本文選題：相干檢測　切入點：正交誤差　出處：《湖南大學學報(自然科學版)》2017年10期 　論文類型：期刊論文

【摘要】：傳統(tǒng)MEMS(Micro-Electro-Mechanical System)陀螺的相干檢測基于驅動位移和科氏位移的相位關系,依賴于陀螺的工作模式,解調載波相位抖動大,不易相位對準.為解決此問題,本文提出了一種基于正交誤差對準的不依賴陀螺工作模式的相干解調系統(tǒng).解調載波取自驅動電路的PLL(Phase-Locked Loop)輸出,相位抖動小,僅作載波使用,不代表驅動位移信息.檢測通路插入移相器,使正交誤差相位滯后解調載波90°,則科氏位移信號與解調載波同相,完成檢測.為驗證該方法,本文研究了陀螺器件與接口電路之間的信號傳遞特性并進行建模,設計了鎖相環(huán)、C/V(Capacitance/Voltage)轉換、移相器等核心電路,實現(xiàn)了一款完整的MEMS陀螺測控電路.測試結果表明:陀螺驅動正常,檢測正確,刻度因數(shù)為1.415mV/(°.s),零偏不穩(wěn)定度為108°/h.結果驗證了該檢測方法的有效性,并為后續(xù)進一步提升性能提供了基礎.該檢測方法也適用于其他振動式MEMS陀螺的測控系統(tǒng).
[Abstract]:The traditional MEMS (Micro-Electro-Mechanical System) coherent detection of the phase relationship between gyro drive displacement and Coriolis displacement based on gyro depends on the working mode, the demodulation of carrier phase jitter, phase alignment is not easy. In order to solve this problem, this paper presents a coherent demodulation system of orthogonal error alignment does not depend on the working mode based on gyro. From the carrier demodulation driving circuit for PLL (Phase-Locked Loop) output, low phase jitter, only the carrier, does not represent the displacement information. Detection channel insertion phase shifter, the quadrature error phase lag demodulation carrier 90 degrees, while the Coriolis displacement signal demodulation and carrier phase, complete detection. The method is validated in this paper. Study on the signal between the gyro and the interface circuit transmission characteristics and modeling, design of phase locked loop (Capacitance/Voltage), C/V conversion, phase shifter, core circuit, realization A complete MEMS gyro control circuit. The test results show that the drive is normal, the correct detection, the scale factor is 1.415mV/ (.S), zero bias instability is 108 DEG /h. results verify the effectiveness of the detection method, and further improve the performance for the follow-up to provide a foundation. This method also measure and control system applicable to other vibrating MEMS gyroscope.

【作者單位】： 中國科學院微電子研究所;中國科學院大學;
【基金】：國家自然科學基金資助項目(61501453)~~
【分類號】：TN96

【相似文獻】

相關期刊論文 前2條

1 劉學;陳志華;肖定邦;吳學忠;蘇劍彬;侯占強;賀琨;;振動式微陀螺正交誤差自補償方法[J];傳感技術學報;2012年09期

2 沈世奎;滿祥錕;簡偉;王光全;;100G系統(tǒng)中的誤差矢量幅度參數(shù)應用[J];郵電設計技術;2014年04期

，

本文編號：1652072