【摘要】：目前在臨床醫(yī)學(xué)領(lǐng)域,亟待可以植入人體的新型高精度微壓力傳感器為臨床診斷提供依據(jù);在某些嚴(yán)酷的工業(yè)環(huán)境下也需要對工業(yè)生產(chǎn)中的壓力進(jìn)行高精度傳感測量。本文創(chuàng)新性地提出了一種基于低反射長腔長法布里-珀羅(F-P)腔結(jié)構(gòu)的光纖微壓力傳感器,同時結(jié)合球形壓力封裝結(jié)構(gòu),可以實現(xiàn)無接觸角測量誤差的高精度微壓力傳感。本文的主要內(nèi)容有:1.推導(dǎo)了F-P腔多光束干涉理論模型,通過仿真分析了F-P腔的透射光譜與反射光譜特性,得到了低反射率時反射光譜具有較高的精細(xì)度,為低反射長腔長結(jié)構(gòu)的提出奠定了理論基礎(chǔ)。同時對F-P腔的幾種腔長解調(diào)方法進(jìn)行了仿真分析。2.提出了一種寬頻帶低反射長腔長F-P腔結(jié)構(gòu)。通過仿真分析得到了不同腔長時的靈敏度曲線,驗證了采用長腔長結(jié)構(gòu)實現(xiàn)高精度微壓力傳感的可行性;依據(jù)胡可定律結(jié)合牛頓第二定律建立了傳感頭的頻率響應(yīng)模型,通過仿真分析得到了傳感頭的頻率響應(yīng)曲線,提出了采用腐蝕工藝通過削減壓力敏感端的厚度以提高傳感頭的頻率響應(yīng)。3.提出了一種無接觸角測量誤差的球形壓力封裝結(jié)構(gòu)。建立了球形封裝結(jié)構(gòu)的壓力傳導(dǎo)理論模型,通過仿真分析得到了封裝結(jié)構(gòu)的幾何尺寸與傳感頭可以感知的空間角度以及壓力傳導(dǎo)特性之間的關(guān)系,驗證了采用該封裝結(jié)構(gòu)實現(xiàn)無接觸角測量誤差的可行性。4.設(shè)計并搭建了微壓力校準(zhǔn)系統(tǒng),開展了靈敏度以及準(zhǔn)確度實驗研究,實驗結(jié)果表明:在10kPa~100kPa的微壓力測試范圍內(nèi),其相對誤差最大不超過9.46%,測量精度為?7kPa;設(shè)計并搭建了基于相位生成載波(PGC)技術(shù)的動態(tài)特性測試系統(tǒng),進(jìn)行了動態(tài)特性測試,測試結(jié)果表明:通過削減壓力敏感端的質(zhì)量可以提高傳感頭的響應(yīng)頻率,實現(xiàn)了一定頻帶寬度內(nèi)的動態(tài)壓力響應(yīng)。
[Abstract]:At present, in the field of clinical medicine, it is urgent to provide the basis for clinical diagnosis with a new type of high precision micro pressure sensor which can be implanted into human body, and it is also necessary to carry out high precision sensing measurement of pressure in industrial production under some harsh industrial environments. In this paper, an optical fiber micro pressure sensor based on the low reflectance long Fabry-Perot (F-P) cavity structure is proposed, and a high precision micro pressure sensor without contact angle measurement error can be realized by combining the spherical pressure package structure. The main content of this paper is: 1. The theoretical model of multi-beam interference in F-P cavity is derived. The characteristics of transmission spectrum and reflection spectrum of F-P cavity are analyzed by simulation. It is shown that the reflection spectrum has a high precision when the reflectivity is low. It lays a theoretical foundation for the long structure of low reflection cavity. At the same time, several kinds of cavity length demodulation methods of F-P cavity are simulated and analyzed. A wide band low reflection long cavity long F-P cavity structure is proposed. The sensitivity curves of different cavity lengths are obtained by simulation analysis, and the feasibility of using long cavity length structure to realize high precision micro-pressure sensing is verified, and the frequency response model of sensor head is established based on Hook's law and Newton's second law. The frequency response curve of the sensor head is obtained by simulation analysis. The corrosion process is proposed to improve the frequency response of the sensor head by reducing the thickness of the pressure sensitive end. A spherical pressure packaging structure without contact angle measurement error is proposed. The pressure conduction theory model of spherical packaging structure is established. The relationship between the geometric dimension of the package structure and the sensing angle and the pressure conduction characteristics of the sensor head is obtained by simulation analysis. The feasibility of using the package structure to realize non-contact angle measurement error is verified. 4. 4. The micropressure calibration system is designed and built, and the sensitivity and accuracy of the system are studied. The experimental results show that: within the range of 10kPa~100kPa micro-pressure measurement, The relative error is not more than 9.46 and the measurement precision is 7 KPA. The dynamic characteristic testing system based on phase generated carrier (PGC) technology is designed and built. The test results show that the response frequency of the sensor can be increased by reducing the quality of the pressure sensitive end, and the dynamic pressure response within a certain bandwidth can be realized.
【學(xué)位授予單位】：電子科技大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：TP212

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