【摘要】：設(shè)計了一種倒裝焊結(jié)構(gòu),用于340 GHz的肖特基二極管探測器.探測單元是基于砷化鎵(GaA s)工藝設(shè)計的.薄膜陶瓷支撐層旨在為太赫茲檢測單元提供封裝.通常,導(dǎo)電膠用作天線和輸出電路之間的附接.分別對倒裝焊結(jié)構(gòu)和無倒裝焊結(jié)構(gòu)(類引線鍵合結(jié)構(gòu))模型對太赫茲接收天線性能的影響進(jìn)行研究.為了比較的目的,使用相同的測試系統(tǒng)表征FC結(jié)構(gòu)模型和無FC結(jié)構(gòu)模型(引線鍵合結(jié)構(gòu)).通過引線鍵合與倒裝焊測試增益的結(jié)果比較,表明倒裝焊結(jié)構(gòu)可以作為大規(guī)模太赫茲檢測陣列封裝的低成本解決方案.
【圖文】：

singahighfrequencystructuresimulator(HFSS)［8］，wepro-posedasiliconlensforcouplingsimulationwithandwithouttheFCstructuremodeltocarryoutacomparisonbetweenthetwostructures．Foraperformancecompari-son，asinglepixeloftheFCmodelwasfabricatedandmeasured，andtheradiationpatternresultswerethentestedat340GHz．TheFCstructuremodelshowedgoodagreementbetweenitsmeasuredandsimulatedradiationpatternsat340GHz．Fig．1Illustrationofadipolefeedinacircularcy-lindricalcavitywiththeradiusr圖1偶極子饋電點(diǎn)在一個半徑為r的圓柱空腔模型1AnalysisofinfinitecircularcylindercavityItcanhelpuseasilydeterminethesensitivitypa-rameterforthedesignedmodeltoanalyzetheelectromag-neticfielddistributiononthecircularcylindercavity．Thesolutionassumesthatthecavityisembeddedinaninfinitemetalliccircularcylinderwiththeradiusρ=r(seeFig．1)．Inthissection，thefiniteelementmethodisusedtomodelthecavity，whiletheradiationconditionisexpressedusingaboundaryintegralequation．Thevari-ationalapproach［9］andmethodofweightedresiduals［10］canbeusedtoaccomplishthehybridfiniteelement-boundaryintegralequations．Thederivationprocessbe-ginswiththethree-dimensionalvectorwaveequationthatisdeterminedintermsofthetotalelectricfield:鄀×μ=－1γ·鄀[]×E－k20εγ·E=－jk0Z0Jint，(1)whereEisthetotalelectricfield，k0isthefree-spacewavenumber，，Z0isthefree-spaceimpedance，ji

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