可實現(xiàn)溫度補償?shù)膲弘娛轿簜鞲衅餮芯?/H1>
發(fā)布時間：2018-05-06 17:16
本文選題：微壓傳感器 + 壓電薄膜��； 參考：《吉林大學》2017年碩士論文
【摘要】：全球智能化進程的飛速發(fā)展,對新一代微傳感器系統(tǒng)的研究與開發(fā)提出了更高的要求,尤其是高精度高靈敏度微傳感器件的研究與開發(fā)變得日益迫切。近年來壓電材料及其元器件迅速發(fā)展,特別是在半導體行業(yè)被廣泛應用,壓電材料根據(jù)其壓電效應和逆壓電效應可以用作傳感元件或者驅動元件,壓電式壓力傳感器在橋梁監(jiān)測、健康監(jiān)測、航空航天、汽車輪船等方面得到廣泛應用,但是壓電材料由于其極化強度受溫度影響的不穩(wěn)定性,導致檢測精度和靈敏度的提高受到極大限制。目前壓電式壓力傳感器的溫度特性研究以及用于壓電式壓力傳感器的溫度補償方法尚處在研究階段,通�；趯嶒灅硕ńY果利用查表法確定不同溫度下的輸出與壓力的對應關系,這種方法需要耗費大量時間,這嚴重限制了壓電式壓力傳感器的推廣使用。因此,本文設計一種可實現(xiàn)溫度補償?shù)膲弘娛轿簜鞲衅?并對其溫度特性開展研究,提出基于熱敏電阻的溫度補償方法。首先設計了基于硅杯式結構的可實現(xiàn)溫度補償?shù)膲弘娛轿簜鞲衅?四周固定的圓形壓電薄膜作為傳感單元感應外界壓力大小,提出了基于熱敏電阻的溫度補償方法。根據(jù)小撓度理論和壓電方程建立傳感器電壓輸出數(shù)學模型。通過仿真分析傳感器薄膜半徑及厚度參數(shù)對其輸出的影響,獲得了優(yōu)化的傳感器結構尺寸。分析了壓電薄膜的模態(tài)及其振型,確定傳感器的工作頻率范圍。搭建了傳感器測試電路及測試平臺,實驗研究了壓電式微壓傳感器的溫度特性,通過對壓電薄膜傳感單元的材料參數(shù),如內阻、電容等進行測試,分析其受溫度影響規(guī)律。通過對傳感器結構進行測試,分析傳感器輸出在不同溫度下隨壓力變化的關系,最終根據(jù)實驗結果得到其性能指標,靈敏度、線性度、精度、以及頻率響應特性等。最后根據(jù)實驗結果分析溫度對傳感器性能的影響規(guī)律,基于熱敏電阻的阻值隨溫度變化而變化的特性提出基于熱敏電阻的溫度補償方法,通過電路設計將熱敏電阻阻值的變化應用于傳感器的輸出中,實現(xiàn)壓電式微壓傳感器的溫度補償。本文所提出的補償方法避免了查表過程中溫度測量帶來的二次誤差,提高了傳感器精度。通過實驗驗證補償方法的可行性。
[Abstract]:With the rapid development of global intelligence, the research and development of a new generation of micro-sensor systems are required, especially the research and development of high-precision and high-sensitivity microsensor devices become more and more urgent. In recent years, piezoelectric materials and their components have been developed rapidly, especially widely used in semiconductor industry. Piezoelectric materials can be used as sensing or driving components according to their piezoelectric effect and inverse piezoelectric effect. Piezoelectric pressure sensors are widely used in bridge monitoring, health monitoring, aerospace, automobile and ship, etc. The improvement of detection accuracy and sensitivity is greatly limited. At present, the temperature characteristics of piezoelectric pressure sensor and the temperature compensation method for piezoelectric pressure sensor are still in the research stage. Usually, based on the experimental calibration results, the corresponding relationship between output and pressure at different temperatures is determined by using the look-up table method. This method takes a lot of time, which seriously limits the popularization of piezoelectric pressure sensors. Therefore, a kind of piezoelectric micro-pressure sensor which can realize temperature compensation is designed in this paper, and its temperature characteristic is studied, and a temperature compensation method based on thermistor is proposed. Firstly, a piezoelectric micro-pressure sensor based on silicon cup structure is designed to realize temperature compensation. A temperature compensation method based on thermistor is proposed, in which the circular piezoelectric thin film is used as the sensing unit to induce the external pressure. According to the theory of small deflection and piezoelectric equation, the mathematical model of sensor voltage output is established. The influence of the film radius and thickness parameters on the output of the sensor is analyzed by simulation, and the optimized sensor size is obtained. The modes and modes of piezoelectric film are analyzed and the working frequency range of the sensor is determined. The temperature characteristics of piezoelectric micro-pressure sensor are studied experimentally. The temperature effect of piezoelectric thin film sensor is analyzed by testing the material parameters such as internal resistance and capacitance. By testing the structure of the sensor, the relationship between the output of the sensor and the pressure at different temperature is analyzed. Finally, the performance index, sensitivity, linearity, precision and frequency response characteristic are obtained according to the experimental results. Finally, according to the experimental results, the influence of temperature on the performance of the sensor is analyzed. Based on the characteristic that the resistance of thermistor varies with temperature, a temperature compensation method based on thermistor is proposed. The temperature compensation of piezoelectric micro-pressure sensor is realized by applying the change of thermistor resistance to the output of the sensor through circuit design. The compensation method proposed in this paper avoids the secondary error caused by the temperature measurement in the process of looking up the table, and improves the precision of the sensor. The feasibility of the compensation method is verified by experiments.
【學位授予單位】：吉林大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：TP212
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，
本文編號：1853172
本文鏈接：http://sikaile.net/kejilunwen/zidonghuakongzhilunwen/1853172.html
本文選題：微壓傳感器 + 壓電薄膜��； 參考：《吉林大學》2017年碩士論文
【摘要】：全球智能化進程的飛速發(fā)展,對新一代微傳感器系統(tǒng)的研究與開發(fā)提出了更高的要求,尤其是高精度高靈敏度微傳感器件的研究與開發(fā)變得日益迫切。近年來壓電材料及其元器件迅速發(fā)展,特別是在半導體行業(yè)被廣泛應用,壓電材料根據(jù)其壓電效應和逆壓電效應可以用作傳感元件或者驅動元件,壓電式壓力傳感器在橋梁監(jiān)測、健康監(jiān)測、航空航天、汽車輪船等方面得到廣泛應用,但是壓電材料由于其極化強度受溫度影響的不穩(wěn)定性,導致檢測精度和靈敏度的提高受到極大限制。目前壓電式壓力傳感器的溫度特性研究以及用于壓電式壓力傳感器的溫度補償方法尚處在研究階段,通�；趯嶒灅硕ńY果利用查表法確定不同溫度下的輸出與壓力的對應關系,這種方法需要耗費大量時間,這嚴重限制了壓電式壓力傳感器的推廣使用。因此,本文設計一種可實現(xiàn)溫度補償?shù)膲弘娛轿簜鞲衅?并對其溫度特性開展研究,提出基于熱敏電阻的溫度補償方法。首先設計了基于硅杯式結構的可實現(xiàn)溫度補償?shù)膲弘娛轿簜鞲衅?四周固定的圓形壓電薄膜作為傳感單元感應外界壓力大小,提出了基于熱敏電阻的溫度補償方法。根據(jù)小撓度理論和壓電方程建立傳感器電壓輸出數(shù)學模型。通過仿真分析傳感器薄膜半徑及厚度參數(shù)對其輸出的影響,獲得了優(yōu)化的傳感器結構尺寸。分析了壓電薄膜的模態(tài)及其振型,確定傳感器的工作頻率范圍。搭建了傳感器測試電路及測試平臺,實驗研究了壓電式微壓傳感器的溫度特性,通過對壓電薄膜傳感單元的材料參數(shù),如內阻、電容等進行測試,分析其受溫度影響規(guī)律。通過對傳感器結構進行測試,分析傳感器輸出在不同溫度下隨壓力變化的關系,最終根據(jù)實驗結果得到其性能指標,靈敏度、線性度、精度、以及頻率響應特性等。最后根據(jù)實驗結果分析溫度對傳感器性能的影響規(guī)律,基于熱敏電阻的阻值隨溫度變化而變化的特性提出基于熱敏電阻的溫度補償方法,通過電路設計將熱敏電阻阻值的變化應用于傳感器的輸出中,實現(xiàn)壓電式微壓傳感器的溫度補償。本文所提出的補償方法避免了查表過程中溫度測量帶來的二次誤差,提高了傳感器精度。通過實驗驗證補償方法的可行性。
[Abstract]:With the rapid development of global intelligence, the research and development of a new generation of micro-sensor systems are required, especially the research and development of high-precision and high-sensitivity microsensor devices become more and more urgent. In recent years, piezoelectric materials and their components have been developed rapidly, especially widely used in semiconductor industry. Piezoelectric materials can be used as sensing or driving components according to their piezoelectric effect and inverse piezoelectric effect. Piezoelectric pressure sensors are widely used in bridge monitoring, health monitoring, aerospace, automobile and ship, etc. The improvement of detection accuracy and sensitivity is greatly limited. At present, the temperature characteristics of piezoelectric pressure sensor and the temperature compensation method for piezoelectric pressure sensor are still in the research stage. Usually, based on the experimental calibration results, the corresponding relationship between output and pressure at different temperatures is determined by using the look-up table method. This method takes a lot of time, which seriously limits the popularization of piezoelectric pressure sensors. Therefore, a kind of piezoelectric micro-pressure sensor which can realize temperature compensation is designed in this paper, and its temperature characteristic is studied, and a temperature compensation method based on thermistor is proposed. Firstly, a piezoelectric micro-pressure sensor based on silicon cup structure is designed to realize temperature compensation. A temperature compensation method based on thermistor is proposed, in which the circular piezoelectric thin film is used as the sensing unit to induce the external pressure. According to the theory of small deflection and piezoelectric equation, the mathematical model of sensor voltage output is established. The influence of the film radius and thickness parameters on the output of the sensor is analyzed by simulation, and the optimized sensor size is obtained. The modes and modes of piezoelectric film are analyzed and the working frequency range of the sensor is determined. The temperature characteristics of piezoelectric micro-pressure sensor are studied experimentally. The temperature effect of piezoelectric thin film sensor is analyzed by testing the material parameters such as internal resistance and capacitance. By testing the structure of the sensor, the relationship between the output of the sensor and the pressure at different temperature is analyzed. Finally, the performance index, sensitivity, linearity, precision and frequency response characteristic are obtained according to the experimental results. Finally, according to the experimental results, the influence of temperature on the performance of the sensor is analyzed. Based on the characteristic that the resistance of thermistor varies with temperature, a temperature compensation method based on thermistor is proposed. The temperature compensation of piezoelectric micro-pressure sensor is realized by applying the change of thermistor resistance to the output of the sensor through circuit design. The compensation method proposed in this paper avoids the secondary error caused by the temperature measurement in the process of looking up the table, and improves the precision of the sensor. The feasibility of the compensation method is verified by experiments.
【學位授予單位】：吉林大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：TP212
【相似文獻】
相關期刊論文 前10條
1 陳雨;楊繼昌;丁建寧;;硅微微壓傳感器的設計[J];儀表技術與傳感器;2008年10期
2 溫殿忠;微壓傳感器研制中的幾個技術問題[J];傳感器技術;1988年01期
3 錢浚霞;光纖微壓傳感器[J];工業(yè)儀表與自動化裝置;1995年06期
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8 ;單晶硅微壓傳感器的研制[J];航空學報;1979年04期
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10 楊學昌,張九惠,沈桂芬;微壓傳感器制造中的硅杯腐蝕[J];傳感器技術;1989年06期
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2 尤彩紅;硅壓阻微壓傳感器的設計[D];中北大學;2009年
3 朱同淑;壓電微壓傳感器[D];北京郵電大學;2006年
4 蔡東艷;光纖法布里—珀羅微壓傳感器解調技術研究[D];南京師范大學;2014年
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6 夏文明;硅微微壓傳感器設計研究[D];江蘇大學;2007年
，本文編號：1853172
本文鏈接：http://sikaile.net/kejilunwen/zidonghuakongzhilunwen/1853172.html
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