本文關(guān)鍵詞：全反射式外差干涉測量微小應力的模擬分析　出處：《激光與光電子學進展》2016年06期 　論文類型：期刊論文

  更多相關(guān)文章： 測量外差干涉 全反射 微小應力 光柵 數(shù)值模擬

【摘要】：提出一種利用多次全反射共光程外差干涉技術(shù)測量微小應力的光學方法。將一個具有兩種偏振狀態(tài)(s偏振與p偏振)的外差光源入射,通過光柵產(chǎn)生+1階衍射光,光柵受拉應力的拉伸使周期發(fā)生變化,+1階衍射光發(fā)生角度偏移。+1階衍射光入射至長條棱鏡內(nèi)產(chǎn)生全反射,造成s偏振光與p偏振光之間相位差的變化,將該相位差代入推導得到的光柵應力關(guān)系中即可求出拉應力。利用棱鏡內(nèi)多次全反射可提高測量精度。根據(jù)模擬測量結(jié)果可得,入射角為-5°、光柵周期為10μm、全反射次數(shù)為30時,拉應力對相位的靈敏度為1.500N/(°),解析度為0.015N。該方法具有結(jié)構(gòu)簡單、測量快速、靈敏度高及不受外界干擾等優(yōu)點。
[Abstract]:In this paper, an optical method for measuring micro stress by means of multiple total reflection common path heterodyne interferometry is proposed. An incident heterodyne light source with two polarization states (s and p) is incident. The first order diffraction light is generated by the grating, and the period changes with the tensile stress of the grating, and the angle deviation of the first order diffraction light occurs. The first order diffraction light incident into the long bar prism produces total reflection. The phase difference between the S-polarized light and the p-polarized light is changed. The tension stress can be obtained by inserting the phase difference into the derived grating stress relationship. The measurement accuracy can be improved by using multiple total reflections in the prism. According to the simulated measurement results, the incidence angle is -5 擄. When the grating period is 10 渭 m and the total reflection number is 30, the sensitivity of tensile stress to the phase is 1.500 N / (擄) and the resolution is 0.015 N. this method is simple in structure and rapid in measurement. High sensitivity and free from external interference and other advantages.
【作者單位】： 陜西理工學院數(shù)學與計算機科學學院;
【基金】：國家自然科學基金(11401357) 陜西理工學院科研計劃(SLGKY12-04)
【分類號】：O348.1
【正文快照】： 1引言自激光出現(xiàn)以來,激光干涉已發(fā)展成為一項重要的光學測量技術(shù),廣泛應用于微小角度、微小位移、表面粗糙度、折射率及生物化學中光學活性等的測量[1-3]。近年來微型機電元件的高度發(fā)展,對精密機械、光電半導體等產(chǎn)業(yè)有著十分重要的影響,應力是許多工程應用或元件設計中一個，

本文編號：1376510