【摘要】：空間分辨率和聚焦效率是X射線微納探針最關(guān)鍵的技術(shù)指標(biāo)。壓彎非球面鏡具備聚焦效率高、空間分辨好、加工難度低、色散消除等優(yōu)點(diǎn)�；谏虾９庠从瞂射線微聚焦及應(yīng)用線站的現(xiàn)有條件,在精確壓彎理論的基礎(chǔ)上設(shè)計(jì)了高精度柔性鉸鏈壓彎?rùn)C(jī)構(gòu)并進(jìn)行了有限元分析,并且進(jìn)一步對(duì)壓彎鏡體寬度進(jìn)行了優(yōu)化。通過(guò)長(zhǎng)程面形儀(Long Trace Profiler,LTP)對(duì)壓彎?rùn)C(jī)構(gòu)的測(cè)試,得到壓彎非球面鏡的斜率誤差為430 nrad,理論上可實(shí)現(xiàn)230 nm的硬X射線聚焦光斑。
[Abstract]:Spatial resolution and focusing efficiency are the key technical parameters of X-ray microprobe. Bending non-spherical mirror has the advantages of high focusing efficiency, good spatial resolution, low processing difficulty and dispersion elimination. Based on the existing conditions of hard X-ray microfocus of Shanghai light source and the application of line station, a high-precision flexure hinge bending mechanism is designed based on the accurate bending theory, and the finite element analysis is carried out, and the body width of the bending mirror is further optimized. By measuring the bending mechanism with (Long Trace Profiler,LTP), it is found that the slope error of the bending non-spherical mirror is 430 nrad,. In theory, the hard X-ray focusing spot of 230 nm can be realized.
【作者單位】： 中國(guó)科學(xué)院上海應(yīng)用物理研究所嘉定園區(qū);中國(guó)科學(xué)院大學(xué);Advanced
【基金】：國(guó)家自然科學(xué)基金(No.U1332120)資助~~
【分類(lèi)號(hào)】：O434.19

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