【摘要】：考慮獲知SU-8膠的光彈性性能有利于拓展其在微納米領(lǐng)域中的應(yīng)用范圍,本文設(shè)計(jì)了材料應(yīng)力光學(xué)系數(shù)顯微測(cè)量光路,完成了SU-8膠應(yīng)力光學(xué)系數(shù)的測(cè)量實(shí)驗(yàn)。首先,基于光彈性原理設(shè)計(jì)了測(cè)量光路,推導(dǎo)了求解應(yīng)力光學(xué)系數(shù)的計(jì)算公式;然后,根據(jù)所設(shè)計(jì)的光路搭建了應(yīng)力光學(xué)系數(shù)顯微測(cè)量實(shí)驗(yàn)裝置,在SU-8膠試樣光彈性條紋的單個(gè)半級(jí)數(shù)范圍內(nèi)進(jìn)行了單向拉伸實(shí)驗(yàn);最后,利用Matlab提取實(shí)驗(yàn)照片組中光強(qiáng)值信息,得到了不同拉力下透過SU-8膠試樣的單色光光強(qiáng)值,計(jì)算求解出了SU-8膠的應(yīng)力光學(xué)系數(shù)。實(shí)驗(yàn)結(jié)果以及測(cè)量公式計(jì)算顯示,SU-8膠的應(yīng)力光學(xué)系數(shù)為(3.007±0.149)×10 11 m2/N,大于光學(xué)玻璃等材料的應(yīng)力光學(xué)系數(shù),也遠(yuǎn)大于二氧化硅等MEMS領(lǐng)域常用材料的應(yīng)力光學(xué)系數(shù)。實(shí)驗(yàn)結(jié)果可為以SU-8膠為材料,通過光彈性原理進(jìn)行微力測(cè)量的微探針、微夾鉗等的設(shè)計(jì)與制作打下基礎(chǔ)。
[Abstract]:Considering that the photoelastic properties of SU-8 are helpful to expand its application range in the field of micro- and nano-scale, the optical path of material stress optical coefficient measurement is designed in this paper, and the measurement experiment of SU-8 adhesive stress optical coefficient is completed. Firstly, based on the principle of photoelasticity, the measuring optical path is designed, and the formula for calculating the stress optical coefficient is derived. Then, according to the designed optical path, a micro-measuring apparatus of stress optical coefficient is built, and the uniaxial tensile test is carried out in the range of a single semi-series of photoelastic stripes of SU-8 adhesive samples. Finally, using Matlab to extract the light intensity information from the experimental photo group, the monochromatic light intensity values of the SU-8 adhesive samples under different tensile forces were obtained, and the stress optical coefficients of the SU-8 adhesive were calculated. The experimental results and the calculation of the measurement formula show that the stress optical coefficient of SU-8 adhesive is (3.007 鹵0.149) 脳 10 ~ (-1) 脳 10 ~ (11) m ~ (2 / N), which is larger than that of optical glass and other materials. It is also much larger than the stress optical coefficient of MEMS materials such as silica. The experimental results can lay a foundation for the design and fabrication of microprobes and clamps based on the photoelastic principle of SU-8 adhesive.
【作者單位】： 大連理工大學(xué)機(jī)械工程學(xué)院;
【基金】：國(guó)家自然科學(xué)基金(No.51175056) 國(guó)家973重點(diǎn)基礎(chǔ)研究發(fā)展計(jì)劃資助項(xiàng)目(No.2011CB302101) 中央高�；究蒲袠I(yè)務(wù)費(fèi)專項(xiàng)資金資助項(xiàng)目(DUT14RC(3)006) 中國(guó)博士后科學(xué)基金(2014M561226)資助課題
【分類號(hào)】：O348.1

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