本文選題：射頻源 + 阻抗匹配��； 參考：《電光與控制》2017年12期

【摘要】：受工作環(huán)境和時間的影響射頻負(fù)載阻抗在工作時是不斷變化的,影響射頻源的輸出功率和工作效率。因此,需要在射頻源和負(fù)載之間構(gòu)造匹配網(wǎng)絡(luò),并且能夠?qū)崟r跟蹤負(fù)載阻抗的變化,對匹配網(wǎng)絡(luò)元件的參數(shù)做出相應(yīng)調(diào)整,使射頻源能夠?qū)崿F(xiàn)最大功率輸出。根據(jù)射頻源負(fù)載變化特點(diǎn)選擇Γ型匹配網(wǎng)絡(luò),利用Smith圓圖的變化規(guī)律控制匹配網(wǎng)絡(luò)可調(diào)元件變化的約束規(guī)律。實(shí)現(xiàn)方式是由羅氏線圈和電容分壓器檢測傳輸線上的電流和電壓信號,輸入AD8302幅相檢測電路得到信號幅度比和相位差;經(jīng)過模數(shù)轉(zhuǎn)換輸入STM32;根據(jù)Smith圓圖的阻抗和導(dǎo)納的變化特點(diǎn),采用PID算法控制步進(jìn)電機(jī)的轉(zhuǎn)角和轉(zhuǎn)向,由此形成全新的閉環(huán)控制系統(tǒng)。由實(shí)驗(yàn)和仿真結(jié)果可知,此種匹配方法能夠使電路在5 s內(nèi)實(shí)現(xiàn)快速匹配,并且使誤差控制在3°以內(nèi)。
[Abstract]:Under the influence of working environment and time, the RF load impedance is constantly changing, which affects the output power and working efficiency of the RF source. Therefore, it is necessary to construct a matching network between the RF source and the load, and to track the load impedance in real time and adjust the parameters of the matching network element accordingly, so that the RF source can achieve the maximum power output. According to the characteristics of RF source load variation, 螕 type matching network is selected, and the changing law of Smith circle diagram is used to control the constraint law of the variable element of matching network. The current and voltage signals on the transmission line are detected by Roche coil and capacitor divider, and the amplitude ratio and phase difference of the signal are obtained by input AD8302 amplitude phase detection circuit. According to the characteristic of impedance and admittance of Smith circle, pid algorithm is used to control the rotation angle and steering of stepping motor, and a new closed-loop control system is formed. The experimental and simulation results show that this matching method can make the circuit match quickly within 5 seconds, and the error can be controlled within 3 擄.
【作者單位】： 鄭州大學(xué)信息工程學(xué)院;商丘職業(yè)技術(shù)學(xué)院;
【分類號】：TN86

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