發(fā)布時間：2018-01-28 08:12

  本文關(guān)鍵詞： 氧化鋅 薄膜晶體管 透明 指紋識別 有源矩陣 傳感器　出處：《浙江大學(xué)》2017年碩士論文　論文類型：學(xué)位論文

【摘要】：當(dāng)今移動互聯(lián)網(wǎng)的時代,生物識別技術(shù)已是手機(jī)必不可少的功能,能與移動智能終端結(jié)合的基于硅電容式指紋識別技術(shù)已經(jīng)頗為成熟,而能夠在屏幕上運(yùn)用的透明的指紋識別技術(shù)也得到了越來越多的關(guān)注。氧化物薄膜晶體管器件由于其透明、工藝步驟少、成本低等特點已在顯示領(lǐng)域得到了大規(guī)模的應(yīng)用。顯示和指紋識別的矩陣結(jié)構(gòu)頗為相似,利用氧化物薄膜晶體管制作透明指紋識別傳感器將有非常廣泛的前景。本文首先成功研發(fā)一套穩(wěn)定、可靠的氧化鋅薄膜晶體管制備工藝,解決了氧化鋅薄膜晶體管穩(wěn)定性差、可靠性低的問題,再利用氧化鋅薄膜晶體管來設(shè)計制備透明指紋識別傳感器,經(jīng)過探針臺測試,已獲得一段與實際相匹配的指紋圖像,最后設(shè)計了一套能夠?qū)崟r顯示的外圍檢測電路。具體的研究內(nèi)容和成果如下:1、結(jié)合原有工藝步驟深入研究了氧化鋅薄膜晶體管的結(jié)構(gòu)特點,針對閾值電壓比較負(fù)的問題設(shè)計了不同的退火條件,并通過大量的嘗試,得出不同退火條件將直接影響器件閾值電壓的結(jié)論,并最終成功制備出閾值電壓為正且性能良好穩(wěn)定的器件以及一套較為成熟的器件制備工藝。2、結(jié)合氧化鋅薄膜晶體管的器件和有源矩陣結(jié)構(gòu)設(shè)計了透明指紋識別傳感器充放電結(jié)構(gòu),用Hspice軟件對有源矩陣中的最小單元進(jìn)行了仿真,經(jīng)過理論分析,對充放電結(jié)構(gòu)進(jìn)行優(yōu)化修改,分別設(shè)計了單級放大和雙級放大的有源矩陣結(jié)構(gòu),對這三種不同結(jié)構(gòu)的透明指紋識別傳感器進(jìn)行了仿真對比,提出最優(yōu)化的傳感器電路結(jié)構(gòu)。3、成功制備出基于氧化鋅薄膜晶體管的有源矩陣指紋識別陣列,有50×50的大陣列和一些測試小陣列,搭建了一套探針測試平臺。通過對不同結(jié)構(gòu)小陣列的測試,檢測到電容的充放電信號,計算分析得到了放電信號與感應(yīng)電容數(shù)值之間的對應(yīng)關(guān)系。通過制作指紋模型按壓在大陣列上進(jìn)行模擬真實手指測試,以及對放電信號的處理和整合,獲得了一段可靠的指紋圖形。4、基于透明指紋識別傳感器設(shè)計了一套外圍檢測電路,結(jié)合上位機(jī)程序?qū)鞲衅鞯妮敵鲂盘栠M(jìn)行實時顯示。通過對電路和程序的調(diào)試,初步完成對電容放電信號以及手指觸摸信號的采集。
[Abstract]:In the era of mobile Internet, biometric technology is an indispensable function of mobile phone, and the silicon capacitive fingerprint identification technology which can be combined with mobile intelligent terminal is quite mature. The transparent fingerprint identification technology which can be used on the screen has been paid more and more attention. Because of its transparency, the process steps of oxide thin film transistor devices are less and less. The characteristics of low cost have been widely used in the field of display. The matrix structure of display and fingerprint recognition is quite similar. Making transparent fingerprint identification sensor using oxide thin film transistor will have a very wide prospect. Firstly, a stable and reliable fabrication process of ZnO thin film transistor is successfully developed in this paper. The problem of poor stability and low reliability of ZnO thin film transistor is solved. Then the transparent fingerprint identification sensor is designed and fabricated by using ZnO thin film transistor and tested by probe table. A fingerprint image matching with reality has been obtained, and a set of peripheral detection circuits which can be displayed in real time has been designed. The specific research contents and results are as follows: 1. The structure characteristics of ZnO thin film transistors are deeply studied in combination with the original process steps. Different annealing conditions are designed for the negative threshold voltage problem, and a large number of attempts are made. It is concluded that different annealing conditions will directly affect the threshold voltage of the device. Finally, the device with positive threshold voltage and good stability and a set of mature device fabrication process .2 are successfully fabricated. The charge / discharge structure of transparent fingerprint identification sensor is designed by combining the device and active matrix structure of ZnO thin film transistor. The minimum element in active matrix is simulated by Hspice software. After theoretical analysis, the charge-discharge structure was optimized and the single-stage amplification and two-stage amplification of the active matrix structure were designed, and the three transparent fingerprint identification sensors with different structures were simulated and compared. An optimized sensor circuit structure. 3 is proposed. The active matrix fingerprint identification array based on ZnO thin film transistor is successfully fabricated. There are 50 脳 50 large arrays and some small test arrays. A probe testing platform was built. The charge-discharge signals of capacitors were detected by testing small arrays with different structures. The corresponding relationship between the discharge signal and the inductive capacitance is obtained. The fingerprint model is made to simulate the real finger test on the large array, and the discharge signal is processed and integrated. A reliable fingerprint figure. 4 is obtained, and a peripheral detection circuit based on transparent fingerprint identification sensor is designed. The output signal of the sensor is displayed in real time with the upper computer program. The capacitive discharge signal and the finger touch signal are collected by debugging the circuit and the program.
【學(xué)位授予單位】：浙江大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：TN321.5;TP212;TP391.41

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