本文關(guān)鍵詞： 高頻等離子體 發(fā)射光譜 電子溫度　出處：《光譜學(xué)與光譜分析》2017年02期 　論文類型：期刊論文

【摘要】：常壓高頻等離子體由于其無電極污染、能量密度大、溫度高及氣氛可控的特點(diǎn)而得到了廣泛應(yīng)用,電子溫度是影響其使用性能的關(guān)鍵參數(shù),根據(jù)發(fā)射光譜使用玻爾茲曼圖解法計(jì)算是最常用且最可行的診斷方法,但由于躍遷幾率數(shù)據(jù)可靠性、環(huán)境背景、儀器誤差、數(shù)據(jù)處理誤差等原因,不同研究者根據(jù)不同譜線計(jì)算的結(jié)果通常不具有可比性。為了得到可靠性高的電子溫度計(jì)算結(jié)果,針對(duì)存在SiO_2顆粒的常壓高頻空氣等離子體,以光譜范圍為200~1 077nm的7通道高分辨光纖光譜儀為測(cè)量工具,該研究討論了元素、光譜段選擇對(duì)計(jì)算結(jié)果可靠性的影響。結(jié)果表明,由于N_2占電離氣體的主要部分且不參與化學(xué)反應(yīng),NⅠ發(fā)射譜線是最佳選擇,使用738~940nm內(nèi)NⅠ的譜線計(jì)算的擬合度為0.95,計(jì)算的電子溫度最為可靠;由于Si和O極易結(jié)合成SiO_2顆粒,此二元素的能量不再滿足玻爾茲曼分布,計(jì)算結(jié)果的可靠性較差,因此不能使用Si和O元素的發(fā)射譜線計(jì)算電子溫度;使用摻入Ar的譜線同樣不能得到可靠的電子溫度計(jì)算結(jié)果。因此,為了有效診斷等離子體電子溫度,在不同應(yīng)用場(chǎng)合中,應(yīng)當(dāng)根據(jù)實(shí)際情況,合理選擇測(cè)量光譜范圍及光譜儀,選取合適的粒子及其發(fā)射譜線。
[Abstract]:Atmospheric high frequency plasma has been widely used because of its characteristics of no electrode pollution, high energy density, high temperature and controllable atmosphere. Electron temperature is the key parameter affecting its performance. Boltzmann method is the most commonly used and feasible diagnostic method according to the emission spectrum, but due to the reliability of transition probability data, environment background, instrument error, data processing error and so on. The results calculated by different researchers according to different spectral lines are usually not comparable. In order to obtain reliable results of electron temperature calculation, the atmospheric pressure high frequency air plasma with SiO_2 particles is used. Using a 7-channel high-resolution optical fiber spectrometer with a spectral range of 200 ~ 1077nm as a measuring tool, the influence of elements and spectral band selection on the reliability of the calculation results is discussed. Since NII is the main part of the ionized gas and does not take part in the chemical reaction, the N 鈪，

本文編號(hào)：1471703