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靜電微梁器件的降階模型及其動(dòng)態(tài)Pull-in不穩(wěn)定性研究

發(fā)布時(shí)間:2018-06-23 07:50

  本文選題:Pull-in不穩(wěn)定性 + 模態(tài)分析 ; 參考:《儀表技術(shù)與傳感器》2016年05期


【摘要】:微器件的設(shè)計(jì)需要利用計(jì)算機(jī)技術(shù)快速準(zhǔn)確仿真其動(dòng)態(tài)特性。以器件中結(jié)構(gòu)件的模態(tài)振型函數(shù)作為基函數(shù),結(jié)合Galerkin映射建立靜電-結(jié)構(gòu)耦合微梁器件的自由度縮減模型,該降階模型能考慮初始軸向載荷、大變形幾何非線性效應(yīng)對器件基頻及動(dòng)態(tài)特性的影響。在Simulink~汶中建立單模態(tài)模型,并對器件的Pull-in過程進(jìn)行動(dòng)態(tài)仿真,分析了有阻尼和無阻尼情況下,靜電器件動(dòng)態(tài)Pull-in的分叉現(xiàn)象。
[Abstract]:The design of microdevices requires the use of computer technology to quickly and accurately simulate its dynamic characteristics. Taking the modal mode function of the structure as the basis function and combining the Galerkin map, the reduced degree of freedom model of the electrostatic-structural coupling microbeam device is established. The reduced order model can take into account the initial axial load. The effect of geometric nonlinear effect of large deformation on the fundamental frequency and dynamic characteristics of the device. A single mode model is established in Simulink- Wen, and the dynamic simulation of the pull-in process of the device is carried out. The bifurcation phenomenon of the electrostatic device under the condition of damping and no damping is analyzed.
【作者單位】: 福州大學(xué)機(jī)械工程及自動(dòng)化學(xué)院;
【基金】:國家自然科學(xué)基金資助項(xiàng)目(51205062) 福建省自然科學(xué)基金資助項(xiàng)目(2013J01182)
【分類號】:TH703


本文編號:2056400

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