發(fā)布時間：2018-04-30 07:34

  本文選題：薄膜體聲波諧振器 + 橫向電場激勵�。� 參考：《山東科技大學(xué)》2017年碩士論文

【摘要】：薄膜體聲波諧振器(Film Bulk Acoustic Resonator,FBAR)是一種微型化、頻率高、成本低、可集成的壓電器件,在新一代無線通信系統(tǒng)已經(jīng)取得商業(yè)化的應(yīng)用。此外,FBAR因諧振頻率高而具有高靈敏性,為微質(zhì)量傳感器、壓力傳感器、生化傳感器等傳感器的發(fā)展帶來了新的生機。生化傳感器一般應(yīng)用在液體環(huán)境中,傳統(tǒng)的縱波模式FBAR在液體環(huán)境中Q值衰減較大,而剪切波模式FBAR在液體環(huán)境中能夠保持較高的Q值。本文以橫向電場激勵的剪切波模式FBAR作為研究對象,研究內(nèi)容如下:1.在分析傳統(tǒng)縱波模式FBAR的基礎(chǔ)上,推導(dǎo)了由平行電極激勵的橫向電場FBAR的工作原理,并建立了相應(yīng)的理論模型。利用有限元分析法對器件結(jié)構(gòu)進行了優(yōu)化仿真,設(shè)計多組仿真實驗,系統(tǒng)地研究了電極間距、電極長度和電極寬度對器件性能的影響。發(fā)現(xiàn)電極間距的大小對電極間橫向電場的分布影響較大,進而影響器件的Q值;電極寬度主要影響有效區(qū)域面積內(nèi)質(zhì)點位移分布;電極長度對器件的Q值和電場分布的影響較小。2.基于仿真優(yōu)化結(jié)果,利用微納加工工藝制備了固體裝配型剪切波模式FBAR。并分別測試了器件在空氣、水和磷酸鹽緩沖液三種典型環(huán)境下器件的阻抗特性和導(dǎo)納特性。發(fā)現(xiàn)器件的諧振在磷酸鹽緩沖液中的衰減較大,三種不同測試環(huán)境下的Q值分別為537, 453,183�；贔BAR的MBVD (Modified Butterworth-VanDyke)等效電路模型,提取電路參數(shù),擬合了三種不同測試環(huán)境中所對應(yīng)的等效電路。通過器件的電學(xué)分析,得出溶液的電導(dǎo)性增大器件的損耗。3.基于FBAR諧振頻率對所載裝溶液粘度變化反應(yīng)的特性,面向FBAR的生化傳感器應(yīng)用要求,將制備的剪切波模式FBAR應(yīng)用于凝血實時檢測,驗證了橫向電場激勵的FBAR在生化傳感領(lǐng)域的可行性。外源性凝血發(fā)生時,在凝血酶形成過程中血液粘度無明顯變化,頻率響應(yīng)曲線保持不變。在纖維蛋白原轉(zhuǎn)化為纖維蛋白過程中血液粘度上升,頻率響應(yīng)曲線開始下降。直到纖維蛋白形成結(jié)束后血液的粘度保持不變,頻率響應(yīng)曲線也相應(yīng)保持不變。經(jīng)過多組測試并與醫(yī)用凝血時間檢測儀的結(jié)果對比,確定了響應(yīng)頻率下降到95%的特征點為凝血結(jié)束點。進一步研究了 Ca2+濃度對凝血時間的影響,發(fā)現(xiàn)Ca2+濃度越高,凝血強度越強,凝血時間越少。
[Abstract]:Thin Film Bulk Acoustic Resonator (FBA) is a kind of piezoelectric devices with high frequency and low cost. It has been commercially used in the new generation of wireless communication systems. In addition, FBAR has high sensitivity because of its high resonant frequency, which brings new vitality to the development of micro mass sensor, pressure sensor, biochemical sensor and so on. Biochemical sensors are generally used in liquid environment. The traditional P-wave mode FBAR attenuates greatly in liquid environment, while the shear-wave mode FBAR can maintain a higher Q value in liquid environment. In this paper, the shear wave model FBAR excited by transverse electric field is taken as the research object. The research contents are as follows: 1. Based on the analysis of the traditional P-wave mode FBAR, the working principle of the transverse electric field FBAR excited by parallel electrodes is deduced, and the corresponding theoretical model is established. The finite element method is used to optimize the structure of the device, and several simulation experiments are designed. The effects of electrode spacing, electrode length and electrode width on the performance of the device are systematically studied. It is found that the distance between electrodes has a great influence on the distribution of transverse electric field between electrodes, and then on the Q value of the device, and the electrode width mainly affects the distribution of particle displacement in the effective area. The influence of electrode length on the Q value and electric field distribution of the device is small. Based on the results of simulation and optimization, the solid assembly shear wave mode FBARs were fabricated by micro-nano machining process. The impedance and admittance characteristics of the device in air, water and phosphate buffer were measured. It is found that the resonance of the device attenuates greatly in the phosphate buffer. The Q values of the three different test environments are 537 and 453183 respectively. The equivalent circuit model of MBVD modified Butterworth-Van Dyke based on FBAR is presented. The circuit parameters are extracted and the corresponding equivalent circuits in three different test environments are fitted. Through the electrical analysis of the device, it is concluded that the conductivity of the solution increases the loss of the device. 3. Based on the characteristics of the FBAR resonance frequency response to the viscosity change of the loaded solution and the application requirements of the biochemical sensor for FBAR, the prepared shear wave mode FBAR is applied to the real-time detection of coagulation. The feasibility of FBAR excited by transverse electric field in the field of biochemical sensing is verified. During the process of thrombin formation, the blood viscosity did not change obviously and the frequency response curve remained unchanged. In the process of fibrinogen conversion to fibrin, the blood viscosity increased and the frequency response curve began to decrease. The viscosity of blood remained unchanged and the frequency response curve remained unchanged until the end of fibrin formation. After many groups of tests and compared with the results of the medical coagulation time detector, the characteristic point that the response frequency decreased to 95% was determined to be the end point of coagulation. The effect of Ca2 concentration on coagulation time was further studied. It was found that the higher the Ca2 concentration, the stronger the coagulation intensity and the less the coagulation time.
【學(xué)位授予單位】：山東科技大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：TN751.2;TP212

【參考文獻】

相關(guān)期刊論文 前5條

1 杜波;馬晉毅;蔣欣;江洪敏;徐陽;田本朗;金成飛;司美菊;;薄膜體聲波諧振器有限元仿真與設(shè)計[J];壓電與聲光;2016年04期

2 周斌;高楊;何移;李君儒;何婉婧;;窄帶FBAR帶通濾波器設(shè)計[J];微納電子技術(shù);2013年08期

3 羅慧;徐傳和;朱洪權(quán);鄭連榮;;凝血指標及血栓標志物聯(lián)合檢測在腦梗死中的研究[J];中國實驗診斷學(xué);2012年09期

4 劉建新;蘇磊;袁衛(wèi)英;馮璐瓊;王博;邢家偉;;血液凝固分析儀檢測原理和質(zhì)量控制管理的研究[J];中國醫(yī)學(xué)裝備;2012年05期

5 陳達;李德華;宋宏偉;王翠玲;張玉萍;;橫向電場激勵的剪切波AlN薄膜體聲波諧振器[J];上海交通大學(xué)學(xué)報;2011年03期

相關(guān)博士學(xué)位論文 前2條

1 馮斌;嵌入式電極側(cè)向場激勵FBAR若干問題的研究[D];浙江大學(xué);2013年

2 李侃;FBAR微質(zhì)量傳感器若干關(guān)鍵問題的研究[D];浙江大學(xué);2011年

相關(guān)碩士學(xué)位論文 前6條

1 趙欣茹;新型側(cè)向場激勵薄膜體聲波諧振器的研究[D];浙江大學(xué);2016年

2 胡娜娜;FBAR及其紫外傳感器的研究[D];浙江大學(xué);2015年

3 卞曉磊;新型電調(diào)薄膜體聲波諧振器（FBAR）研究[D];浙江大學(xué);2015年

4 朱琦;基于ZnO壓電薄膜側(cè)向場激勵薄膜體聲波諧振器的研究[D];浙江大學(xué);2014年

5 秦杰;薄膜體聲波傳感器檢測電路的設(shè)計與研究[D];湖北大學(xué);2013年

6 徐航;基于FBAR的微質(zhì)量傳感器的設(shè)計及應(yīng)用技術(shù)研究[D];上海交通大學(xué);2013年

，

本文編號：1823654