基于硅基底微柱結(jié)構(gòu)的超疏水表面的制備及其摩擦學(xué)性能研究
發(fā)布時間：2018-11-23 08:22
【摘要】：超疏水表面在自然界和工農(nóng)業(yè)生產(chǎn)中得到了廣泛的應(yīng)用,潤濕性是衡量超疏水表面疏水性強弱的重要指標之一,主要由表面微觀結(jié)構(gòu)和表面化學(xué)組成共同決定。只改變固體表面化學(xué)成分,很難使表面達到超疏水的效果,因此通過表面形貌來控制表面潤濕性在超疏水表面的制備過程中起到了關(guān)鍵性作用。 本文以單晶硅片為基底,利用感應(yīng)耦合等離子體刻蝕技術(shù)(ICP),在硅片表面加工微米級微柱結(jié)構(gòu)陣列,隨后在其表面自組裝一層十八烷基三氯硅烷(OTS)分子膜,實現(xiàn)超疏水。并應(yīng)用能量色散光譜儀(EDS)、電子隧道掃描顯微鏡(SEM)、三維激光共聚焦顯微鏡、原子力顯微鏡(AFM)和接觸角測量儀等設(shè)備分別對單純加工了微柱結(jié)構(gòu)陣列的硅片和加工了微柱結(jié)構(gòu)陣列并自組裝OTS分子膜的硅片進行了表面形貌、化學(xué)成分和潤濕性的表征。通過原子力顯微鏡(AFM)研究了OTS分子膜的摩擦學(xué)性能。主要研究內(nèi)容歸納如下： 硅片表面加工微柱結(jié)構(gòu)陣列后,實現(xiàn)了從親水向疏水的轉(zhuǎn)變。硅片表面疏水性隨著微柱結(jié)構(gòu)尺寸的變化發(fā)生規(guī)律性變化。 在加工了微柱結(jié)構(gòu)的硅片表面自組裝OTS分子膜后,部分硅片實現(xiàn)了超疏水,最大接觸角為157.35°,硅片表面疏水性隨著微柱結(jié)構(gòu)尺寸的變化發(fā)生規(guī)律性變化。水滴在硅片表面的接觸狀態(tài)為Cassie復(fù)合接觸狀態(tài),既有固/液接觸又有氣/液接觸。 硅片表面的OTS分子膜減小了表面摩擦力和表面黏著力,提高了硅片表面摩擦學(xué)性能。
[Abstract]:Superhydrophobic surface has been widely used in nature and industrial and agricultural production. Wettability is one of the important indexes to measure the hydrophobicity of superhydrophobic surface, which is mainly determined by the microstructure and chemical composition of the surface. It is difficult to achieve superhydrophobic effect by only changing the chemical composition of solid surface, so controlling surface wettability by surface morphology plays a key role in the preparation of superhydrophobic surface. In this paper, we use inductively coupled plasma etching technique (ICP),) to fabricate microcolumn arrays on silicon wafers on a single crystal silicon substrate, and then self-assemble an octadecyl trichlorosilane (OTS) molecular film on the surface of monocrystalline silicon wafers. Realize super hydrophobic. The energy dispersive spectrometer (EDS), electron tunnel scanning microscope (SEM), 3D laser confocal microscope was used. Atomic force microscope (AFM) (AFM) and contact angle measuring instrument (AFM) were used to characterize the surface morphology, chemical composition and wettability of silicon wafers which were fabricated by microcolumn arrays and self-assembled OTS films respectively. The tribological properties of OTS films were studied by atomic force microscope (AFM) (AFM). The main research contents are summarized as follows: the hydrophilic to hydrophobic transition is realized after the fabrication of the microcolumn array on the wafer surface. The hydrophobicity of silicon wafer surface changes regularly with the change of microcolumn size. After processing the self-assembled OTS molecular film on the wafer with microcolumn structure, some of the wafers were superhydrophobic, with a maximum contact angle of 157.35 擄. The hydrophobicity of the wafer surface changed regularly with the change of the size of the microcolumn structure. The contact state of water droplets on the surface of silicon wafer is Cassie compound contact state, both solid / liquid contact and gas / liquid contact. The surface friction force and the surface adhesion of the OTS molecular film on the silicon wafer are reduced, and the tribological properties of the silicon wafer surface are improved.
【學(xué)位授予單位】：北京交通大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2011
【分類號】：TH117
本文編號：2350905
[Abstract]:Superhydrophobic surface has been widely used in nature and industrial and agricultural production. Wettability is one of the important indexes to measure the hydrophobicity of superhydrophobic surface, which is mainly determined by the microstructure and chemical composition of the surface. It is difficult to achieve superhydrophobic effect by only changing the chemical composition of solid surface, so controlling surface wettability by surface morphology plays a key role in the preparation of superhydrophobic surface. In this paper, we use inductively coupled plasma etching technique (ICP),) to fabricate microcolumn arrays on silicon wafers on a single crystal silicon substrate, and then self-assemble an octadecyl trichlorosilane (OTS) molecular film on the surface of monocrystalline silicon wafers. Realize super hydrophobic. The energy dispersive spectrometer (EDS), electron tunnel scanning microscope (SEM), 3D laser confocal microscope was used. Atomic force microscope (AFM) (AFM) and contact angle measuring instrument (AFM) were used to characterize the surface morphology, chemical composition and wettability of silicon wafers which were fabricated by microcolumn arrays and self-assembled OTS films respectively. The tribological properties of OTS films were studied by atomic force microscope (AFM) (AFM). The main research contents are summarized as follows: the hydrophilic to hydrophobic transition is realized after the fabrication of the microcolumn array on the wafer surface. The hydrophobicity of silicon wafer surface changes regularly with the change of microcolumn size. After processing the self-assembled OTS molecular film on the wafer with microcolumn structure, some of the wafers were superhydrophobic, with a maximum contact angle of 157.35 擄. The hydrophobicity of the wafer surface changed regularly with the change of the size of the microcolumn structure. The contact state of water droplets on the surface of silicon wafer is Cassie compound contact state, both solid / liquid contact and gas / liquid contact. The surface friction force and the surface adhesion of the OTS molecular film on the silicon wafer are reduced, and the tribological properties of the silicon wafer surface are improved.
【學(xué)位授予單位】：北京交通大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2011
【分類號】：TH117
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