本文選題：微機電系統(tǒng) + 微鏡��； 參考：《華南理工大學》2014年博士論文

【摘要】：MEMS微鏡在光開關(guān)、高清晰顯示、光學相干斷層掃描、數(shù)字投影和條形碼掃描等領(lǐng)域獲得廣泛應用，引起了國際學術(shù)界和工業(yè)界的關(guān)注。光開關(guān)應用中要求MEMS微鏡具有良好的暫態(tài)響應和掃描定位精度，，成像應用中需要MEMS微鏡跟蹤給定軌跡(正弦或三角波軌跡)進行掃描�？紤]到基于MEMS微鏡應用中的性能要求，本文基于滑�？刂评碚撛O(shè)計控制算法并應用于MEMS扭轉(zhuǎn)微鏡，主要內(nèi)容包括以下幾個方面： (1)將一階滑�？刂扑惴ê投ATwsiting控制算法應用于帶側(cè)面電極的2D靜電驅(qū)動MEMS扭轉(zhuǎn)微鏡，目的是提高系統(tǒng)的暫態(tài)響應和定位精度。通過MATLAB仿真和基于可編程門陣列(FPGA)硬件的實驗驗證所提出算法的有效性。仿真和實驗結(jié)果表明，與開環(huán)控制相比,閉環(huán)控制系統(tǒng)具有較好的暫態(tài)響應和定位精度。與一階滑�？刂葡啾�，二階Twsiting控制下的系統(tǒng)具有較好的定位精度。 (2)針對帶側(cè)面電極2D靜電驅(qū)動MEMS扭轉(zhuǎn)微鏡設(shè)計基于積分滑模面的二階滑�？刂扑惴�，該算法由等價控制和切換控制兩部分組成。采用Lyapunov理論證明系統(tǒng)的穩(wěn)定性，通過定點控制、跟蹤控制和擾動實驗來驗證閉環(huán)系統(tǒng)的性能。實驗結(jié)果表明二階積分滑�？刂颇軌蚋纳葡到y(tǒng)暫態(tài)響應,提高定位和跟蹤掃描的精度。 (3)將積分滑�？刂扑惴☉糜陔姶膨�(qū)動MEMS扭轉(zhuǎn)微鏡，建立基于電磁驅(qū)動MEMS扭轉(zhuǎn)微鏡的激光掃描成像系統(tǒng),實現(xiàn)閉環(huán)控制下的1D掃描成像。實驗結(jié)果表明，與傳統(tǒng)開環(huán)控制和PID控制相比，積分滑�？刂葡碌南到y(tǒng)具有較好的暫態(tài)響應和定位精度，而且能夠精確跟蹤給定正弦和三角波軌跡進行掃描。
[Abstract]:MEMS micromirror has been widely used in optical switch, high definition display, optical coherence tomography, digital projection and bar code scanning. MEMS microscopes are required to have good transient response and scanning accuracy in optical switch applications. MEMS microscopes are required to track given tracks (sinusoidal or triangular wave trajectories) for scanning in imaging applications. Considering the performance requirements of MEMS micromirror applications, this paper designs a control algorithm based on sliding mode control theory and applies it to MEMS torsional micromirror. The main contents are as follows: (1) the first order sliding mode control algorithm and the second order Twsiting control algorithm are applied to 2D electrostatically driven MEMS torsion micromirror with side electrodes to improve the transient response and positioning accuracy of the system. The effectiveness of the proposed algorithm is verified by MATLAB simulation and experiments based on programmable gate array (FPGA) hardware. Simulation and experimental results show that the closed-loop control system has better transient response and positioning accuracy than open-loop control. Compared with the first order sliding mode control, the second order Twsiting control system has better positioning accuracy. The second order sliding mode control algorithm based on integral sliding mode surface is designed for 2D electrostatic actuated MEMS torsion micromirror with side electrode. The algorithm consists of equivalent control and switching control. The stability of the system is proved by Lyapunov theory. The performance of the closed-loop system is verified by fixed-point control, tracking control and perturbation experiments. The experimental results show that the second order integral sliding mode control can improve the transient response of the system and improve the accuracy of positioning and scanning. A laser scanning imaging system based on electromagnetically driven MEMS torsion micromirror is established to realize 1D scanning imaging under closed loop control. The experimental results show that the integrated sliding mode control system has better transient response and positioning accuracy than the traditional open-loop control and pid control, and it can accurately track the given sine and triangular wave trajectories for scanning.
【學位授予單位】：華南理工大學
【學位級別】：博士
【學位授予年份】：2014
【分類號】：TH-39;TP273

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