【摘要】：離子引出是一個(gè)涉及多粒子相互作用、多物理場耦合的復(fù)雜物理過程,研究引出過程中不同參數(shù)對于引出特性的影響,對于優(yōu)化離子引出過程的工藝參數(shù)具有一定的指導(dǎo)意義。為此基于描述非平衡等離子體輸運(yùn)特性的物理數(shù)學(xué)模型,推導(dǎo)了描述金屬等離子體引出過程中各組分運(yùn)動(dòng)規(guī)律的一維電子平衡流體模型,并通過與解析解和實(shí)驗(yàn)測量結(jié)果的對比驗(yàn)證了所發(fā)展的物理數(shù)學(xué)模型和計(jì)算機(jī)程序代碼的正確性。在此基礎(chǔ)上,系統(tǒng)研究了不同工況下等離子體鞘層的時(shí)空演化特性以及離子引出時(shí)間和引出效率。結(jié)果表明:等離子體初始密度較高時(shí),引出過程中存在顯著的屏蔽效應(yīng);引出電壓、電子溫度的升高或極板間距的減小都將縮短引出時(shí)間;考慮共振電荷轉(zhuǎn)移過程得到的離子引出時(shí)間與無碰撞條件下的離子引出時(shí)間相差不大,但共振電荷轉(zhuǎn)移會導(dǎo)致目標(biāo)離子損失。
[Abstract]:Ion extraction is a complex physical process involving multi-particle interaction and multi-physical field coupling. The study of the influence of different parameters on the extraction characteristics in the extraction process has certain guiding significance for optimizing the process parameters of ion extraction process. Based on the physical mathematical model to describe the transport characteristics of non-equilibrium plasma, a one-dimensional electron equilibrium fluid model is derived to describe the movement of each component in the extraction process of metal plasma. The correctness of the developed physical mathematical model and computer program code is verified by comparison with analytical solution and experimental results. On this basis, the temporal and spatial evolution characteristics, ion extraction time and extraction efficiency of the plasma sheath under different operating conditions were systematically studied. The results show that there is a significant shielding effect in the extraction process when the plasma initial density is high, and the extraction time will be shortened with the increase of the extraction voltage, the increase of the electron temperature or the decrease of the plate spacing. The ion extraction time obtained by considering the resonant charge transfer process is similar to that of the ion extraction time without collision, but the resonant charge transfer will lead to the loss of the target ion.
【作者單位】： 清華大學(xué)工程物理系;核工業(yè)理化工程研究院;
【分類號】：O53
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本文編號：2347884