【摘要】：隨著化學(xué)計(jì)量學(xué)和計(jì)算機(jī)技術(shù)的快速發(fā)展,近紅外光譜儀突破了其在傳統(tǒng)農(nóng)業(yè)中的應(yīng)用局限,廣泛應(yīng)用于臨床醫(yī)學(xué)、石油化工、礦物質(zhì)以及國防等領(lǐng)域,成為很多領(lǐng)域質(zhì)量控制和品質(zhì)分析的重要工具。哈達(dá)瑪變換光譜儀以其測(cè)量速度快、信噪比高、分辨率高等優(yōu)勢(shì)成為微型光譜儀的研究熱點(diǎn)。而隨著研究和應(yīng)用領(lǐng)域需求的不斷提高,目前哈達(dá)瑪變換近紅外光譜儀亟待解決的問題是:如何在保持系統(tǒng)高分辨率的同時(shí)提高光譜儀的能量利用率并擴(kuò)寬其工作光譜范圍。本論文致力于這一問題,旨在通過改進(jìn)光譜儀結(jié)構(gòu),實(shí)現(xiàn)哈達(dá)瑪變換近紅外光譜儀的高分辨率、高能量利用率和寬工作譜段,以滿足更多研發(fā)和應(yīng)用領(lǐng)域的需求。具體內(nèi)容如下:針對(duì)目前哈達(dá)瑪變換光譜儀分辨率較低的現(xiàn)狀,分別研究了入射狹縫、準(zhǔn)直透鏡和成像透鏡對(duì)系統(tǒng)分辨率的影響,研究了光柵衍射效率隨入射波長與入射角度的變化情況,綜合考慮系統(tǒng)體積與系統(tǒng)分辨率,選擇最佳參數(shù)進(jìn)行系統(tǒng)優(yōu)化設(shè)計(jì),對(duì)光柵多級(jí)次衍射進(jìn)行分析,設(shè)計(jì)并搭建原理樣機(jī)進(jìn)行實(shí)驗(yàn)驗(yàn)證,實(shí)驗(yàn)測(cè)得的系統(tǒng)分辨率與模擬結(jié)果一致。該設(shè)計(jì)使光譜儀體積更小,分辨率更高。為提高入射光通量,提出兩種改進(jìn)的光譜儀光學(xué)系統(tǒng)結(jié)構(gòu)。第一種為在入射狹縫前添加集光結(jié)構(gòu),集光結(jié)構(gòu)借助柱面鏡將圓形光束整形為與入射狹縫平行的帶狀光束。實(shí)驗(yàn)表明,相同條件下,該裝置可以使通過入射狹縫的能量提高14.2%。為減少狹縫導(dǎo)致的大量光能量的遮攔,第二種改進(jìn)型的光譜儀用光纖代替入射狹縫,用柱面鏡作為成像透鏡,對(duì)光柵色散后的圓形光束進(jìn)行整形,使光纖在DMD上的像呈帶狀分布,提高了光譜儀的能量利用率和分辨率;采用M型對(duì)稱光路設(shè)計(jì),使最終聚焦到單點(diǎn)探測(cè)器上的光斑直徑僅180?m,減小探測(cè)器體積,節(jié)約成本。為了在保持系統(tǒng)高分辨率的同時(shí)擴(kuò)寬光譜儀的工作光譜范圍,提出兩種結(jié)構(gòu)不同的光譜折疊哈達(dá)瑪變換光譜儀。第一種光譜儀利用兩個(gè)有一定夾角的子光柵將光源發(fā)出的波長為800~2000nm的光譜二維折疊分布在DMD表面。對(duì)光柵衍射效率隨波長和入射角關(guān)系進(jìn)行模擬,以確定兩個(gè)子光柵的最佳入射角,模擬表明使用兩個(gè)子光柵可以提高光柵在整個(gè)波段的平均衍射效率。系統(tǒng)整體優(yōu)化設(shè)計(jì)后,光譜儀在全波段的分辨率為5.5nm。為減少系統(tǒng)雜散光,對(duì)兩個(gè)子光柵的多級(jí)次衍射、DMD的二維衍射進(jìn)行分析。第二種光譜儀通過自由曲面透鏡將光源發(fā)出的寬波段光準(zhǔn)直為兩束波長不同、方向不同的平行光束,用一個(gè)平面光柵進(jìn)行色散,實(shí)現(xiàn)了波長800~2400nm的光譜折疊。通過裁剪法建立自由曲面數(shù)學(xué)模型,利用Rounge-Kutta法求得自由曲面離散值,進(jìn)而構(gòu)建自由曲面透鏡。該光譜儀在全波段的模擬分辨率約為10nm。對(duì)兩種結(jié)構(gòu)的光譜儀進(jìn)行比較可以發(fā)現(xiàn),當(dāng)光譜折疊次數(shù)增多時(shí),自由曲面準(zhǔn)直的光譜折疊光譜儀在體積和能量利用率方面更占優(yōu)勢(shì)。設(shè)計(jì)結(jié)果表明,通過DMD上的光譜折疊,可以很好的解決由于DMD的尺寸限制導(dǎo)致的光譜分辨率與工作光譜范圍的矛盾。
[Abstract]:With the rapid development of the chemometrics and the computer technology, the near-infrared spectrometer breaks through the limitation of its application in the traditional agriculture, and is widely used in the fields of clinical medicine, petrochemical industry, minerals and national defense, and has become an important tool for quality control and quality analysis in many fields. The Hadamard transform spectrometer has the advantages of fast measuring speed, high signal-to-noise ratio, high resolution and so on. With the increasing demand of research and application, the problem to be solved in the present Hadamard transform near-infrared spectrometer is how to improve the energy utilization of the spectrometer while keeping the system's high resolution and broaden its working spectral range. The aim of this paper is to improve the structure of the spectrometer, to realize the high resolution, high energy utilization rate and wide working spectrum of the Hadamard transform near-infrared spectrometer, so as to meet the needs of more research and development and application fields. The effect of the incident slit, the collimating lens and the imaging lens on the resolution of the system is studied. The change of the diffraction efficiency of the grating with the incident angle and the incident angle is studied. The system volume and the system resolution are considered, the optimal parameters are selected for system optimization design, and the multi-stage diffraction of the grating is analyzed, the principle prototype is designed and built, and the experimental verification is carried out, and the system resolution measured by the experiment is consistent with the simulation result. The design makes the volume of the spectrometer smaller and the resolution is higher. In ord to improve that flux of the incident light, two improved optical system structure of the spectrometer are proposed. The first is to add a light-collecting structure before the entrance slit, and the light-collecting structure shapes the circular light beam into a strip-shaped light beam parallel to the incident slit by means of a cylindrical mirror. The experiment shows that the energy of the incident slit can be increased by 14.2% under the same conditions. in order to reduce the shielding of a large amount of light energy caused by the slit, the second improved spectrometer replaces the incident slit with an optical fiber, uses a cylindrical mirror as an imaging lens, and shapes the circular light beam after the grating dispersion, so that the image of the optical fiber on the DMD is in a band-shaped distribution, The energy utilization rate and the resolution of the spectrometer are improved; the M-shaped symmetrical optical path is adopted to design the spot diameter of the final focusing to the single-point detector only by 180-m, so that the volume of the detector is reduced, and the cost is saved. In order to broaden the operating spectrum of the spectrometer while maintaining the high resolution of the system, two different spectral folding Hadamard transform spectrometers are proposed. The first spectrometer uses two sub-gratings with a certain included angle to distribute the two-dimensional folding of the light source with a wavelength of 800-2000 nm to the surface of the DMD. The diffraction efficiency of the grating is simulated with the relation of the wavelength and the incident angle to determine the optimal incident angle of the two sub-gratings, and the simulation shows that the average diffraction efficiency of the grating in the whole band can be improved by using the two sub-gratings. After the overall optimization of the system, the resolution of the spectrometer in the full-band is 5.5 nm. In order to reduce the stray light of the system, the two-dimensional diffraction of the two sub-gratings and the two-dimensional diffraction of the DMD are analyzed. The second spectrometer is used for collimating the wide-band light emitted by the light source into two parallel beams with different wavelengths and different directions by the free-surface lens, and the dispersion is carried out by a plane grating, so that the spectrum folding with the wavelength of 800-2400 nm is realized. The free-surface mathematical model is established by the cutting method, and the free-surface discrete value is obtained by the method of the Rounge-Kutta method, and the free-surface lens is further constructed. The spectrometer has a simulated resolution of about 10 nm in a full band. It can be found that the spectral folding spectrometer with free-surface collimation is more dominant in terms of volume and energy utilization when the number of times of the spectral folding is increased. The results show that the spectral resolution due to the size limitation of the DMD can be well solved by the spectral folding on the DMD.
【學(xué)位授予單位】：中國科學(xué)院研究生院(長春光學(xué)精密機(jī)械與物理研究所)
【學(xué)位級(jí)別】：博士
【學(xué)位授予年份】：2016
【分類號(hào)】：TH744.1

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