本文關鍵詞： 自檢測 MEMS振動傳感 sigma-delta模數(shù)轉換　出處：《哈爾濱工業(yè)大學》2017年碩士論文　論文類型：學位論文

【摘要】：幾十年積累的大量設計經(jīng)驗與不斷提升的制造工藝水平促成了 MEMS振動傳感器研究成果的快速更新。同時,這些成果也滲透到了軍品與民品等諸多應用領域。與之相比,振動傳感器的檢測技術發(fā)展相對滯后,且傳統(tǒng)檢測方法已無法適應現(xiàn)在快速精準的檢測需求。在此背景下,本課題設計出一種可實現(xiàn)自檢測功能的振動傳感器系統(tǒng)。自檢測模塊使用純數(shù)字方法構建激勵產(chǎn)生模塊,以產(chǎn)生用于傳感器系統(tǒng)靜態(tài)和動態(tài)參數(shù)檢測的正弦信號,激勵產(chǎn)生模塊與接口電路制造在同一塊芯片上。通過數(shù)字諧振器產(chǎn)生多位正弦波,該信號流經(jīng)sigma-delta調制器轉化成一位碼流,再以靜電力反饋的形式作用在傳感器敏感單元上,從而轉換成等效檢測加速度信號。sigma-delta調制器內嵌在諧振器中,以減小芯片面積和計算時間。通過調節(jié)信號發(fā)生器的參數(shù),正弦信號的幅度和頻率可以精確確定,以適應不同的靜態(tài)和動態(tài)參數(shù)的測試。為驗證自檢測模塊的適用性,本課題設計了一款振動傳感器的閉環(huán)sigma de型數(shù)字接口電路。電路整體采用非限制性結構來降低系統(tǒng)參數(shù)獲取難度。同時引入相位補償器保證穩(wěn)定性。在分析系統(tǒng)中主要失真源的基礎上,對電荷放大器、跟隨緩沖器、相位補償器、積分器、量化器、時序控制電路等子模塊進行晶體管級電路設計。利用SpectreVerilog對電路進行數(shù)模聯(lián)合仿真,接口電路信號帶內輸出噪聲密度小于250nV/Hz~(1/2),諧波失真小于-120dB,總體信噪比為103.6dB,性能滿足需求。同時自檢測模塊工作正常,最小可檢測到45μg的振動加速度信號,檢測范圍-0.7g～+0.7g。
[Abstract]:Decades of accumulated design experience and increasing manufacturing technology have contributed to the rapid updating of the research results of MEMS vibration sensors. At the same time, these achievements have also penetrated into many application fields, such as military and civilian products. The detection technology of vibration sensor is lagging behind, and the traditional detection method can not meet the needs of rapid and accurate detection. In this paper, a vibration sensor system which can realize the function of self-detection is designed. The self-detection module uses the pure digital method to construct the excitation generation module to generate sinusoidal signals for the static and dynamic parameter detection of the sensor system. The excitation generation module is manufactured on the same chip as the interface circuit. The digital resonator generates a multi-bit sine wave, which flows through the sigma-delta modulator into a bit stream, and then acts on the sensor sensitive unit in the form of hydrostatic feedback. In order to reduce the chip area and calculate time, the amplitude and frequency of sinusoidal signal can be determined accurately by adjusting the parameters of the signal generator. In order to adapt to the test of different static and dynamic parameters, to verify the applicability of the self-detection module, In this paper, a closed loop sigma de digital interface circuit for vibration sensor is designed. The whole circuit adopts unrestricted structure to reduce the difficulty of obtaining system parameters. At the same time, phase compensator is introduced to ensure stability. On the basis of the main distortion sources, The transistor level circuit is designed for charge amplifier, follower buffer, phase compensator, integrator, quantizer, timing control circuit and so on. The circuit is simulated by SpectreVerilog. The in-band output noise density of the interface circuit is less than 250nV / Hz / 2, the harmonic distortion is less than -120dB, the overall signal-to-noise ratio is 103.6 dB, and the performance of the self-detection module is normal, the minimum vibration acceleration signal of 45 渭 g can be detected, and the detection range is -0.7g ~ 0.7g.
【學位授予單位】：哈爾濱工業(yè)大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：TP212

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本文編號：1554503