【摘要】：壓電泵可通過(guò)電信號(hào)精確控制流體輸出,并且體積小,能耗低,無(wú)電磁干擾,工作噪聲低,在生物醫(yī)療、化學(xué)分析、芯片冷卻、噴墨打印等方面具有廣闊前景,是目前微流體領(lǐng)域研究的熱門(mén)課題。目前研究人員在壓電泵結(jié)構(gòu)方面進(jìn)行了深入具體的研究,而在壓電泵驅(qū)動(dòng)、控制方面的研究相對(duì)較少,無(wú)法充分發(fā)揮出壓電泵在流體輸送精密控制方面的優(yōu)勢(shì),因此對(duì)該方面進(jìn)行研究顯得十分迫切。本文結(jié)合教育部高等學(xué)�？蒲袆�(chuàng)新重大培育資金項(xiàng)目及國(guó)家自然科學(xué)基金項(xiàng)目,圍繞單雙相壓電泵系統(tǒng),開(kāi)展了結(jié)構(gòu)設(shè)計(jì)、專(zhuān)用驅(qū)動(dòng)電源研制、輸出性能測(cè)試、流量自測(cè)量及液體輸送精密控制方面的工作。 1.泵用壓電振子性能分析及測(cè)試 壓電振子是單雙相壓電泵核心驅(qū)動(dòng)部件,利用Butterworth Van Dyke等效電路模型,分析直徑為35mm的泵用雙晶片壓電振子阻抗特性,對(duì)壓電振子阻抗特性進(jìn)行測(cè)試,找出壓電振子一階共振頻率,并計(jì)算出對(duì)應(yīng)的阻抗模；對(duì)圓形雙晶片壓電振子變形能力進(jìn)行試驗(yàn)研究,分別測(cè)試壓電振子表面各點(diǎn)變形位移,壓電振子中心位移與驅(qū)動(dòng)電壓、驅(qū)動(dòng)頻率的關(guān)系,為壓電泵的結(jié)構(gòu)設(shè)計(jì)及驅(qū)動(dòng)電路設(shè)計(jì)奠定基礎(chǔ)。 2.單雙相壓電泵的設(shè)計(jì)研制 分析單、雙相壓電泵,包括單腔單振子壓電泵、雙腔串聯(lián)壓電泵、雙腔并聯(lián)壓電泵、主被動(dòng)閥結(jié)合泵、雙主動(dòng)閥壓電泵的工作原理,推導(dǎo)單腔單振子壓電泵輸出能力與壓電振子結(jié)構(gòu)參數(shù)、材料性能參數(shù)、驅(qū)動(dòng)信號(hào)參數(shù)間關(guān)系,分析主動(dòng)閥結(jié)構(gòu)參數(shù)對(duì)工作性能的影響。分析表明與單腔單振子壓電泵相比,雙腔串聯(lián)壓電泵具有更大的輸出壓力,雙腔并聯(lián)泵具有更大的輸出流量；對(duì)雙腔串聯(lián)壓電泵、雙腔并聯(lián)壓電泵來(lái)說(shuō),異步驅(qū)動(dòng)方式比同步驅(qū)動(dòng)方式具有更好的輸出性能；雙主動(dòng)閥壓電泵中具有更寬的工作頻率范圍,并可實(shí)現(xiàn)液體雙向輸送,具有獨(dú)特的輸出性能。制作單雙相壓電泵樣機(jī),為驅(qū)動(dòng)控制的研究提供載體。 3.壓電泵專(zhuān)用驅(qū)動(dòng)電源研制 在對(duì)壓電泵驅(qū)動(dòng)信號(hào)分析基礎(chǔ)上,以單雙相壓電泵為驅(qū)動(dòng)對(duì)象,研制三種專(zhuān)用驅(qū)動(dòng)電源：模擬式單相壓電泵驅(qū)動(dòng)電源、程控式單相壓電泵驅(qū)動(dòng)電源及數(shù)字控制式雙相壓電泵驅(qū)動(dòng)電源。分析驅(qū)動(dòng)電源系統(tǒng)及各部分電路工作機(jī)理。對(duì)研制的壓電泵驅(qū)動(dòng)電路電氣輸出性能進(jìn)行測(cè)試。 研制的三種驅(qū)動(dòng)電源,輸出電壓均可在0V到最大值之間調(diào)節(jié),最大輸出電壓不小于170V；輸出頻率可在5Hz-500Hz之間調(diào)節(jié),其中模擬式單相壓電泵驅(qū)動(dòng)電源體積小、成本低廉。程控式單相壓電泵驅(qū)動(dòng)電源可通過(guò)按鍵對(duì)輸出參數(shù)調(diào)節(jié),避免電位器接觸不良帶來(lái)的影響,提高了電源信號(hào)輸出的可靠性及穩(wěn)定性；數(shù)字控制式雙相壓電泵驅(qū)動(dòng)電源利用直接數(shù)字式頻率合成技術(shù),可輸出兩列有嚴(yán)格相位關(guān)系的正弦信號(hào),相位差可在00-360。范圍內(nèi)調(diào)節(jié),相位差最小分辨率為11.25。,采用數(shù)字化控制,輸出參數(shù)實(shí)時(shí)顯示。研制的三種驅(qū)動(dòng)電源輸出參數(shù)能夠獨(dú)立、連續(xù)調(diào)節(jié),可以靈活方便地對(duì)壓電泵進(jìn)行驅(qū)動(dòng)控制。 4.單雙相壓電泵輸出性能試驗(yàn)研究 利用研制的數(shù)字控制式雙相壓電泵驅(qū)動(dòng)電源,對(duì)單雙相信號(hào)驅(qū)動(dòng)的壓電泵輸出性能進(jìn)行試驗(yàn)研究,研究泵輸出流量、輸出壓力與驅(qū)動(dòng)電壓、驅(qū)動(dòng)頻率、相位差之間的關(guān)系。可知對(duì)于雙腔串聯(lián)泵,異步驅(qū)動(dòng)比同步驅(qū)動(dòng)具有更好的頻率適應(yīng)性及更大的輸出流量,工作頻率范圍為10Hz-400Hz,最大輸出流量為94.174mL/min,并且輸出壓力變動(dòng)幅度小。對(duì)于雙腔并聯(lián)壓電泵,異步驅(qū)動(dòng)方式下具有更好的輸出性能。雙主動(dòng)閥壓電泵具有較寬的工作頻率范圍,從10Hz到220Hz,通過(guò)改變驅(qū)動(dòng)信號(hào)間的相位差,可改變液體的流動(dòng)方向及流量大小,與本文研制的其它壓電泵相比,具有獨(dú)特輸出性能。 5.基于壓電自感知的單腔單振子壓電泵流量自測(cè)量方法 提出一種利用壓電自感知功能的壓電泵流量自測(cè)量方法。對(duì)流量影響因素及傳感壓電信號(hào)與壓電振子變形關(guān)系進(jìn)行分析,得出傳感壓電信號(hào)特征參數(shù)與泵流量有明確對(duì)應(yīng)關(guān)系,在傳感壓電信號(hào)中隱含著壓電泵流量信息。研制用于流量自測(cè)量的傳感壓電信號(hào)參數(shù)測(cè)量電路樣機(jī),并構(gòu)造用于壓電泵流量預(yù)測(cè)的BP神經(jīng)網(wǎng)絡(luò)模型,該神經(jīng)網(wǎng)絡(luò)以電壓參量、頻率作為輸入?yún)?shù),得到流量的預(yù)測(cè)值。 對(duì)提出的流量自測(cè)量方法進(jìn)行試驗(yàn)驗(yàn)證,結(jié)果表明預(yù)測(cè)值與試驗(yàn)測(cè)量值之間的相關(guān)系數(shù)在0.9993以上,最大相對(duì)誤差率小于3.46%。該流量自測(cè)量方法具有較好的準(zhǔn)確性。并且該流量自測(cè)量方法還可以應(yīng)用到其它類(lèi)型、結(jié)構(gòu)的壓電泵中。 6.基于定脈沖數(shù)的液體輸送精密控制方法 在對(duì)壓電泵驅(qū)動(dòng)特點(diǎn)及輸出性能分析基礎(chǔ)上,進(jìn)行基于定脈沖數(shù)的液體精密輸送控制方法研究。研制定脈沖數(shù)控制電路,對(duì)基于定脈沖數(shù)的液體輸送精密控制方法進(jìn)行試驗(yàn)驗(yàn)證。試驗(yàn)結(jié)果表明,在不同的脈沖數(shù)下,壓電泵輸送液體體積具有良好的線(xiàn)性比例關(guān)系,最大相對(duì)誤差為0.424%,相關(guān)系數(shù)為0.9999,表明基于定脈沖數(shù)的液體輸送精密控制方法具有可行性。因此在流體輸送量精度要求較高的場(chǎng)合,可以根據(jù)輸送體積,求出對(duì)應(yīng)的脈沖數(shù),向壓電泵發(fā)送脈沖,實(shí)現(xiàn)流體的精密輸送控制。
[Abstract]:Piezoelectric pumps can accurately control the output of fluids through electrical signals, and have small volume, low energy consumption, no electromagnetic interference, low noise. They have broad prospects in biomedical, chemical analysis, chip cooling, inkjet printing and so on. They are hot topics in the field of microfluids. At present, researchers have conducted in-depth study on the structure of piezoelectric pumps. In this paper, the research on the piezoelectric pump drive and control is relatively small, which can not give full play to the advantages of the piezoelectric pump in the precise control of fluid delivery. Therefore, it is very urgent to study this aspect. Structural design, development of special driving power supply, output performance test, flow self-measurement and precise control of liquid conveying have been carried out.
Performance analysis and test of 1. piezoelectric vibrator for pump
Piezoelectric oscillator is the core driving component of single-phase and dual-phase piezoelectric pump. Using Butterworth Van Dyke equivalent circuit model, the impedance characteristics of bimorph piezoelectric oscillator for pump with a diameter of 35 mm are analyzed. The impedance characteristics of bimorph piezoelectric oscillator are tested. The first-order resonance frequency of the piezoelectric oscillator is found and the corresponding impedance modes are calculated. The deformation ability of the piezoelectric oscillator is tested by experiment. The relationship between the displacement of the center of the piezoelectric oscillator and the driving voltage and the driving frequency is tested, which lays a foundation for the structure design and the driving circuit design of the piezoelectric pump.
Design and development of 2. single phase dual phase piezoelectric pump
The working principle of single-cavity piezoelectric pump and dual-phase piezoelectric pump including single-cavity single-oscillator piezoelectric pump, double-cavity series piezoelectric pump, double-cavity parallel piezoelectric pump, active-passive valve combination pump and dual-active valve piezoelectric pump is analyzed. The relationship between output capacity of single-cavity single-oscillator piezoelectric pump and structural parameters of piezoelectric oscillator, material performance parameters and driving signal parameters is deduced. The analysis shows that the output pressure of the double-cavity piezoelectric pump is higher than that of the single-cavity single-oscillator piezoelectric pump, and the output flow of the double-cavity parallel pump is larger. The valve piezoelectric pump has a wider working frequency range and can realize liquid two-way transmission. It has a unique output performance.
Development of special driving power supply for 3. piezoelectric pump
Based on the analysis of driving signal of piezoelectric pump, three kinds of special driving power supply are developed, which are analog single-phase piezoelectric pump driving power supply, program-controlled single-phase piezoelectric pump driving power supply and digital control dual-phase piezoelectric pump driving power supply. The electrical output performance of the piezoelectric pump driving circuit is tested.
The output voltage of the three kinds of driving power supply can be adjusted from 0V to the maximum value, the maximum output voltage is not less than 170V, and the output frequency can be adjusted between 5Hz and 500Hz. Among them, the analog single-phase piezoelectric pump driving power supply is small in size and low in cost. The reliability and stability of the power supply signal are improved by the bad contact of the positioner. The driving power supply of the digital controlled dual-phase piezoelectric pump can output two series of sinusoidal signals with strict phase relationship by using the direct digital frequency synthesis technology. The phase difference can be adjusted in the range of 100-360. The minimum resolution of the phase difference is 11.25. With digital control and real-time display of output parameters, the output parameters of the three driving power supply can be adjusted independently and continuously, and the piezoelectric pump can be driven and controlled flexibly and conveniently.
Experimental study on output performance of 4. single phase biphase piezoelectric pump
The output performance of piezoelectric pump driven by single-phase and double-phase signals is studied experimentally by using the developed digital control driving power supply of dual-phase piezoelectric pump. The relationship between output flow, output pressure and driving voltage, driving frequency and phase difference is studied. And larger output flow, operating frequency range from 10Hz to 400Hz, the maximum output flow rate is 94.174mL/min, and the output pressure variation is small. Compared with other piezoelectric pumps developed in this paper, it has unique output performance.
5. self sensing method based on piezoelectric self sensing method for single chamber single oscillator piezoelectric pump flow measurement
A flow self-measurement method of piezoelectric pump based on piezoelectric self-sensing function is proposed. The flow influencing factors and the relationship between sensing piezoelectric signal and deformation of piezoelectric oscillator are analyzed. It is concluded that the characteristic parameters of sensing piezoelectric signal correspond to pump flow clearly. The flow information of piezoelectric pump is hidden in sensing piezoelectric signal. The self-measured piezoelectric signal parameter measuring circuit prototype is constructed, and a BP neural network model for flow prediction of piezoelectric pumps is constructed. The neural network takes voltage parameters and frequency as input parameters to obtain the flow prediction value.
The experimental results show that the correlation coefficient between the predicted value and the measured value is above 0.9993, and the maximum relative error rate is less than 3.46%. The flow self-measuring method has good accuracy, and the flow self-measuring method can also be applied to other types and structures of piezoelectric pumps.
6. precise control method for liquid delivery based on fixed pulse number
Based on the analysis of driving characteristics and output performance of piezoelectric pump, the control method of liquid precise conveying based on constant pulse number is studied. The pulse numerical control circuit is developed and the precise control method of liquid conveying based on constant pulse number is tested and verified. The maximum relative error is 0.424%, and the correlation coefficient is 0.9999. It shows that the precision control method of liquid conveying based on the fixed pulse number is feasible. Therefore, in the case of high precision of fluid conveying, the corresponding pulse number can be calculated according to the conveying volume, and the pulse number can be sent to the piezoelectric pump to realize the fluid conveying. Precision conveyor control.
【學(xué)位授予單位】：吉林大學(xué)
【學(xué)位級(jí)別】：博士
【學(xué)位授予年份】：2014
【分類(lèi)號(hào)】：TH38;TP273

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