本文選題：相干檢測(cè)　切入點(diǎn)：正交誤差　出處：《湖南大學(xué)學(xué)報(bào)(自然科學(xué)版)》2017年10期 　論文類型：期刊論文

【摘要】：傳統(tǒng)MEMS(Micro-Electro-Mechanical System)陀螺的相干檢測(cè)基于驅(qū)動(dòng)位移和科氏位移的相位關(guān)系,依賴于陀螺的工作模式,解調(diào)載波相位抖動(dòng)大,不易相位對(duì)準(zhǔn).為解決此問(wèn)題,本文提出了一種基于正交誤差對(duì)準(zhǔn)的不依賴陀螺工作模式的相干解調(diào)系統(tǒng).解調(diào)載波取自驅(qū)動(dòng)電路的PLL(Phase-Locked Loop)輸出,相位抖動(dòng)小,僅作載波使用,不代表驅(qū)動(dòng)位移信息.檢測(cè)通路插入移相器,使正交誤差相位滯后解調(diào)載波90°,則科氏位移信號(hào)與解調(diào)載波同相,完成檢測(cè).為驗(yàn)證該方法,本文研究了陀螺器件與接口電路之間的信號(hào)傳遞特性并進(jìn)行建模,設(shè)計(jì)了鎖相環(huán)、C/V(Capacitance/Voltage)轉(zhuǎn)換、移相器等核心電路,實(shí)現(xiàn)了一款完整的MEMS陀螺測(cè)控電路.測(cè)試結(jié)果表明:陀螺驅(qū)動(dòng)正常,檢測(cè)正確,刻度因數(shù)為1.415mV/(°.s),零偏不穩(wěn)定度為108°/h.結(jié)果驗(yàn)證了該檢測(cè)方法的有效性,并為后續(xù)進(jìn)一步提升性能提供了基礎(chǔ).該檢測(cè)方法也適用于其他振動(dòng)式MEMS陀螺的測(cè)控系統(tǒng).
[Abstract]:The traditional MEMS (Micro-Electro-Mechanical System) coherent detection of the phase relationship between gyro drive displacement and Coriolis displacement based on gyro depends on the working mode, the demodulation of carrier phase jitter, phase alignment is not easy. In order to solve this problem, this paper presents a coherent demodulation system of orthogonal error alignment does not depend on the working mode based on gyro. From the carrier demodulation driving circuit for PLL (Phase-Locked Loop) output, low phase jitter, only the carrier, does not represent the displacement information. Detection channel insertion phase shifter, the quadrature error phase lag demodulation carrier 90 degrees, while the Coriolis displacement signal demodulation and carrier phase, complete detection. The method is validated in this paper. Study on the signal between the gyro and the interface circuit transmission characteristics and modeling, design of phase locked loop (Capacitance/Voltage), C/V conversion, phase shifter, core circuit, realization A complete MEMS gyro control circuit. The test results show that the drive is normal, the correct detection, the scale factor is 1.415mV/ (.S), zero bias instability is 108 DEG /h. results verify the effectiveness of the detection method, and further improve the performance for the follow-up to provide a foundation. This method also measure and control system applicable to other vibrating MEMS gyroscope.

【作者單位】： 中國(guó)科學(xué)院微電子研究所;中國(guó)科學(xué)院大學(xué);
【基金】：國(guó)家自然科學(xué)基金資助項(xiàng)目(61501453)~~
【分類號(hào)】：TN96

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本文編號(hào)：1652072