【摘要】：從能量平衡的角度建立了靜電驅(qū)動(dòng)柔性振膜微泵的平衡方程,基于對(duì)壓縮過(guò)程中振膜動(dòng)能的考慮,改進(jìn)了最小能量法壓縮模型,結(jié)合均勻壓力載荷下圓薄膜大撓度形變理論對(duì)靜電驅(qū)動(dòng)柔性振膜微泵進(jìn)行理論分析。對(duì)振膜與腔體壁面貼合的壓縮過(guò)程中各能量相互轉(zhuǎn)化的關(guān)系進(jìn)行分析,并與最小能量法模型進(jìn)行了對(duì)比。結(jié)果表明,能量平衡法考慮了薄膜振動(dòng)過(guò)程中的動(dòng)能,故薄膜與腔體具有更大的貼合面積,且以薄膜與腔體完全貼合時(shí)作為零應(yīng)力參考狀態(tài)降低壓縮過(guò)程中的薄膜形變勢(shì)能,計(jì)算得到的靜電微泵的壓縮效率更高,在驅(qū)動(dòng)電壓為300 V時(shí),改進(jìn)的雙腔模型中振膜貼合半徑為4.06 mm,所得最大壓升為87.08 k Pa�；诟倪M(jìn)的模型,對(duì)雙腔微泵壓升的影響因素進(jìn)行討論,發(fā)現(xiàn)降低柔性薄膜厚度會(huì)使輸出壓力有所上升,并且減小腔體表面介電層厚度、減小腔體深度與半徑可以有助于提高微泵的壓升。
[Abstract]:The equilibrium equation of the electrostatic-driven flexible diaphragm micropump is established from the angle of energy balance. Based on the consideration of the kinetic energy of the membrane in the compression process, the minimum energy compression model is improved. Based on the theory of large deflection deformation of circular thin film under uniform pressure, the electrostatic-driven flexible vibration membrane micropump is theoretically analyzed. In this paper, the relation of the energy transformation between the diaphragm and the cavity wall during the compression process is analyzed and compared with the minimum energy method model. The results show that the energy balance method takes into account the kinetic energy in the vibration process of the thin film, so the film and the cavity have a larger fitting area, and the film deformation potential energy in the compression process is reduced by the zero stress reference state when the film is fully fitted to the cavity. The calculated compression efficiency of the electrostatic micropump is higher. When the driving voltage is 300V, the maximum pressure rise is 87.08 k Pa. in the improved double cavity model with a film fitting radius of 4.06 mm,. Based on the improved model, the influencing factors of the pressure rise of the dual-cavity micro-pump are discussed. It is found that decreasing the thickness of the flexible film will increase the output pressure and decrease the thickness of the dielectric layer on the surface of the cavity. Reducing the depth and radius of the cavity can help to improve the pressure rise of the micro-pump.
【作者單位】： 上海交通大學(xué)機(jī)械與動(dòng)力工程學(xué)院制冷與低溫研究所;
【基金】：國(guó)家自然科學(xué)基金項(xiàng)目(50976067);國(guó)家自然科學(xué)基金項(xiàng)目(51576123)
【分類(lèi)號(hào)】：TH38

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