 kPa)的檢測技術已經(jīng)成熟,而對于弱力(5 kPa)及三維力信號的檢測仍需研究,同時柔性傳感器器件制造水平仍需提高。鑒于此,本課題擬采用陣列結構化的石墨烯薄膜作為力學敏感材料,通過優(yōu)化設計傳感器的結構和制造工藝,制備出高性能力學傳感器,并采用一體化的信號采集系統(tǒng),實現(xiàn)力學信號的快速采集與分析。利用材料的界面壓阻效應,設計了一種基于石墨烯的柔性三維力觸覺傳感器。傳感器總體結構包括表面凸起層、壓阻層和柔性電極三個部分。對界面電阻產(chǎn)生的機理進行了分析,研究了傳感器三維力檢測原理。進一步利用硅光刻技術、濕法刻蝕工藝、反拷鑄膜法和層層自組裝技術(Layer-By-Layer,LBL)制作了帶有石墨烯薄膜的壓阻層。設計并制備出了柔性電極層,將各部分組裝成柔性三維力傳感器的壓阻單元;分別對其進行了正壓力與任意三維力的檢測性能測試。當接觸壓力小于500 Pa時,傳感器靈敏度為-1.71KPa-1,500~5000 Pa時,傳感器靈敏度為-0.0178 KPa-1;響應和回復時間分別為7.5ms和7.4 ms;傳感器可實現(xiàn)對正壓力、剪切力、空間任意方向力的快速和高靈敏度檢測,其最低檢測限為2 Pa,且具有良好的穩(wěn)定性。進一步搭建了陣列觸覺傳感器的信號采集電路,首先利用分壓的方式設計了信號檢出電路,然后通過高速選通芯片CD4051對每個陣列傳感單元的輸出信號進行采集。利用STM32單片機的A/D模數(shù)轉換器實現(xiàn)信號由模擬量到數(shù)字量轉換,使用STM32單片機對數(shù)字信號處理分析,最后將輸出信號通過PC顯示出來。最后對觸覺傳感器進行了耦合分析,分析結果表明傳感器的耦合計算結果受到設計原理、測量方式和傳感器制造裝配精度的影響,因此,每個方向的輸出信號會受到多個外界因素的干擾。鑒于此,采用了BP神經(jīng)網(wǎng)絡對觸覺傳感器進行了解耦研究。解耦計算結果的最大誤差為4.3%FS,最后編寫了解耦界面。
[Abstract]:Intellectualization is an important direction in the latest development of robot technology, and tactile sensor technology, which is a key technology to realize intelligentization, is an important factor restricting the development of robot technology. For human tactile simulation, it is necessary to satisfy the high sensitivity of 3D force measurement and the flexibility of human skin. At present, the detection technology of strong signal (10 kPa) is mature, but the detection of weak force (5 kPa) and 3D force signal still needs to be studied, and the manufacturing level of flexible sensor device still needs to be improved. In view of this, this subject intends to use the graphene thin film of array structure as the mechanical sensitive material, by optimizing the structure and manufacturing process of the sensor, the high performance mechanical sensor is prepared, and the integrated signal acquisition system is adopted. The quick acquisition and analysis of mechanical signals are realized. A flexible 3D force tactile sensor based on graphene was designed based on the interfacial piezoresistive effect. The overall structure of the sensor consists of three parts: surface protruding layer, piezoresistive layer and flexible electrode. The mechanism of interface resistance is analyzed, and the three-dimensional force detection principle of sensor is studied. The piezoresistive layer with graphene film was prepared by silicon lithography, wet etching, reverse coating casting and layer self-assembly (Layer-By-Layer,LBL). The flexible electrode layer is designed and fabricated, and the piezoresistive elements of the flexible three-dimensional force sensor are assembled, and the measurement performance of the positive pressure and arbitrary three-dimensional force are tested respectively. When the contact pressure is less than 500 Pa and the sensitivity of the sensor is-1.71KPa-1500~5000 Pa, the sensitivity of the sensor is-0.0178 KPa-1; response and recovery time is 7.5ms and 7.4 ms;, respectively. The sensor can detect the positive pressure, shear force and spatial force in any direction quickly and with high sensitivity. The minimum detection limit is 2 Pa, and the sensor has good stability. Furthermore, the signal acquisition circuit of the array tactile sensor is built. Firstly, the signal detection circuit is designed by using the method of partial voltage, and then the output signal of each array sensor unit is collected by high speed gated chip CD4051. The A / D converter of STM32 microcontroller is used to realize the signal conversion from analog to digital, and the digital signal is processed and analyzed by STM32 single chip computer. Finally, the output signal is displayed through PC. Finally, the coupling analysis of the tactile sensor is carried out. The results show that the coupling calculation results of the sensor are affected by the design principle, the measurement method and the assembly accuracy of the sensor. The output signal in each direction is disturbed by multiple external factors. In view of this, BP neural network is used to decouple the tactile sensor. The maximum error of the decoupling results is 4.3 FSs. Finally, the decoupling interface is written.
【學位授予單位】：哈爾濱工業(yè)大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：TP212

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