本文選題：石墨烯 + 霍爾傳感器��； 參考：《物理學報》2017年21期

【摘要】：本文回顧了石墨烯霍爾傳感器的相關(guān)研究工作.通過改善石墨烯生長轉(zhuǎn)移和霍爾元件的微加工工藝,石墨烯霍爾元件和霍爾集成電路都展示出超越傳統(tǒng)霍爾傳感器的優(yōu)異性能.石墨烯霍爾元件的靈敏度、分辨率、線性度和溫度穩(wěn)定性等重要指標都優(yōu)于傳統(tǒng)商用霍爾元件.通過開發(fā)一套鈍化工藝,霍爾元件的穩(wěn)定性有了明顯提升.結(jié)合石墨烯材料的特點,展示了石墨烯在柔性磁傳感和多功能傳感領(lǐng)域的新穎應(yīng)用.此外,成功實現(xiàn)了石墨烯/硅互補型金屬-氧化物-半導體(CMOS)混合霍爾集成電路,并進行了應(yīng)用展示.通過發(fā)展一套低溫加工工藝(不超過180℃),將石墨烯霍爾元件制備在硅基CMOS芯片的鈍化層上,從而與硅基CMOS電路實現(xiàn)了單片集成.本文的研究結(jié)果表明石墨烯在霍爾磁探測方向擁有重大的性能優(yōu)勢,在產(chǎn)業(yè)化應(yīng)用中有巨大發(fā)展?jié)摿?
[Abstract]:In this paper, the research work of graphene Hall sensor is reviewed. By improving the growth and transfer of graphene and the micro-fabrication process of Hall elements, both graphene Hall elements and Hall integrated circuits show excellent performance over traditional Hall sensors. The sensitivity, resolution, linearity and temperature stability of graphene Hall elements are superior to those of conventional commercial ones. By developing a passivation process, the stability of Hall element has been improved obviously. Combined with the characteristics of graphene materials, the novel applications of graphene in the field of flexible magnetic sensing and multifunctional sensing are demonstrated. In addition, the graphene / silicon complementary metal-oxide-semiconductor CMOS hybrid Hall integrated circuit has been successfully realized, and its application has been demonstrated. By developing a set of low temperature processing technology (no more than 180 鈩，

本文編號：1823570