【摘要】：提出了一種基于飛秒激光加工技術(shù)制作的微納光纖高溫壓力傳感器。用飛秒激光在光纖端面加工出法珀腔,制作出的全光纖法珀干涉型壓力傳感器,從室溫到1100℃范圍進(jìn)行了壓力溫度試驗(yàn)。在不同溫度下,壓力傳感器都有良好的線性輸出特性,短時(shí)間工作溫度超過1100℃,能夠滿足高溫環(huán)境下壓力測(cè)量的需求。
[Abstract]:A micro-nano-fiber high temperature pressure sensor based on femtosecond laser processing technology is proposed. The Fabry-Perot cavity was fabricated by femtosecond laser at the end of the fiber, and the all-fiber Fabry-Perot interference pressure sensor was fabricated. The pressure and temperature tests were carried out from room temperature to 1100 鈩，

本文編號(hào)：2306746