本文選題：慣性測(cè)量 + 微電子機(jī)械系統(tǒng)(MEMS)��； 參考：《微納電子技術(shù)》2017年08期

【摘要】：為了降低溫度對(duì)MEMS陀螺儀測(cè)量的影響,提高自制慣性測(cè)量系統(tǒng)的測(cè)量精度,研究了三軸MEMS陀螺儀的零偏、比例因子、安裝誤差等參數(shù)受溫度影響的特性,建立了帶有溫度參數(shù)的三軸MEMS陀螺儀誤差模型。在該模型的基礎(chǔ)上進(jìn)行了全溫區(qū)(-20~60℃)的溫變實(shí)驗(yàn),擬合出三軸MEMS陀螺儀各個(gè)參數(shù)與溫度的關(guān)系,確定了模型中的相關(guān)參數(shù),并通過此模型對(duì)不同溫度下的陀螺儀輸出結(jié)果進(jìn)行誤差補(bǔ)償。實(shí)驗(yàn)結(jié)果表明,該三軸MEMS陀螺儀溫度漂移誤差補(bǔ)償模型能夠有效地抑制陀螺儀測(cè)量誤差,補(bǔ)償后,測(cè)量誤差可控制在0.05°/s~0.1°/s,具有一定的工程應(yīng)用價(jià)值。
[Abstract]:In order to reduce the influence of temperature on the measurement of MEMS gyroscopes and improve the measurement accuracy of self-made inertial measurement system, the temperature dependent characteristics of the parameters of triaxial MEMS gyroscopes, such as zero bias, proportional factor and installation error, were studied. A three-axis MEMS gyroscope error model with temperature parameters is established. On the basis of the model, the temperature variation experiments in the full temperature range (-20 ~ 60 鈩，

本文編號(hào)：2110415