本文選題：薄膜　切入點：透明屏蔽　出處：《光子學(xué)報》2017年04期 　論文類型：期刊論文

【摘要】：為滿足光學(xué)器件透紅外屏蔽電磁波的要求,在PET柔性基底上制作了金屬網(wǎng)柵透明屏蔽膜.分析網(wǎng)柵參數(shù)對其屏蔽效率及透過率的影響,選取結(jié)構(gòu)參數(shù).針對PET基底的柔性特點及其熱穩(wěn)定性,經(jīng)試驗研究優(yōu)化光刻工藝中的提拉速度、烘烤時間及溫度等參數(shù),從而得到高質(zhì)量的圖形結(jié)構(gòu).采用磁控濺射法制備透明屏蔽膜,通過優(yōu)化濺射功率、濺射氣壓等參數(shù)使膜/基結(jié)合更牢固.最后得到線寬為3μm、周期為250μm的金屬網(wǎng)柵透明屏蔽膜.采用分光光度計測得其在300~2 200nm波段的平均透過率為77%;采用屏蔽室法測得其在2~18GHz頻段的電磁屏蔽效率為12dB以上.
[Abstract]:In order to meet the requirement of infrared shielding electromagnetic wave of optical devices, a metal grid transparent shielding film was fabricated on the flexible substrate of PET. The influence of grid parameters on the shielding efficiency and transmittance was analyzed. According to the flexibility and thermal stability of PET substrate, the parameters such as drawing speed, baking time and temperature in lithography were optimized by experiments. The transparent shielding film was prepared by magnetron sputtering, and the sputtering power was optimized. Finally, the transparent shielding film with 3 渭 m line width and a period of 250 渭 m was obtained. The average transmittance of the film in 300-2 200nm band was measured by spectrophotometer and measured by shielding chamber method. The electromagnetic shielding efficiency in 2~18GHz band is higher than 12dB.
【作者單位】： 長春理工大學(xué)光電工程學(xué)院;
【基金】：吉林省重大科技攻關(guān)專項(No.20140203002GX)資助~~
【分類號】：O441.4;TH74
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本文編號：1651041