本文選題：激光等離子體 + 高電荷態(tài)離子　； 參考：《中國科學:物理學 力學 天文學》2017年12期

【摘要】：等離子體動力學模擬是一種非常有效的等離子體狀態(tài)診斷和光譜分析方法,已被廣泛應(yīng)用于激光等離子體光譜的解釋和演化分析中.本文基于流體動力學方程和輻射輸運方程,并結(jié)合穩(wěn)態(tài)的碰撞輻射模型,提出了一種簡化的能夠分析模擬中高Z元素高電荷態(tài)離子極真空紫外(Extreme Ultraviolet,EUV)波段光譜的輻射流體動力學模型,并成功應(yīng)用于激光產(chǎn)生的錫等離子體EUV光譜的分析和模擬.結(jié)果表明,理論模擬光譜與激光功率密度為1.90×10~(11)?W/cm~2的實驗光譜之間具有良好的一致性.通過比較Sn~(7+) Sn~(11+)離子的4d-4f,4p-4d和4d-5p,5f躍遷陣列的發(fā)射輪廓和自吸收輪廓,明確了不透明度效應(yīng)對發(fā)射光譜輪廓的影響,成功解釋了13.5?nm附近自吸收帶和自吸收峰的成因.相關(guān)研究預期能夠為極真空紫外輻射在光刻、計量、生物成像等領(lǐng)域的應(yīng)用研究提供參考.
[Abstract]:Plasma dynamics simulation is a very effective method for plasma state diagnosis and spectral analysis, which has been widely used in the interpretation and evolution analysis of laser plasma spectrum. This paper is based on the hydrodynamic equation and the radiation transport equation, combined with the steady-state collision radiation model. In this paper, a simplified radiative hydrodynamic model is proposed to simulate the spectra of high charge state ion ions in the high Z state. The model has been successfully applied to the analysis and simulation of the EUV spectra of the laser generated tin plasma. The results show that there is a good agreement between the theoretical simulated spectra and the experimental spectra with a laser power density of 1.90 脳 10~(11)?W/cm~2. By comparing the emission profile and the self-absorption profile of 4d-4fn4d and 4d-5pO5f transition arrays of Sn~(11 (Sn~(7) ions, the effect of opacity on the emission spectra profile is clarified, and the causes of the self-absorption bands and self-absorption peaks near 13.5?nm are explained successfully. The related research is expected to provide a reference for the application of extreme vacuum ultraviolet radiation in lithography, metrology, biological imaging and other fields.
【作者單位】： 西北師范大學物理與電子工程學院甘肅省原子分子物理與功能材料重點實驗室;
【基金】：國家自然科學基金(編號:11064012,11364037,11274254,U1332206,11564037) 甘肅省高等學�；究蒲袠I(yè)務(wù)費 甘肅省自然科學基金(編號:1308RJZA166,1104WCGA186)資助
【分類號】：O53

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本文編號：1887818