本文選題：測(cè)量 + 微懸臂　； 參考：《中國(guó)機(jī)械工程》2016年04期

【摘要】：設(shè)計(jì)了干涉條紋形狀對(duì)懸臂角度變化不敏感的干涉光路系統(tǒng),針對(duì)實(shí)際干涉條紋光電轉(zhuǎn)換信號(hào)的特點(diǎn),提出了對(duì)難以保證正交化的兩路信號(hào)進(jìn)行實(shí)時(shí)橢圓擬合的方法。應(yīng)用橢圓擬合及換算參數(shù)的結(jié)果,推導(dǎo)了干涉條紋相位變化的理論公式。最后,根據(jù)相位量與振動(dòng)位移量的關(guān)系,以及振動(dòng)位移連續(xù)性的特點(diǎn),通過直接解包裹的銜接算法,得到了最終振動(dòng)位移量。實(shí)驗(yàn)表明,該方法在保證足夠采樣頻率的條件下,無需額外硬件計(jì)數(shù)電路,就能完成微懸臂振動(dòng)位移的干涉量級(jí)精度的測(cè)量。
[Abstract]:An interferometric optical path system, which is insensitive to the angle change of the cantilever angle, is designed. In view of the characteristics of the actual interference fringe photoelectric conversion signal, a real time ellipse fitting method is proposed for the two signals which are difficult to ensure orthogonalization. The theory of ellipse fitting and conversion parameters is applied to deduce the theory of the phase change of the interference fringe. Finally, according to the relationship between the phase and the vibration displacement, and the characteristics of the continuity of the vibration displacement, the final vibration displacement is obtained by the direct unwrapping algorithm. The experiment shows that the method can complete the interference of the vibration displacement of the micro cantilever without additional hardware counting circuit under the condition of sufficient sampling frequency. Measurement of the accuracy of the order of magnitude.
【作者單位】： 湖北工業(yè)大學(xué);
【基金】：國(guó)家自然科學(xué)基金資助項(xiàng)目(51175154;51275157;51275158) 天津大學(xué)精密測(cè)試技術(shù)及儀器國(guó)家重點(diǎn)實(shí)驗(yàn)室開放基金資助項(xiàng)目(PIL1209)
【分類號(hào)】：TN911.7

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