發(fā)布時間：2018-05-31 23:21

  本文選題：測量 + 菲佐干涉測量　； 參考：《光學(xué)學(xué)報》2017年01期

【摘要】：通過菲佐型干涉系統(tǒng)、直角圓錐反射鏡的一次性測量,可獲得圓柱形光學(xué)元件整周的面形信息。為實現(xiàn)高精度的面形測量,實驗裝置的校準至關(guān)重要,但由于調(diào)整機構(gòu)的缺陷導(dǎo)致圓錐反射鏡和被測圓柱的空間方位難以確定,距離理想位置的任何位置偏差將給測量結(jié)果引入嚴重的測量誤差。為去除該系統(tǒng)誤差,要明確各種失調(diào)誤差的形成原因,分析其對測量結(jié)果的影響。通過圓柱坐標系下數(shù)學(xué)模型的建立,推導(dǎo)出偏移誤差和旋轉(zhuǎn)誤差的變化公式,并通過Matlab數(shù)值模擬和實際測量對其進行驗證。結(jié)果表明,利用誤差計算公式可以推導(dǎo)出失調(diào)誤差系數(shù),便于進一步的系統(tǒng)誤差校正。
[Abstract]:Through the one-off measurement of right angle conical mirror with Fizzo interferometer, the whole circumference information of cylindrical optical element can be obtained. In order to achieve high precision surface shape measurement, the calibration of the experimental device is very important. However, due to the defects of the adjusting mechanism, it is difficult to determine the spatial orientation of the cone reflector and the cylinder to be measured. Any position deviation from the ideal position will introduce serious measurement errors to the measurement results. In order to remove the system error, it is necessary to make clear the causes of the misalignment error and analyze its influence on the measurement results. Through the establishment of mathematical model in cylindrical coordinate system, the variation formulas of offset error and rotation error are deduced, and verified by Matlab numerical simulation and actual measurement. The results show that the misalignment error coefficient can be deduced by using the error calculation formula, which is convenient for further systematic error correction.
【作者單位】： 長春理工大學(xué)光電工程學(xué)院;蘇州慧利儀器有限責(zé)任公司;上海理工大學(xué)光電信息與計算機工程學(xué)院;
【基金】：國家科技重大專項(2013YQ150829) 上海市科研計劃項目(14140502500) 蘇州市納米專項(ZXG2013034)
【分類號】：O436.1
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本文編號：1961772