【摘要】：近年來由于科學(xué)技術(shù)發(fā)展,各儀器設(shè)備的精度和穩(wěn)定性都不斷提升,各種振動(dòng)的影響變得越發(fā)突出,如何有效地隔離低頻和超低頻振動(dòng)現(xiàn)已成為研究熱點(diǎn)和難點(diǎn)。與被動(dòng)隔振技術(shù)相比,主動(dòng)隔振技術(shù)具有更小的振動(dòng)傳遞率,并且具有更大的隔振帶寬,在精密測(cè)試和超精密制造設(shè)備中都得到廣泛應(yīng)用。磁電式振動(dòng)速度傳感器是主動(dòng)隔振系統(tǒng)的重要組成部分,由于使用環(huán)境的限制,傳感器不能同時(shí)滿足小體積和低頻信號(hào)探測(cè)的要求。因此,在不改變傳感器機(jī)械結(jié)構(gòu)的前提下,選擇合理的補(bǔ)償方案,設(shè)計(jì)滿足性能要求的良好的補(bǔ)償電路及補(bǔ)償軟件具有很高的實(shí)用價(jià)值。本文首先分析了隔振系統(tǒng)對(duì)傳感器的性能要求,并對(duì)各類絕對(duì)振動(dòng)傳感器的工作特性進(jìn)行了分析和比較,最終確定了關(guān)鍵技術(shù)指標(biāo)和傳感器型號(hào)。在深入分析了磁電式速度傳感器的結(jié)構(gòu)和工作原理的基礎(chǔ)上,建立傳感器的動(dòng)力學(xué)模型,構(gòu)建傳感器的傳遞函數(shù),得到傳感器的幅頻特性。根據(jù)傳遞函數(shù)分析傳感器的低頻測(cè)量局限及其原因,并且針對(duì)該局限提出傳感器低頻擴(kuò)展方案,最后確定使用零極點(diǎn)補(bǔ)償法對(duì)傳感器進(jìn)行低頻擴(kuò)展。由于需要更為準(zhǔn)確的傳遞函數(shù),本文還研究了磁電式速度傳感器的多種測(cè)試方法,例如直流激勵(lì)法、正弦激勵(lì)信號(hào)法和振動(dòng)臺(tái)法等。分析了各種方法的優(yōu)缺點(diǎn),結(jié)合各種因素,決定采用直流激勵(lì)法對(duì)傳感器參數(shù)進(jìn)行測(cè)試,設(shè)計(jì)測(cè)試的硬件電路和軟件,獲取傳感器精確的傳遞函數(shù)。根據(jù)所測(cè)量得到的傳遞函數(shù)和零極點(diǎn)補(bǔ)償法原理設(shè)計(jì)相應(yīng)補(bǔ)償硬件和軟件,完成信號(hào)處理。最后搭建磁電式速度傳感器參數(shù)識(shí)別實(shí)驗(yàn)平臺(tái),對(duì)傳感器參數(shù)進(jìn)行識(shí)別,實(shí)驗(yàn)結(jié)果表明,直流激勵(lì)法中心頻率測(cè)量相對(duì)誤差為0.35%,阻尼比相對(duì)誤差為0.92%。將測(cè)試參數(shù)用于零極點(diǎn)補(bǔ)償網(wǎng)絡(luò),并進(jìn)行低頻信號(hào)檢測(cè)實(shí)驗(yàn)驗(yàn)證擴(kuò)展電路和軟件對(duì)磁電式速度傳感器的低頻擴(kuò)展功能。實(shí)驗(yàn)結(jié)果表明:利用硬件電路和軟件方法均能夠?qū)崿F(xiàn)將傳感器中心頻率由4.8Hz降至0.28Hz,實(shí)現(xiàn)傳感器低頻帶擴(kuò)展目標(biāo)。
[Abstract]:In recent years, due to the development of science and technology, the accuracy and stability of various instruments and equipments have been continuously improved, and the influence of various kinds of vibration has become more and more prominent. How to effectively isolate low-frequency and ultra-low frequency vibration has become a hot and difficult point. Compared with passive vibration isolation technology, active vibration isolation technology has smaller vibration transfer rate and larger vibration isolation bandwidth. It is widely used in precision testing and ultra-precision manufacturing equipment. Magnetoelectric vibration velocity sensor is an important part of active vibration isolation system. Due to the limitation of environment, the sensor can not meet the requirements of both small volume and low frequency signal detection. Therefore, under the premise of not changing the mechanical structure of the sensor, it is of great practical value to select a reasonable compensation scheme and design a good compensation circuit and compensation software to meet the performance requirements. In this paper, the performance requirements of the vibration isolation system to the sensor are analyzed, and the working characteristics of all kinds of absolute vibration sensors are analyzed and compared. Finally, the key technical specifications and the type of the sensor are determined. On the basis of deeply analyzing the structure and working principle of magnetoelectric speed sensor, the dynamic model of the sensor and the transfer function of the sensor are established, and the amplitude-frequency characteristic of the sensor is obtained. According to the transfer function, the low frequency measurement limitation of the sensor and its reasons are analyzed, and the low frequency expansion scheme of the sensor is put forward. Finally, the zero pole compensation method is used for the low frequency expansion of the sensor. Due to the need for more accurate transfer function, this paper also studies many testing methods of magnetoelectric velocity sensor, such as DC excitation method, sinusoidal excitation signal method and shaking table method, etc. The advantages and disadvantages of various methods are analyzed and the DC excitation method is adopted to test the sensor parameters. The hardware circuit and software are designed and the accurate transfer function of the sensor is obtained. According to the measured transfer function and the principle of zero-pole compensation, the corresponding compensation hardware and software are designed to complete the signal processing. Finally, an experiment platform is built to identify the parameters of magnetoelectric speed sensor. The experimental results show that the relative error of DC excitation method is 0.35 and the relative error of damping ratio is 0.92. The test parameters are applied to the zero-pole compensation network and the low-frequency signal detection experiments are carried out to verify the low-frequency spread function of the expansion circuit and software to the magnetoelectric speed sensor. The experimental results show that the center frequency of the sensor can be reduced from 4.8Hz to 0.28Hz by both hardware circuit and software method, and the target of low frequency band expansion can be realized.
【學(xué)位授予單位】：哈爾濱工業(yè)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TP212

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本文編號(hào)：2199437