發(fā)布時(shí)間：2018-11-17 15:37

【摘要】：中階梯光柵具有刻線(xiàn)密度低、閃耀角度大、衍射級(jí)次高、光譜范圍寬、色散率大、光譜分辨率高等一系列突出優(yōu)點(diǎn),近年來(lái)由于其優(yōu)良的性能而倍受青睞。作為評(píng)價(jià)中階梯光柵質(zhì)量的衍射效率和雜散光系數(shù)直接體現(xiàn)了中階梯光柵的光學(xué)性能,能夠準(zhǔn)確地進(jìn)行中階梯光柵衍射效率和雜散光系數(shù)的測(cè)量是光柵應(yīng)用的前提。鑒于此,基于中階梯光柵的衍射理論創(chuàng)造性地提出用一套系統(tǒng)對(duì)中階梯光柵的衍射效率和雜散光系數(shù)進(jìn)行檢測(cè),該系統(tǒng)引入雙軌結(jié)構(gòu),具有結(jié)構(gòu)簡(jiǎn)單新穎、一機(jī)多能等優(yōu)點(diǎn)。通過(guò)理論分析和計(jì)算,確定了檢測(cè)系統(tǒng)的結(jié)構(gòu)參數(shù),設(shè)計(jì)結(jié)果表明:該檢測(cè)系統(tǒng)可用于測(cè)量190~1 100nm光譜范圍內(nèi)的中階梯光柵絕對(duì)衍射效率,同時(shí)也可用于測(cè)量200~800nm光譜范圍內(nèi)的中階梯光柵雜散光系數(shù),實(shí)現(xiàn)了將衍射效率測(cè)量和雜散光測(cè)量集于一體的設(shè)計(jì)思想。
[Abstract]:The middle step grating has a series of outstanding advantages, such as low line density, large blazing angle, high diffraction order, wide spectrum range, large dispersion rate, high spectral resolution and so on. In recent years, it has attracted much attention because of its excellent performance. The diffraction efficiency and the stray light coefficient of the middle step grating directly reflect the optical performance of the middle step grating, and it is the premise of the grating application that the diffraction efficiency and the stray light coefficient of the middle step grating can be accurately measured. In view of this, based on the diffraction theory of middle step grating, a set of system is creatively proposed to detect the diffraction efficiency and stray light coefficient of the middle step grating. The system introduces a dual-track structure, which has the advantages of simple and novel structure, multifunction of one machine, and so on. Through theoretical analysis and calculation, the structural parameters of the detection system are determined. The design results show that the system can be used to measure the absolute diffraction efficiency of the middle step grating in the spectrum range of 190-1 100nm. At the same time, it can also be used to measure the stray light coefficient of the middle step grating in the range of 200~800nm spectrum. The design idea of integrating the measurement of diffraction efficiency and the measurement of stray light is realized.
【作者單位】： 中國(guó)科學(xué)院長(zhǎng)春光學(xué)精密機(jī)械與物理研究所;中國(guó)科學(xué)院大學(xué);
【基金】：國(guó)家重大科學(xué)儀器設(shè)備開(kāi)發(fā)專(zhuān)項(xiàng)項(xiàng)目(2014YQ12035102)資助
【分類(lèi)號(hào)】：O436.1;TH744.1

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