【摘要】：利用可調(diào)諧二極管激光吸收光譜技術(shù)對低氣壓氬氣介質(zhì)阻擋放電等離子體進行診斷,重點考察了Ar亞穩(wěn)態(tài)1s_5和1s_3的數(shù)密度和氣體溫度隨放電電壓,氣壓,流量,極板間距,以及隨N_2配比的變化情況。實驗基于朗伯-比爾(Lambert-Beer)定律,通過計算吸收譜線的吸收峰面積求取Ar亞穩(wěn)態(tài)的數(shù)密度,同時對譜線進行Voigt擬合得到多普勒展寬,進而求出氣體溫度。Ar亞穩(wěn)態(tài)主要由電子碰撞產(chǎn)生,但同時電子也會碰撞亞穩(wěn)態(tài)發(fā)生猝滅作用,從而使數(shù)密度減少;氣體溫度則與等離子體的實際功率、電子的狀態(tài)以及粒子之間的碰撞有關(guān)。實驗結(jié)果表明在本實驗條件范圍內(nèi),Ar亞穩(wěn)態(tài)數(shù)密度和氣體溫度隨放電電壓和流量的增大都先增大,之后逐漸趨于平緩,但兩者隨流量的變化幅度都較之隨放電電壓的小,增長較緩慢。隨氣壓的升高,Ar亞穩(wěn)態(tài)數(shù)密度和氣體溫度先增加并達到一個極大值,而之后逐漸降低。實驗數(shù)據(jù)表明,氣壓對譜線展寬有較明顯的影響作用。適當(dāng)增大極板間距,Ar亞穩(wěn)態(tài)數(shù)密度明顯降低,但氣體溫度卻有所升高。N_2的加入對亞穩(wěn)態(tài)有很強的猝滅作用,0.5%的N_2就會使數(shù)密度下降50%,但隨著N_2濃度的進一步增大,其數(shù)密度不再明顯降低。
[Abstract]:The low pressure argon dielectric barrier discharge plasma was diagnosed by tunable diode laser absorption spectroscopy. The numerical density and gas temperature of Ar metastable 1s_5 and 1s_3 with discharge voltage, pressure and flow rate were investigated. The distance between the plates and the change of the ratio of N to 2. Based on Lambert-Beer 's law, the number density of Ar metastable state is obtained by calculating the absorption peak area of the absorption line, and the Doppler broadening is obtained by fitting the spectrum line with Voigt. The Ar metastable state is mainly produced by electron collision, but at the same time, the electron will also quench the metastable state, thus reducing the number density. The temperature of the gas depends on the actual power of the plasma, the state of the electron and the collisions between particles. The experimental results show that the metastable number density and gas temperature of Ar increase firstly with the increase of discharge voltage and flow rate, and then tend to be flat gradually, but the variation range of them with discharge voltage is smaller than that with discharge voltage. Growth is slower. With the increase of atmospheric pressure, the Ar metastable number density and gas temperature first increase and reach a maximum value, and then decrease gradually. The experimental data show that the pressure has an obvious effect on the spectral line broadening. When the plate spacing is increased properly, the metastable number density of Ar decreases obviously, but the gas temperature increases. The addition of NSP _ 2 has a strong quenching effect on the metastable state, and 0.5% NSP _ 2 can decrease the number density by 50%. However, with the further increase of NSCL _ 2 concentration, the number density of NSCL _ 2 is no longer significantly decreased.
【作者單位】： 大連理工大學(xué)物理與光電工程學(xué)院三束材料表面改性教育部重點實驗室;
【基金】：國家自然科學(xué)基金項目(10975029)資助
【分類號】：O53;O461

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1 崔金松;韓朝虹;;亞穩(wěn)態(tài)粒子壽命的觀測[J];遼寧師范大學(xué)學(xué)報(自然科學(xué)版);1985年03期

2 張毓英,李桂棠,孫，

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