發(fā)布時(shí)間：2018-11-29 07:55

【摘要】：靜電微泵具有能量密度高、響應(yīng)時(shí)間短、能量消耗低等特點(diǎn),在生物流體控制和電子器件熱管理方面具有廣泛的應(yīng)用前景。利用柔性振膜和具有連續(xù)曲面的腔體構(gòu)成的靜電驅(qū)動(dòng)柔性振膜微泵,縮小了振膜與腔體的間距,增大了靜電驅(qū)動(dòng)力和振膜變形量,從而提高了微泵的壓縮性能。本文針對(duì)靜電驅(qū)動(dòng)柔性振膜微泵分別進(jìn)行了理論分析、加工封裝和實(shí)驗(yàn)測(cè)試三個(gè)方面的研究。論文主要研究?jī)?nèi)容如下:(1)將均勻壓力作用下的圓薄膜變形半解析解與最小能量法相結(jié)合,建立了用于分析具有連續(xù)曲面腔體結(jié)構(gòu)的靜電驅(qū)動(dòng)柔性振膜微泵的壓升性能的理論模型。討論了不同設(shè)計(jì)參數(shù)對(duì)微泵壓升的影響,得出介電層厚度、腔體的半徑和深度均相對(duì)較小的雙腔結(jié)構(gòu)靜電驅(qū)動(dòng)振膜微泵更有利于產(chǎn)生相對(duì)較高的壓升的結(jié)論;(2)分析討論了具有柔性閥片的靜電驅(qū)動(dòng)微型閥對(duì)微泵排氣性能的影響。微型閥的引入會(huì)導(dǎo)致微泵的壓升和容積效率均出現(xiàn)一定程度的降低;而柔性閥片結(jié)構(gòu)則有利于降低微型閥的臨界關(guān)閥電壓,提高微泵運(yùn)行的可靠性;(3)將小型轉(zhuǎn)子壓縮機(jī)中使用的串流方法和雙振膜驅(qū)動(dòng)結(jié)構(gòu)相結(jié)合,設(shè)計(jì)得到了具有雙膜串流結(jié)構(gòu)的靜電驅(qū)動(dòng)柔性振膜微泵。利用串流,在不影響微泵排氣壓力性能的前提下,提高了微泵的容積效率和有效排氣量;(4)結(jié)合微加工工藝和精密機(jī)械加工技術(shù),實(shí)現(xiàn)了連續(xù)曲面腔體和集成了多個(gè)電極的柔性振膜的加工制作;配制ATSP溶液,選擇合適的工藝,完成了微泵的鍵合;利用AF 163-2K熱塑性薄膜實(shí)現(xiàn)了微泵外圍圍護(hù)結(jié)構(gòu)以及微通道換熱器的封裝;(5)對(duì)靜電力驅(qū)動(dòng)下振膜與腔體的貼合過(guò)程進(jìn)行了觀測(cè),發(fā)現(xiàn)振膜電極和腔體的尺寸偏差會(huì)導(dǎo)致該過(guò)程呈現(xiàn)顯著的非軸對(duì)稱特性;(6)對(duì)封裝后微泵的壓升性能進(jìn)行了實(shí)驗(yàn)測(cè)試;微泵進(jìn)排氣壓差隨驅(qū)動(dòng)電壓幅值的升高而增大,與理論分析結(jié)果呈現(xiàn)出相同的規(guī)律;同時(shí)微泵進(jìn)排氣壓差也隨驅(qū)動(dòng)頻率的增大而增大;此外,對(duì)壓力測(cè)試信號(hào)在驅(qū)動(dòng)頻率附近進(jìn)行濾波,獲得了與驅(qū)動(dòng)頻率接近的正弦波信號(hào),信號(hào)波動(dòng)幅度同樣隨驅(qū)動(dòng)電壓幅值和頻率的升高而增大。
[Abstract]:Electrostatic micropump has many advantages, such as high energy density, short response time and low energy consumption. It is widely used in biological fluid control and thermal management of electronic devices. The flexible diaphragm micropump is driven by a flexible diaphragm and a cavity with a continuous curved surface, which reduces the distance between the diaphragm and the cavity, increases the electrostatic driving force and the deformation of the diaphragm, and thus improves the compression performance of the micropump. In this paper, the electrostatic driven flexible diaphragm micropumps are studied in three aspects: theoretical analysis, machining packaging and experimental testing. The main contents of this thesis are as follows: (1) the semi-analytical solution of circular film deformation under uniform pressure is combined with the minimum energy method. A theoretical model for analyzing the pressure-lift performance of a electrostatic driven flexible diaphragm micropump with a continuous curved cavity is established. The influence of different design parameters on the pressure rise of micropump is discussed. It is concluded that the electrostatic driven diaphragm micropump with relatively small dielectric layer thickness, cavity radius and depth is more favorable for producing higher pressure rise. (2) the effect of electrostatic driven micro valve with flexible valve on the exhaust performance of micro pump is analyzed and discussed. The introduction of micro valve will reduce the pressure rise and volumetric efficiency of micro pump to a certain extent, while the structure of flexible valve sheet will help to reduce the critical closing voltage of micro valve and improve the reliability of micro pump operation. (3) combining the series flow method used in the small rotor compressor with the double diaphragm drive structure, the electrostatic driven flexible diaphragm micropump with the double film series flow structure is designed. The volume efficiency and effective exhaust volume of the micropump are improved by using the series flow without affecting the exhaust pressure performance of the micropump. (4) the fabrication of continuous curved cavity and flexible diaphragm integrated with multiple electrodes is realized by combining micromachining technology and precision machining technology, and the bonding of micropump is accomplished by preparing ATSP solution and selecting suitable process. The AF 163-2K thermoplastic film is used to realize the envelope structure of the micropump and the encapsulation of the microchannel heat exchanger. (5) the bonding process between the diaphragm and the cavity driven by hydrostatic power is observed. It is found that the dimension deviation of the diaphragm electrode and the cavity will lead to the obvious non-axisymmetric characteristics of the process. (6) the pressure-lift performance of the micropump after encapsulation is tested, and the pressure difference between inlet and exhaust increases with the increase of the driving voltage amplitude, which shows the same rule as the theoretical analysis. At the same time, the inlet and exhaust pressure difference of micropump also increases with the increase of driving frequency. In addition, a sinusoidal wave signal close to the driving frequency is obtained by filtering the pressure test signal near the driving frequency, and the amplitude of the signal fluctuation increases with the increase of the driving voltage amplitude and frequency.
【學(xué)位授予單位】：上海交通大學(xué)
【學(xué)位級(jí)別】：博士
【學(xué)位授予年份】：2013
【分類號(hào)】：TH38;O441.1

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本文編號(hào)：2364398