本文選題：微機(jī)電系統(tǒng) + 微鏡��； 參考：《華南理工大學(xué)》2014年博士論文

【摘要】：MEMS微鏡在光開(kāi)關(guān)、高清晰顯示、光學(xué)相干斷層掃描、數(shù)字投影和條形碼掃描等領(lǐng)域獲得廣泛應(yīng)用，引起了國(guó)際學(xué)術(shù)界和工業(yè)界的關(guān)注。光開(kāi)關(guān)應(yīng)用中要求MEMS微鏡具有良好的暫態(tài)響應(yīng)和掃描定位精度，，成像應(yīng)用中需要MEMS微鏡跟蹤給定軌跡(正弦或三角波軌跡)進(jìn)行掃描。考慮到基于MEMS微鏡應(yīng)用中的性能要求，本文基于滑模控制理論設(shè)計(jì)控制算法并應(yīng)用于MEMS扭轉(zhuǎn)微鏡，主要內(nèi)容包括以下幾個(gè)方面： (1)將一階滑模控制算法和二階Twsiting控制算法應(yīng)用于帶側(cè)面電極的2D靜電驅(qū)動(dòng)MEMS扭轉(zhuǎn)微鏡，目的是提高系統(tǒng)的暫態(tài)響應(yīng)和定位精度。通過(guò)MATLAB仿真和基于可編程門陣列(FPGA)硬件的實(shí)驗(yàn)驗(yàn)證所提出算法的有效性。仿真和實(shí)驗(yàn)結(jié)果表明，與開(kāi)環(huán)控制相比,閉環(huán)控制系統(tǒng)具有較好的暫態(tài)響應(yīng)和定位精度。與一階滑模控制相比，二階Twsiting控制下的系統(tǒng)具有較好的定位精度。 (2)針對(duì)帶側(cè)面電極2D靜電驅(qū)動(dòng)MEMS扭轉(zhuǎn)微鏡設(shè)計(jì)基于積分滑模面的二階滑模控制算法，該算法由等價(jià)控制和切換控制兩部分組成。采用Lyapunov理論證明系統(tǒng)的穩(wěn)定性，通過(guò)定點(diǎn)控制、跟蹤控制和擾動(dòng)實(shí)驗(yàn)來(lái)驗(yàn)證閉環(huán)系統(tǒng)的性能。實(shí)驗(yàn)結(jié)果表明二階積分滑模控制能夠改善系統(tǒng)暫態(tài)響應(yīng),提高定位和跟蹤掃描的精度。 (3)將積分滑�？刂扑惴☉�(yīng)用于電磁驅(qū)動(dòng)MEMS扭轉(zhuǎn)微鏡，建立基于電磁驅(qū)動(dòng)MEMS扭轉(zhuǎn)微鏡的激光掃描成像系統(tǒng),實(shí)現(xiàn)閉環(huán)控制下的1D掃描成像。實(shí)驗(yàn)結(jié)果表明，與傳統(tǒng)開(kāi)環(huán)控制和PID控制相比，積分滑�？刂葡碌南到y(tǒng)具有較好的暫態(tài)響應(yīng)和定位精度，而且能夠精確跟蹤給定正弦和三角波軌跡進(jìn)行掃描。
[Abstract]:MEMS micromirror has been widely used in optical switch, high definition display, optical coherence tomography, digital projection and bar code scanning. MEMS microscopes are required to have good transient response and scanning accuracy in optical switch applications. MEMS microscopes are required to track given tracks (sinusoidal or triangular wave trajectories) for scanning in imaging applications. Considering the performance requirements of MEMS micromirror applications, this paper designs a control algorithm based on sliding mode control theory and applies it to MEMS torsional micromirror. The main contents are as follows: (1) the first order sliding mode control algorithm and the second order Twsiting control algorithm are applied to 2D electrostatically driven MEMS torsion micromirror with side electrodes to improve the transient response and positioning accuracy of the system. The effectiveness of the proposed algorithm is verified by MATLAB simulation and experiments based on programmable gate array (FPGA) hardware. Simulation and experimental results show that the closed-loop control system has better transient response and positioning accuracy than open-loop control. Compared with the first order sliding mode control, the second order Twsiting control system has better positioning accuracy. The second order sliding mode control algorithm based on integral sliding mode surface is designed for 2D electrostatic actuated MEMS torsion micromirror with side electrode. The algorithm consists of equivalent control and switching control. The stability of the system is proved by Lyapunov theory. The performance of the closed-loop system is verified by fixed-point control, tracking control and perturbation experiments. The experimental results show that the second order integral sliding mode control can improve the transient response of the system and improve the accuracy of positioning and scanning. A laser scanning imaging system based on electromagnetically driven MEMS torsion micromirror is established to realize 1D scanning imaging under closed loop control. The experimental results show that the integrated sliding mode control system has better transient response and positioning accuracy than the traditional open-loop control and pid control, and it can accurately track the given sine and triangular wave trajectories for scanning.
【學(xué)位授予單位】：華南理工大學(xué)
【學(xué)位級(jí)別】：博士
【學(xué)位授予年份】：2014
【分類號(hào)】：TH-39;TP273

【參考文獻(xiàn)】

相關(guān)期刊論文 前1條

1 劉金琨;孫富春;;滑模變結(jié)構(gòu)控制理論及其算法研究與進(jìn)展[J];控制理論與應(yīng)用;2007年03期

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