本文選題：硅微諧振加速度計(jì) + 工程化��； 參考：《中國慣性技術(shù)學(xué)報(bào)》2016年02期

【摘要】：硅微諧振加速度計(jì)因具有小體積優(yōu)勢和高精度潛力,成為硅微慣性傳感器研制的熱點(diǎn)之一。工程化設(shè)計(jì)是硅微諧振加速度計(jì)從原理樣機(jī)向成熟產(chǎn)品轉(zhuǎn)化過程中的關(guān)鍵步驟之一。在分析硅微諧振加速度計(jì)工作機(jī)理的基礎(chǔ)上,從工程實(shí)用化設(shè)計(jì)角度出發(fā),提出了一種高精度硅微諧振加速度計(jì)工程化設(shè)計(jì)方法。分別從系統(tǒng)設(shè)計(jì)、結(jié)構(gòu)設(shè)計(jì)、控制電路設(shè)計(jì)和測試與補(bǔ)償技術(shù)等方面進(jìn)行了分析和對(duì)比,討論了誤差來源與改進(jìn)方法。測試表明,設(shè)計(jì)的高精度硅微諧振加速度計(jì)質(zhì)量塊基頻大于3 k Hz,諧振音叉中心頻率約18 k Hz,標(biāo)度因數(shù)大于100 Hz/g,量程±40 g,死區(qū)小于0.67 mg,帶寬大于200 Hz,振動(dòng)整流誤差0.344 mg,零位一次通電穩(wěn)定性優(yōu)于50μg,測試結(jié)果基本滿足工程化應(yīng)用指標(biāo)。
[Abstract]:Silicon micro resonant accelerometers have become one of the hotspots in the development of silicon micro inertial sensors due to their small volume advantages and high precision potential. Engineering design is one of the key steps in the process of transforming silicon micro resonant accelerometer from principle prototype to mature product. Based on the analysis of the working mechanism of silicon microresonant accelerometer and from the point of view of practical engineering design, an engineering design method of high precision silicon micro resonant accelerometer is proposed. This paper analyzes and compares the system design, structure design, control circuit design, test and compensation technology, and discusses the error sources and improvement methods. Tests show that The mass frequency of the high precision silicon microresonant accelerometer is more than 3 kHz, the central frequency of the resonant tuning fork is about 18 kHz, the scaling factor is more than 100 Hz / g, the range is 鹵40 g, the dead zone is less than 0.67 mg, the bandwidth is more than 200Hz, the error of vibration rectification is 0.344 mg, and the zero position is zero. The stability of the primary power supply is better than 50 渭 g, and the test results basically meet the requirements of engineering application.
【作者單位】： 北京航天控制儀器研究所;
【基金】：國防基礎(chǔ)科研項(xiàng)目(A0320110013)
【分類號(hào)】：TH824.4

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