【摘要】：精密定位技術(shù)是超精密加工、大容量數(shù)據(jù)存儲(chǔ)、納米技術(shù)及精密測(cè)試等多領(lǐng)域的關(guān)鍵性技術(shù),具有廣泛的市場(chǎng)前景。本文主要研究利用計(jì)算機(jī)視覺(jué)技術(shù)和衍射光柵技術(shù)實(shí)現(xiàn)顯示器屏板間的位置檢測(cè)和高精度定位,論文研究?jī)?nèi)容主要包括以下幾個(gè)方面：研究了基于計(jì)算機(jī)視覺(jué)的圖像處理技術(shù),并將相應(yīng)技術(shù)應(yīng)用到等離子顯示器屏板的精密自動(dòng)對(duì)準(zhǔn)中。通過(guò)CCD攝像機(jī)得到蔭罩板網(wǎng)孔與基板十字線的原始圖,對(duì)攝取的圖像進(jìn)行直方圖均衡化、高斯濾波、邊緣檢測(cè)等預(yù)處理以去除噪聲等干擾,利用閾值分割方法確定基板十字線的位置,再利用圓環(huán)匹配法和遺傳算法對(duì)圓孔位置進(jìn)行檢測(cè),進(jìn)而確定十字線與網(wǎng)孔間的相對(duì)位置關(guān)系。利用matlab仿真對(duì)圓環(huán)匹配法和遺傳算法進(jìn)行了研究比較,結(jié)果表明,遺傳算法檢測(cè)圓孔位置的精度高,且運(yùn)算效率高。研究了雙級(jí)光柵位移檢測(cè)技術(shù),建立了莫爾信號(hào)大小和光柵間位移偏差的數(shù)學(xué)模型,并進(jìn)行了仿真研究,結(jié)果表明,莫爾信號(hào)強(qiáng)度隨光柵間相對(duì)位移呈現(xiàn)周期性變化,同時(shí)也隨著兩光柵的間距呈現(xiàn)周期性變化,這說(shuō)明,經(jīng)雙光柵衍射后的莫爾信號(hào)具有穩(wěn)定的變化規(guī)律,非常適用于高精度的位置檢測(cè)。為進(jìn)一步提高位置檢測(cè)的靈敏度,研究探討了差動(dòng)莫爾式精密定位方法。在此基礎(chǔ)上,研制開(kāi)發(fā)了蔭罩式等離子顯示器屏板精密定位裝置。設(shè)計(jì)了精密檢測(cè)系統(tǒng)和精密驅(qū)動(dòng)系統(tǒng),系統(tǒng)以微定位工作臺(tái)為核心,利用計(jì)算機(jī)視覺(jué)技術(shù)和光柵傳感器檢測(cè)位置偏差,驅(qū)動(dòng)機(jī)構(gòu)由粗定位機(jī)構(gòu)和精定位機(jī)構(gòu)組成,粗定位機(jī)構(gòu)采用脈沖細(xì)分式步進(jìn)電機(jī),通過(guò)精密絲杠將步進(jìn)電機(jī)細(xì)分后的微小角度轉(zhuǎn)化為微米級(jí)的線性位移,實(shí)現(xiàn)粗定位。精定位機(jī)構(gòu)采用壓電陶瓷致動(dòng)器,以柔性鉸鏈為傳動(dòng)機(jī)構(gòu),驅(qū)動(dòng)定位臺(tái)實(shí)現(xiàn)精定位,定位過(guò)程中的誤差由計(jì)算機(jī)閉環(huán)控制消除。為實(shí)現(xiàn)屏板的大行程、高精度定位,提出粗定位與精定位相結(jié)合的復(fù)合式屏板定位技術(shù)。粗定位利用計(jì)算機(jī)視覺(jué)檢測(cè)技術(shù),對(duì)攝取到的原始圖進(jìn)行分析處理,檢測(cè)出十字線和網(wǎng)孔的相對(duì)位置關(guān)系,從而發(fā)出控制指令,驅(qū)動(dòng)定位臺(tái)進(jìn)入粗定位精度范圍,定位精度為±60μm。完成粗定位后,計(jì)算機(jī)根據(jù)接收到的莫爾信號(hào)大小極性給驅(qū)動(dòng)機(jī)構(gòu)發(fā)出控制指令,驅(qū)動(dòng)定位臺(tái)進(jìn)入精定位誤差范圍,定位精度為±0.4μm。
[Abstract]:Precision positioning technology is a key technology in many fields, such as ultra-precision machining, large capacity data storage, nanotechnology and precision testing, etc. It has a broad market prospect. In this paper, the computer vision technology and diffraction grating technology are mainly used to realize the position detection and high precision positioning between the display panels. The main contents of this paper are as follows: the image processing technology based on computer vision is studied. The corresponding technology is applied to the automatic alignment of plasma display panel. The original image of the shadow mask mesh and the cross line of the substrate was obtained by CCD camera, and the image was equalized by histogram, filtered by Gao Si, edge detection and so on, so as to remove the noise and other interference. The threshold segmentation method is used to determine the position of the cross line of the substrate, and then the circle matching method and genetic algorithm are used to detect the position of the circular hole, and then the relative position relationship between the cross line and the mesh is determined. The ring matching method and genetic algorithm are studied and compared by matlab simulation. The results show that genetic algorithm has high accuracy and high efficiency in detecting circular hole position. The two-stage grating displacement detection technique is studied, and the mathematical model of moire signal size and displacement deviation between gratings is established. The simulation results show that the intensity of moire signal varies periodically with the relative displacement between gratings. At the same time, the interval between the two gratings changes periodically, which shows that the moire signals diffracted by double gratings have a stable variation law and are very suitable for high precision position detection. In order to improve the sensitivity of position detection, the differential moire precision positioning method is studied. On this basis, the precision positioning device of shadow mask plasma display panel is developed. A precision detecting system and a precision driving system are designed. The system takes the micro-positioning table as the core, uses the computer vision technology and the grating sensor to detect the position deviation, and the driving mechanism is composed of coarse positioning mechanism and fine positioning mechanism. The coarse positioning mechanism adopts the pulse subdivision stepping motor and converts the tiny angle of the step motor subdivided into the linear displacement of micron through the precision lead screw to realize the coarse positioning. In the precision positioning mechanism, piezoelectric ceramic actuator is used, and the flexible hinge is used as the transmission mechanism. The precision positioning is realized by driving the positioning table, and the error in the positioning process is eliminated by the computer closed loop control. In order to realize the large stroke and high precision positioning of the screen plate, the combined technology of coarse positioning and precise positioning is proposed. Rough positioning uses computer vision detection technology to analyze and process the original images taken, and detect the relative position relationship between cross and mesh, and then issue control instructions, drive the positioning station into the rough positioning precision range, the positioning accuracy is 鹵60 渭 m. After the rough positioning is completed, the computer sends out the control instruction to the driving mechanism according to the received polarity of the moire signal, and the driving positioning station enters into the precision positioning error range, and the positioning accuracy is 鹵0.4 渭 m.
【學(xué)位授予單位】：南京師范大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2016
【分類(lèi)號(hào)】：TP391.41;TN873

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本文編號(hào)：2201332