本文關(guān)鍵詞： 時(shí)柵傳感器 測(cè)量精度 誤差分離 抑制方法　出處：《重慶理工大學(xué)》2017年碩士論文　論文類(lèi)型：學(xué)位論文

【摘要】：磁場(chǎng)式時(shí)柵位移傳感器是基于“時(shí)空轉(zhuǎn)換”思想而研究的一種位移傳感器,以磁場(chǎng)為介質(zhì)將空間位移量轉(zhuǎn)換為時(shí)間量,從而實(shí)現(xiàn)對(duì)角位移或直線位移的測(cè)量。磁場(chǎng)式時(shí)柵位移傳感器作為一種精密位移測(cè)量傳感器,測(cè)量精度是評(píng)判該傳感器工作性能的一項(xiàng)重要指標(biāo),如何提高測(cè)量精度一直是該類(lèi)型傳感器的研究重點(diǎn)。因此,本課題對(duì)磁場(chǎng)式時(shí)柵位移傳感器中誤差分離及各類(lèi)誤差抑制方法的研究切合其研究重點(diǎn),將有助于推動(dòng)該類(lèi)時(shí)柵位移傳感器的進(jìn)一步發(fā)展。國(guó)內(nèi)外對(duì)位移傳感器的誤差分析與抑制有一定研究基礎(chǔ),誤差主要分機(jī)械、電氣及安裝三方面。機(jī)械誤差源于機(jī)械加工及加工元件參數(shù)不合理,可分為齒形、齒距、對(duì)極數(shù)、定轉(zhuǎn)子齒數(shù)等;電氣誤差源于信號(hào)處理電路,可分為激勵(lì)信號(hào)處理誤差、弱感應(yīng)信號(hào)處理誤差等;安裝誤差源于傳感器機(jī)械結(jié)構(gòu)的安裝不理想,主要集中于傳感單元的安裝。誤差抑制方法主要分硬件處理方法和軟件處理方法。硬件處理方法通過(guò)改變傳感器機(jī)械或電氣的參數(shù)達(dá)到提高測(cè)量精度的目的,如光柵采用精密刻線,旋轉(zhuǎn)變壓器優(yōu)化齒形、齒距、對(duì)極數(shù)、定轉(zhuǎn)子齒數(shù)比例等;軟件處理方法是通過(guò)軟件方式實(shí)現(xiàn)減小測(cè)量誤差的算法,從而提高測(cè)量精度,如諧波修正法及逐點(diǎn)查表修正法等。硬件處理方法主要是從傳感源頭上抑制了測(cè)量誤差的產(chǎn)生,所以是提高磁場(chǎng)式時(shí)柵位移傳感器測(cè)量精度優(yōu)先考慮及采用的方法,但需要對(duì)測(cè)量誤差的來(lái)源做出較為準(zhǔn)確的判斷;軟件處理方法不僅誤差抑制效果顯著,而且具有操作簡(jiǎn)單、成本低等優(yōu)勢(shì)。由于二者各有利弊,因而應(yīng)綜合考慮并合理應(yīng)用兩種方法。磁場(chǎng)式時(shí)柵位移傳感器的測(cè)量誤差主要包含0、1、2、3次及高次諧波成分,作者認(rèn)為這種規(guī)律性強(qiáng)且固定存在的誤差,大部分是可歸結(jié)到傳感器系統(tǒng)中某環(huán)節(jié)的,所以本課題以此為切入點(diǎn),結(jié)合研究現(xiàn)狀,本課題取長(zhǎng)補(bǔ)短,主要從以下四方面對(duì)時(shí)柵測(cè)量誤差進(jìn)行研究。(1)分離了激勵(lì)信號(hào)源誤差,激勵(lì)信號(hào)源的幅值和相位誤差直接影響感應(yīng)信號(hào)相位變化的線性度。為此,基于FPGA設(shè)計(jì)了采用閉環(huán)控制的高精度激勵(lì)信號(hào)源。實(shí)驗(yàn)表明激勵(lì)信號(hào)源精度提高,減小了傳感器的的測(cè)量誤差。(2)從理論上分離齒不均性對(duì)測(cè)量帶來(lái)的誤差,建立數(shù)學(xué)模型,并研究了抑制其誤差的方法。然后,通過(guò)對(duì)比采用了不同加工工藝的傳感器的測(cè)量性能,驗(yàn)證了定轉(zhuǎn)子齒的不均勻性對(duì)傳感器測(cè)量精度的影響。(3)分離了方波形成模塊誤差,并應(yīng)用了改進(jìn)型弱信號(hào)處理方法。為解決絕對(duì)零點(diǎn)偏移問(wèn)題所帶來(lái)的測(cè)量誤差,引入了差動(dòng)比較技術(shù),實(shí)驗(yàn)表明差動(dòng)技術(shù)抑制了時(shí)柵測(cè)量中的隨機(jī)誤差;(4)針對(duì)實(shí)驗(yàn)結(jié)果與理論數(shù)據(jù)存在一定差異的問(wèn)題,也即解決模塊誤差的同時(shí)又帶來(lái)新的誤差的問(wèn)題,對(duì)時(shí)柵各模塊誤差系統(tǒng)地進(jìn)行了分析,采用整體抑制手段,如弱信號(hào)處理方法研究、標(biāo)定方法研究、補(bǔ)償算法研究等。課題以變磁阻型磁場(chǎng)式時(shí)柵位移傳感器為研究對(duì)象,對(duì)其他磁場(chǎng)式、電場(chǎng)式及光場(chǎng)式時(shí)柵也據(jù)有適用性。
[Abstract]:Field type time grating displacement sensor is based on the space-time conversion of ideas and research a displacement sensor with magnetic field as medium transformation space displacement is the amount of time, so as to realize the measurement of angular displacement or linear displacement. The magnetic field type time grating displacement sensor as a precision displacement measurement sensor, the measurement accuracy is one of the most important the performance evaluation of the sensor, how to improve the measurement accuracy of this type of sensor has been a focus of research. Therefore, the research of practical error of grating displacement sensor and separation of all kinds of error suppression method of magnetic field when the research focus, will help promote the further development of the time grating displacement sensor error at home and abroad. The displacement sensor analysis has certain research foundation and error suppression, mainly mechanical, electrical and mechanical installation. Three error sources in mechanical processing and Hydraulic component parameters are not reasonable, can be divided into the tooth shape, tooth pitch, the number of poles, stator and rotor teeth; electrical error due to the signal processing circuit, can be divided into processing error excitation signal, weak induction signal processing error; installation error due to the mechanical structure of the sensor installation is not ideal, mainly focus on the sensor unit installation. Error suppression method is divided into hardware processing method and software processing method. The hardware processing method to improve the precision of measurement by changing the parameters of mechanical or electrical sensor, such as grating precision reticle, rotary transformer optimized tooth, tooth pitch, the number of poles, stator and rotor tooth number ratio; software processing method is to achieve the measurement errors of the algorithm by software method, so as to improve the measurement accuracy, such as harmonic correction method and pointwise look-up table method. The hardware processing method is mainly from the sensing source suppression measurement error So, when the magnetic field is to improve the measurement accuracy of grating displacement sensor priority method and the sources of measurement error but need to make more accurate judgments; software processing method not only the error suppression effect, and has the advantages of simple operation, low cost advantages. Because the two have advantages and disadvantages, and therefore should be considered the reasonable application of the two methods. The measurement error of field type time grating displacement sensor consists mainly of 0,1,2,3 and harmonic components, the author thinks that the error of this strong regularity and fixed there, most can be attributed to the sensor is a link in the system, so this article as a starting point, combined with the research status of this topic, learn from each other, mainly from the following four aspects of time grating measurement error. (1) isolated signal source error, amplitude and phase error excitation signal source directly affects the induction signal No change of phase linearity. Therefore, FPGA is designed by using high precision excitation signal source based on closed loop control. The experimental results show that the improved precision of the excitation signal source, reduces the measurement error. (2) were not separated teeth on the measurement error brought from the theory, the mathematical model and study method to eliminate the error. Then, the measurement performance of the sensor using a different processing by comparison, verify the effect of non-uniformity of stator and rotor tooth on the measurement accuracy of the sensor. (3) isolated Fang Bo formation module error, and the application of improved weak signal processing method. The measurement error brought to solve absolute zero offset problem, introduces the differential comparison technology, experiments show that the differential technology inhibited the random errors in the measurement of the gate; (4) for there are some differences between the experimental results and the theoretical data, namely solving module The error also brings new error, the error of time grating module are systematically analyzed. The overall suppression means, such as weak signal processing methods, calibration method, compensation method and so on. Subject to a variable reluctance type magnetic field type time grating displacement sensor as the research object, the other type of magnetic field, electric field type and light field type time grating also has applicability.

【學(xué)位授予單位】：重慶理工大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類(lèi)號(hào)】：TP212

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