本文選題：外差干涉儀 + 非線性�。� 參考：《上海大學(xué)》2015年博士論文

【摘要】：外差激光干涉儀是20世紀(jì)70年代初發(fā)展起來(lái)的測(cè)量?jī)x器,它能以簡(jiǎn)單的相位比較測(cè)量達(dá)到很高的準(zhǔn)確度,而且結(jié)構(gòu)簡(jiǎn)單、抗干擾能力強(qiáng)、同時(shí)檢測(cè)方便,所以它在精密測(cè)量技術(shù)領(lǐng)域中扮演著重要的角色。進(jìn)入21世紀(jì),隨著微電子、微機(jī)電系統(tǒng)和超精密加工等技術(shù)的迅速發(fā)展,亞微米到納米精度的測(cè)量已經(jīng)成為迫切需要解決的問(wèn)題。對(duì)于納米范圍的測(cè)量,外差激光干涉儀具有獨(dú)特的優(yōu)勢(shì),但其本身固有的非線性誤差使其難以實(shí)現(xiàn)納米精度的測(cè)量。因此,外差干涉儀非線性補(bǔ)償方法與技術(shù)的研究是當(dāng)今一個(gè)重要的課題。本論文通過(guò)對(duì)橢圓偏振光在外差干涉儀光臂中產(chǎn)生混頻現(xiàn)象以及相位比較原理的研究,明確地給出了線性相位移、非線性相位移和干涉儀非線性的定義以及干涉儀兩個(gè)基本的測(cè)量關(guān)系。通過(guò)理論分析和定量測(cè)試研究了各種可能的光學(xué)原因?qū)Ψ蔷�性相位移的影響。在研究外差干涉儀非線性相位移模型和基本測(cè)量關(guān)系的基礎(chǔ)上,提出了一種基于相位補(bǔ)償?shù)姆蔷�性消除方法。對(duì)該方法進(jìn)行了理論證明和確切的描述。進(jìn)而研究了非線性相位補(bǔ)償系統(tǒng)的性能和相位補(bǔ)償方法實(shí)現(xiàn)的關(guān)鍵技術(shù),并通過(guò)實(shí)驗(yàn)驗(yàn)證了該方法對(duì)消除外差干涉儀一階或高階的非線性誤差是有效的。用這種簡(jiǎn)單的檢測(cè)方法,非線性誤差容易地從內(nèi)部消除。論文的主要研究工作和成果有如下幾個(gè)方面:1.從描述入射光的兩個(gè)任意橢圓偏振光的公式入手,介紹了外差干涉儀的基本測(cè)量原理;通過(guò)對(duì)橢圓偏振光在干涉儀光臂中產(chǎn)生混頻現(xiàn)象并導(dǎo)致非線性相位移的研究,確切地給出了線性相位移、非線性相位移和干涉儀非線性的定義;通過(guò)對(duì)非線性特征和相位比較原理的研究,給出了干涉儀兩個(gè)基本的測(cè)量關(guān)系。2.通過(guò)理論分析和定量測(cè)試研究了各種可能的光學(xué)原因?qū)Ψ蔷�性相位移的影響。重點(diǎn)分析了波片誤差對(duì)非線性的影響,給出了“波片誤差影響非線性的四點(diǎn)結(jié)論”;應(yīng)用“雙相位測(cè)量法”對(duì)不同的外差干涉儀非線性相位移進(jìn)行了測(cè)試,并得出了外差干涉儀非線性的數(shù)量界限(非線性誤差可達(dá)十幾至二十個(gè)納米左右)。3.在研究外差干涉儀非線性相位移模型和基本測(cè)量關(guān)系的基礎(chǔ)上,提出了一種基于相位補(bǔ)償?shù)姆蔷�性消除方法并對(duì)該方法進(jìn)行了理論證明和確切的描述。該方法的實(shí)質(zhì)是依據(jù)相位差信號(hào)通過(guò)控制位于干涉儀光電接收器前面的偏振片按設(shè)定方向旋轉(zhuǎn)相應(yīng)角度,而實(shí)現(xiàn)對(duì)非線性相位移的補(bǔ)償,最終達(dá)到消除干涉儀非線性誤差的目的;從分析二向色性偏振片的特性入手,對(duì)非線性相位補(bǔ)償方法進(jìn)行了分析,給出了具有相位補(bǔ)償?shù)姆蔷�性相位移的數(shù)學(xué)模型,給出了偏振片旋轉(zhuǎn)角度與補(bǔ)償非線性相位移的規(guī)律與關(guān)系。4.通過(guò)對(duì)光路結(jié)構(gòu)的分析,給出了干涉儀在理想狀況和實(shí)際狀況下,隨著測(cè)量環(huán)境和測(cè)量進(jìn)程的變化,干涉儀相位誤差的分布。通過(guò)對(duì)干涉測(cè)量系統(tǒng)的分析研究,給出了系統(tǒng)輸出與輸入關(guān)系以及偏振片旋轉(zhuǎn)的角速度與拍頻的關(guān)系。通過(guò)對(duì)系統(tǒng)中主要光學(xué)元件特性的分析,給出了激光光源、普通分光鏡、偏振分光鏡、角錐棱鏡、1/4波片和偏振片的選型。5.根據(jù)非線性相位補(bǔ)償方法的基本原理,設(shè)計(jì)了試驗(yàn)系統(tǒng)的硬件框架和測(cè)控系統(tǒng)主程序的流程圖。設(shè)計(jì)了電流環(huán)PWM伺服放大器和PID控制器。建立了偏振片伺服控制系統(tǒng)的模型并研究了基本特性。6.對(duì)非線性相位補(bǔ)償方法進(jìn)行了驗(yàn)證性的實(shí)驗(yàn)研究工作。設(shè)計(jì)了實(shí)驗(yàn)平臺(tái),分別給出了無(wú)相位補(bǔ)償試驗(yàn)和有相位補(bǔ)償試驗(yàn)的方法。給出了試驗(yàn)數(shù)據(jù)及處理的方法,并對(duì)試驗(yàn)結(jié)果進(jìn)行了分析與總結(jié)。
[Abstract]:Heterodyne laser interferometer is a measuring instrument developed at the beginning of the 1970s. It can achieve high accuracy with simple phase comparison measurement, and it has simple structure, strong anti-interference ability and convenient detection. So it plays an important role in the precision measurement technology field. In twenty-first Century, with microelectronics and microelectromechanical systems The measurement of submicron to nanometer precision has become an urgent problem to be solved in the rapid development of ultra precision machining and other technologies. For the measurement of nano scale, heterodyne laser interferometer has unique advantages, but its inherent nonlinear error makes it difficult to measure the nanometer precision. Therefore, the heterodyne interferometer is nonlinear complementarity. The research of compensation method and technology is an important topic. Through the study of the phenomenon of mixing frequency of elliptically polarized light in the optical arm of heterodyne interferometer and the principle of phase comparison, the relationship between linear phase shift, nonlinear phase shift and interferometer nonlinearity and the two basic measurement relations of interferometer are given. The effects of various possible optical reasons on the nonlinear phase shift are studied by theoretical analysis and quantitative testing. On the basis of the study of the nonlinear phase shift model and the basic measurement relation of the heterodyne interferometer, a nonlinear elimination method based on phase compensation is proposed. The key technology of the performance of the nonlinear phase compensation system and the implementation of the phase compensation method is investigated. It is proved by experiments that the method is effective for eliminating the first or high order nonlinear errors of the heterodyne interferometer. The nonlinear error is easily eliminated from the inner part with this simple method. The main research work and results of the paper are the results of the paper. The following aspects are as follows: 1. the basic measurement principle of the heterodyne interferometer is introduced from two arbitrary elliptic polarized light formulae describing the incident light, and the study of the nonlinear phase shift of the elliptically polarized light in the interferometer optical arm leads to the exact linear phase shift, the nonlinear phase shift and the interferometer. Linear definition; through the study of nonlinear characteristics and phase comparison principle, two basic measurement relations of interferometer.2. are given. The influence of various possible optical reasons on the nonlinear phase shift is studied by theoretical analysis and quantitative test. The influence of wave plate error on the nonlinearity is analyzed, and the influence of wave plate error is given. The nonlinear phase shift of different heterodyne interferometers is tested by using the "two phase four point" method. The nonlinear phase shift of the heterodyne interferometer is obtained, and the nonlinear phase shift model and the basic measurement relation of the heterodyne interferometer are studied by the nonlinear error of the heterodyne interferometer (the nonlinear error can reach more than ten to twenty nanometers).3.. On the basis of this, a nonlinear elimination method based on phase compensation is proposed and a theoretical proof and exact description of the method are made. The essence of this method is to compensate for the nonlinear phase shift by controlling the phase difference signal to rotate the corresponding angle in the setting direction by controlling the polarizer in front of the interferometer photoelectric receiver. Finally, the purpose of eliminating the nonlinear error of the interferometer is achieved. From the analysis of the characteristics of the two chromatic polarizer, the nonlinear phase compensation method is analyzed. The mathematical model of the nonlinear phase shift with phase compensation is given. The law of the rotation angle of the polarizer and the compensation for the nonlinear phase shift is given and the relation.4. is passed through the light. The analysis of road structure gives the distribution of interferometer phase error with the change of measuring environment and measurement process in ideal condition and actual condition. Through the analysis and study of interference measurement system, the relationship between the output and input of the system and the relationship between the angular velocity of the polarizer rotation and the beat frequency are given. In order to analyze the characteristics of optical elements, the laser light source, ordinary optical splitter, polarization splitter, pyramid prism, 1/4 wave plate and polarizer are selected.5. according to the basic principle of the nonlinear phase compensation method, the hardware frame of the test system and the flow chart of the main program of the measurement and control system are designed. The current loop PWM servo amplifier and the PID control are designed. The model of the polarizer servo control system is set up and the experimental research on the basic characteristic.6. has been studied. The experimental platform is designed, the phase compensation test and the phase compensation test are given respectively. The test data and the method of processing are given, and the test results are also given. The analysis and summary are carried out.
【學(xué)位授予單位】：上海大學(xué)
【學(xué)位級(jí)別】：博士
【學(xué)位授予年份】：2015
【分類(lèi)號(hào)】：TH744.3
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本文編號(hào)：2056457