本文選題：高場(chǎng)非對(duì)稱波形離子遷移率譜 + 電暈放電�。� 參考：《傳感技術(shù)學(xué)報(bào)》2017年11期

【摘要】：為降低FAIMS傳感器制作的復(fù)雜度與成本,設(shè)計(jì)了一種基于PTFE基板的FAIMS傳感器。該傳感器由漂移管、離子源及外圍電路組成。其中漂移管基于PTFE基板構(gòu)建,使用PCB工藝制備Au電極,利用厚度為0.4 mm氧化鋁條作為絕緣支撐片將上下電極隔離并形成通道,用于離子分離與檢測(cè),漂移管的總體積1.9 cm3。離子源通過(guò)針-網(wǎng)式電暈放電建立,通過(guò)軟焊接工藝連接到FAIMS上基板。外圍電路包括FAIMS工作所需的高頻高壓非對(duì)稱電場(chǎng)及補(bǔ)償電場(chǎng)產(chǎn)生電路和微弱離子電流放大電路。常溫下,傳感器響應(yīng)恢復(fù)時(shí)間小于3 s。利用化學(xué)戰(zhàn)劑模擬劑甲基膦酸二甲酯DMMP(Dimethyl Methylphosphonate)測(cè)試了傳感器的靈敏度,實(shí)現(xiàn)了0.5μg/m3的量級(jí)DMMP樣品的檢測(cè)。
[Abstract]:In order to reduce the complexity and cost of fabrication of FAIMS sensor, a kind of FAIMS sensor based on PTFE substrate is designed. The sensor consists of drift tube, ion source and peripheral circuit. The drift tube was constructed based on PTFE substrate. Au electrode was fabricated by PCB process. The upper and lower electrodes were isolated and formed by using 0.4 mm aluminum oxide strip as insulation support. The drift tube was used for ion separation and detection. The total volume of drift tube was 1.9 cm 3. The ion source is established by needle-net corona discharge and is connected to the substrate of FAIMS by soft welding process. Peripheral circuits include high-frequency and high-voltage asymmetric electric field and compensation electric field generation circuit and weak ion current amplifier circuit for FAIMS operation. At room temperature, the response recovery time of the sensor is less than 3 s. The sensitivity of the sensor was measured by using Dimethyl methyl phosphonate (Dimethyl methyl phosphonate), a simulant of chemical warfare agent. The detection of DMMP samples of 0.5 渭 g/m3 was realized.
【作者單位】： 北京物資學(xué)院信息學(xué)院;北京物資學(xué)院北京高校物流技術(shù)工程中心;
【基金】：北京高校物流技術(shù)工程研究中心項(xiàng)目(BJLE2010)
【分類號(hào)】：TP212

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