本文選題：測量 + 白光干涉法�。� 參考：《激光與光電子學進展》2017年05期

【摘要】：為了減少白光干涉法的采樣數(shù)據(jù)和計算成本,提高測量速度,提出了一種快速穩(wěn)定的白光干涉測量方法。根據(jù)白光干涉顯微鏡模型,對光學干涉法的數(shù)學模型進行了推導分析,確定了干涉光強函數(shù)與包絡函數(shù)之間的關(guān)系。在此基礎上,提出利用加大采樣間隔的離散采樣點的希爾伯特變換函數(shù)提取干涉信號包絡算法,并基于采樣原理分析確定了符合算法的采樣間隔條件。通過仿真實驗對該算法的有效性進行了驗證。實際樣品的白光干涉光強信號存在直流(DC)偏置噪聲,影響快速白光干涉測量法的穩(wěn)定性,因此采用中值濾波法消除背景噪聲,分析濾波后干涉光強包絡的質(zhì)量。通過白光干涉顯微鏡裝置進行了實際樣品白光干涉圖像采集,并對不同倍率采樣間隔重構(gòu)的三維表面形貌圖進行比較。結(jié)果表明,該快速算法重構(gòu)三維形貌的速度相比傳統(tǒng)方法提高了20倍,同時增強了穩(wěn)定性。
[Abstract]:In order to reduce the sampling data and computational cost of the white light interferometry and improve the measuring speed, a fast and stable white light interferometry method is proposed. According to the white light interference microscope model, the mathematical model of optical interference method is deduced and analyzed, and the relationship between the interference intensity function and the envelope function is determined. On this basis, the Hilbert transform function of the discrete sampling points with increasing sampling interval is used to extract the envelope of interference signal, and the sampling interval condition is determined based on the sampling principle. The effectiveness of the algorithm is verified by simulation experiments. The DC bias noise exists in the white light intensity signal of the sample, which affects the stability of the fast white light interference measurement method. Therefore, the median filtering method is used to eliminate the background noise, and the quality of the interference intensity envelope after filtering is analyzed. The white light interference image was collected by the white light interference microscope, and the 3D surface morphologies reconstructed by different sampling intervals were compared. The results show that the speed of reconstruction is 20 times faster than that of the traditional method, and the stability is enhanced.
【作者單位】： 上海理工大學光電信息與計算機工程學院;
【基金】：國家重大科研儀器專項(2012YQ170004)
【分類號】：O436.1

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