發(fā)布時間：2018-01-13 13:23

  本文關(guān)鍵詞：電容式MEMS環(huán)形振動陀螺結(jié)構(gòu)設(shè)計及加工　出處：《中國慣性技術(shù)學(xué)報》2017年02期 　論文類型：期刊論文

  更多相關(guān)文章： 硅微環(huán)形振動結(jié)構(gòu) footing效應(yīng) 加工工藝 性能測試 零偏穩(wěn)定性

【摘要】：微機(jī)械環(huán)形振動陀螺儀采用四波腹工作原理,具有精度高、抗沖擊性能好等優(yōu)點(diǎn)。通常情況下為了提高電容值和信噪比,環(huán)形結(jié)構(gòu)會采用高深寬比方案,因此帶來的footing效應(yīng)直接影響了結(jié)構(gòu)加工的成品率。本文在設(shè)計環(huán)形結(jié)構(gòu)的基礎(chǔ)上提出了一種在硅下表面濺射一層Al金屬層的方法,能夠避免footing效應(yīng)的發(fā)生。實(shí)驗(yàn)結(jié)果表明,該方法有效提高了結(jié)構(gòu)加工精度。同時,為了驗(yàn)證所設(shè)計結(jié)構(gòu)的正確性,對加工出的結(jié)構(gòu)進(jìn)行了掃頻測試,結(jié)構(gòu)驅(qū)動模態(tài)諧振頻率與設(shè)計值相差僅0.13%,并在此基礎(chǔ)上搭建了測控系統(tǒng),進(jìn)一步進(jìn)行了靜態(tài)實(shí)驗(yàn),結(jié)果表明其零偏穩(wěn)定性指標(biāo)為101(°)/h證明了設(shè)計和加工的可行性。
[Abstract]:Micromachined annular vibratory gyroscope uses four-wave belly working principle, which has the advantages of high precision, good impact resistance and so on. In order to improve the capacitance and signal-to-noise ratio (SNR), the ring structure usually adopts the scheme of high aspect ratio in order to improve the capacitance value and the signal-to-noise ratio. Therefore, the footing effect has a direct impact on the yield of structural machining. Based on the design of annular structure, a method of sputtering a layer of Al metal layer on the surface of silicon is proposed in this paper. The footing effect can be avoided. The experimental results show that the method can effectively improve the machining accuracy of the structure. At the same time, in order to verify the correctness of the designed structure. The frequency sweep test of the machined structure shows that the resonant frequency of the structure driving mode is only 0.13 points different from the design value. On this basis, the measurement and control system is built, and the static experiment is carried out. The results show that the zero bias stability index is 101 (擄/ h), which proves the feasibility of design and machining.
【作者單位】： 北京理工大學(xué)機(jī)電動態(tài)控制重點(diǎn)實(shí)驗(yàn)室;淮海工業(yè)集團(tuán)有限公司MEMS中心;
【基金】：國家自然科學(xué)基金NSAF基金(U1630119) 北京理工大學(xué)學(xué)術(shù)啟動計劃基金
【分類號】：TN96
【正文快照】： 微機(jī)電陀螺具有體積小、成本低、可批量生產(chǎn)等以通過后期調(diào)整的方法來改善陀螺性能[6]。國內(nèi)外學(xué)方面的優(yōu)勢,在常規(guī)彈藥制導(dǎo)化的應(yīng)用中有著迫切的者提出了多種電容式振動環(huán)陀螺的制造方法,Farrokh需求[1-2]。與眾多其它類型的微機(jī)械陀螺相比,振動環(huán)Ayazi和Khalil Najafi采用多，

本文編號：1419035