本文選題：微機(jī)電系統(tǒng)(MEMS)陀螺 + 結(jié)構(gòu)設(shè)計(jì)��； 參考：《壓電與聲光》2016年05期

【摘要】：為解決高過(guò)載微陀螺難以實(shí)現(xiàn)高靈敏檢測(cè)的問(wèn)題,設(shè)計(jì)了一種高靈敏且高過(guò)載的微陀螺結(jié)構(gòu)。設(shè)計(jì)的微陀螺結(jié)構(gòu)驅(qū)動(dòng)模態(tài)與檢測(cè)模態(tài)的頻率高度匹配,提高了微陀螺的結(jié)構(gòu)靈敏度。該微陀螺采用面內(nèi)檢測(cè)方式,驅(qū)動(dòng)與檢測(cè)模態(tài)阻尼類型主要為滑膜阻尼,實(shí)現(xiàn)了在大氣壓環(huán)境下微陀螺的高品質(zhì)因數(shù)Q值設(shè)計(jì)。微陀螺均采用雙懸臂梁設(shè)計(jì),增加了微陀螺結(jié)構(gòu)的穩(wěn)定性,進(jìn)而提高了其抗過(guò)載能力。最后通過(guò)微陀螺的器件級(jí)仿真,得到了所設(shè)計(jì)陀螺結(jié)構(gòu)在驅(qū)動(dòng)方向過(guò)載能力約為100 000g(g=9.8m/s~2),檢測(cè)方向過(guò)載能力約為70 000g的前提下,結(jié)構(gòu)靈敏度為53nm/[(°)/s]。
[Abstract]:In order to solve the problem that high overload micro gyroscope is difficult to realize high sensitivity detection, a high sensitivity and high overload micro gyroscope structure is designed. The structure sensitivity of the micro gyroscope is improved by matching the driving mode of the micro gyro structure with the frequency height of the detection mode. The mode damping of the micro gyroscope is mainly synovial damping. The high quality factor Q design of the micro gyroscope under atmospheric pressure is realized. Both microgyroscopes are designed with double cantilever beams, which increase the stability of microgyroscopes and improve their overload resistance. Finally, through the device level simulation of the micro gyroscope, it is obtained that the structure sensitivity is 53nm/ [(擄/ s)] when the driving direction overload capacity is about 100000 g / g and the detection direction overload capacity is about 70000g.
【作者單位】： 中北大學(xué)電子測(cè)試技術(shù)國(guó)家重點(diǎn)實(shí)驗(yàn)室;中北大學(xué)儀器與電子學(xué)院;中北大學(xué)微系統(tǒng)集成研究中心;
【基金】：國(guó)家自然基金資助項(xiàng)目(61571405;62201070516) 山西省攻關(guān)基金資助項(xiàng)目(20130322005-4)
【分類號(hào)】：TJ765;TH-39

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