本文選題：MEMS + 諧振器�。� 參考：《浙江大學(xué)》2017年碩士論文

【摘要】：隨著微機(jī)電系統(tǒng)(MEMS,microelectromechanical systems)技術(shù)的發(fā)展,微諧振器和陀螺儀越來越受到人們的關(guān)注。利用MEMS技術(shù)得到的微傳感器具有成本低、尺寸小、功耗小等特點(diǎn)。在導(dǎo)航、消費(fèi)電子等民用領(lǐng)域,航空航天以及未來高科技戰(zhàn)場(chǎng)上擁有廣闊的發(fā)展和市場(chǎng)前景。諧振器作為陀螺儀的關(guān)鍵部件,性能直接影響陀螺儀的工作。本論文研究基于硅和金剛石的MEMS諧振器及陀螺儀的設(shè)計(jì)、加工與測(cè)試。本論文將通過以下五章介紹研究的主要內(nèi)容。第一章主要介紹了 MEMS諧振器和諧振陀螺儀應(yīng)用領(lǐng)域,研究現(xiàn)狀和工作原理。MEMS諧振器可以用在振蕩器上,MEMS諧振陀螺儀大致可以分為框架式、音叉式、振動(dòng)環(huán)式、多軸輸入式、解耦式五種,并按此分類介紹了國(guó)內(nèi)外研究現(xiàn)狀。最后介紹了本課題的研究?jī)?nèi)容。第二章設(shè)計(jì)了 一個(gè)基于硅的MEMS的32kHz諧振器和DETF諧振器,詳細(xì)介紹了兩個(gè)諧振器的工作原理,確定了器件的結(jié)構(gòu)設(shè)計(jì),用ANSYS建模仿真得到兩個(gè)器件的諧振頻率。設(shè)計(jì)了器件的加工工藝,得到器件。搭建了真空測(cè)試實(shí)驗(yàn)平臺(tái),測(cè)試了兩個(gè)諧振器的諧振頻率。第三章主要介紹了金剛石材料做MEMS器件的優(yōu)勢(shì)并設(shè)計(jì)的4個(gè)金剛石MEMS諧振器(半球和半環(huán)諧振器、32kHz諧振器和DETF諧振器)和1個(gè)MEMS諧振陀螺儀(振動(dòng)環(huán)式),詳細(xì)介紹了各個(gè)器件的工作原理,確定了器件的結(jié)構(gòu)設(shè)計(jì),最后用ANSYS建模仿真得到每個(gè)器件的理論諧振頻率。第四章設(shè)計(jì)了金剛石MEMS半球和半環(huán)諧振器的加工工藝,確定影響HNA各向同性刻蝕的6個(gè)因素,設(shè)計(jì)了一個(gè)旋轉(zhuǎn)刻蝕裝置來刻蝕半球和半環(huán)凹模。用Matlab分析凹模的圓度。兩次沉積金剛石,并且檢測(cè)了超納米金剛石薄膜的拉曼光譜。設(shè)計(jì)了金剛石MEMS平面器件加工工藝,并且確定了各加工步驟的參數(shù),自主加工得到器件。最后搭建激光多普勒檢測(cè)DETF諧振器的實(shí)驗(yàn)平臺(tái)檢測(cè)硅基和金剛石DETF的諧振頻率和計(jì)算品質(zhì)因數(shù)Q。第五章對(duì)本論文的研究?jī)?nèi)容簡(jiǎn)單總結(jié),分析在研究過程中存在的問題和不足,對(duì)未來的研究提出建議和展望。
[Abstract]:With the development of MEMS microelectromechanical systems, more and more attention has been paid to microresonators and gyroscopes. The micro sensor based on MEMS technology has the advantages of low cost, small size and low power consumption. In navigation, consumer electronics and other civil areas, aerospace and the future of high-tech battlefield has a broad development and market prospects. As the key component of gyroscope, the performance of resonator directly affects the work of gyroscope. This paper studies the design, processing and testing of MEMS resonator and gyroscope based on silicon and diamond. This thesis will introduce the main contents of the research through the following five chapters. The first chapter mainly introduces the application field of MEMS resonator and resonant gyroscope. The research status and working principle of MEMS resonator can be divided into frame type, tuning fork type, vibration ring type, multi-axis input type. There are five kinds of decoupling, and according to this classification, the present situation of research at home and abroad is introduced. Finally, the research content of this topic is introduced. In chapter 2, a 32kHz resonator and a DETF resonator based on silicon MEMS are designed. The working principle of the two resonators is introduced in detail, and the structural design of the devices is determined. The resonant frequencies of the two devices are obtained by ANSYS modeling and simulation. The fabrication process of the device is designed and the device is obtained. A vacuum test platform was set up and the resonant frequencies of two resonators were tested. Chapter 3 mainly introduces the advantages of diamond materials as MEMS devices and designs four diamond MEMS resonators (hemispherical and semicyclic resonators, 32kHz resonators and DETF resonators) and a MEMS resonant gyroscope (vibrating ring type gyroscope, detailed introduction). The working principle of each device is introduced. Finally, the theoretical resonance frequency of each device is obtained by ANSYS modeling and simulation. In chapter 4, the fabrication process of diamond MEMS hemispherical and semi-ring resonators is designed. Six factors affecting HNA isotropic etching are determined, and a rotating etching device is designed to etch hemispherical and semi-ring concave dies. The roundness of the die is analyzed by Matlab. The Raman spectra of ultrananocrystalline diamond films were measured. The machining process of diamond MEMS planar device is designed, and the parameters of each processing step are determined. Finally, an experimental platform for laser Doppler detection of DETF resonators is set up to detect the resonant frequency and quality factor of silicon based and diamond DETF. The fifth chapter summarizes the research content of this paper, analyzes the problems and shortcomings in the research process, and puts forward suggestions and prospects for future research.
【學(xué)位授予單位】：浙江大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TN96;TH-39;TN751.2

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本文編號(hào)：1876465