本文選題：復(fù)雜制造系統(tǒng)　切入點(diǎn)：維護(hù)調(diào)度　出處：《北京化工大學(xué)》2012年碩士論文　論文類型：學(xué)位論文

【摘要】：隨著現(xiàn)代工業(yè)和信息科技的迅猛發(fā)展，復(fù)雜制造系統(tǒng)的規(guī)模逐漸擴(kuò)大，整個(gè)系統(tǒng)的自動(dòng)化水平不斷得到提高。特別是近幾十年，提出了許多具有數(shù)字化、信息化、智能化等特征的制造系統(tǒng)，如敏捷制造系統(tǒng)、智能制造系統(tǒng)和規(guī)模制造系統(tǒng)等。日益復(fù)雜化和自動(dòng)化的制造系統(tǒng)，，對(duì)生產(chǎn)設(shè)備的穩(wěn)定性和利用率等方面提出了比較高的要求。如何制定合理的設(shè)備維護(hù)方案，利用可用的維護(hù)資源準(zhǔn)確快速的對(duì)設(shè)備進(jìn)行維護(hù)保養(yǎng)，降低設(shè)備故障和成品率損失，提高制造企業(yè)的競(jìng)爭(zhēng)力及可創(chuàng)造的市場(chǎng)價(jià)值，是近年來(lái)學(xué)術(shù)界和工程界研究的一個(gè)重大課題。本文針對(duì)復(fù)雜制造系統(tǒng)的典型代表--半導(dǎo)體制造過(guò)程的設(shè)備維護(hù)調(diào)度問(wèn)題，從維護(hù)建模、維護(hù)策略等方面開展研究，探索合理的設(shè)備維護(hù)策略： 1.針對(duì)連續(xù)狀態(tài)劣化模型的特征，采用Monte Carlo方法模擬設(shè)備的連續(xù)衰減過(guò)程，以周期檢測(cè)的方式討論系統(tǒng)控制界限規(guī)則的視情維護(hù)策略。 2.在考慮設(shè)備經(jīng)濟(jì)相關(guān)性和系統(tǒng)配置的基礎(chǔ)上，根據(jù)設(shè)備劣化水平、故障類型等因素提出事后維修與視情機(jī)會(huì)維修相結(jié)合的多設(shè)備系統(tǒng)維護(hù)決策。 3.針對(duì)半導(dǎo)體制造系統(tǒng)設(shè)備故障率、成品率等性能指標(biāo)，提出一個(gè)針對(duì)半導(dǎo)體生產(chǎn)設(shè)備的兩層維護(hù)優(yōu)化結(jié)構(gòu)，其中設(shè)備層利用Markov決策過(guò)程理論制定針對(duì)單設(shè)備多產(chǎn)品系統(tǒng)的序貫檢測(cè)策略；系統(tǒng)層根據(jù)設(shè)備層的各種信息和有限的可用維護(hù)資源制訂短期維修調(diào)度計(jì)劃。 復(fù)雜制造系統(tǒng)設(shè)備維護(hù)調(diào)度所涉及的模型和分析方法非常復(fù)雜，所要考慮的制造過(guò)程生產(chǎn)計(jì)劃、生產(chǎn)線WIP等因素較多，還存在許多尚未解決的問(wèn)題。本文是針對(duì)復(fù)雜制造系統(tǒng)設(shè)備維護(hù)調(diào)度問(wèn)題做了一些的分析和探討，能夠?qū)窈笙嚓P(guān)領(lǐng)域的設(shè)備維護(hù)調(diào)度研究提供有益的借鑒和參考。
[Abstract]:With the rapid development of modern industry and information technology, the scale of complex manufacturing system has gradually expanded, and the automation level of the whole system has been continuously improved. Intelligent manufacturing systems, such as agile manufacturing systems, intelligent manufacturing systems, scale manufacturing systems, etc. Increasingly complex and automated manufacturing systems, This paper puts forward higher requirements on the stability and utilization ratio of production equipment. How to make a reasonable maintenance plan, how to use available maintenance resources to maintain the equipment accurately and quickly, and how to reduce the equipment failure and the loss of finished product rate. In recent years, improving the competitiveness and creating market value of manufacturing enterprises is an important subject studied by academic and engineering circles. This paper aims at the maintenance and scheduling problem of semiconductor manufacturing process, which is a typical representative of complex manufacturing system. From the maintenance modeling, maintenance strategy and other aspects of research, explore reasonable equipment maintenance strategy:. 1. According to the characteristics of the continuous state deterioration model, Monte Carlo method is used to simulate the continuous attenuation process of the equipment, and the maintenance strategy of the system control limit rule is discussed in the way of periodic detection. 2. On the basis of considering the economic relativity of equipment and system configuration, according to the equipment deterioration level and fault type and other factors, this paper puts forward the maintenance decision of multi-equipment system combining after-maintenance and opportunistic maintenance. 3. Aiming at the failure rate and finished product rate of semiconductor manufacturing system, a two-layer maintenance optimization structure for semiconductor manufacturing equipment is proposed. The equipment layer makes use of the Markov decision process theory to formulate the sequential detection strategy for the single equipment multi-product system, and the system layer formulates the short-term maintenance scheduling plan according to the various information of the equipment layer and the limited available maintenance resources. The models and analysis methods involved in equipment maintenance and scheduling of complex manufacturing systems are very complex. There are many factors to be considered, such as manufacturing process production planning, production line WIP and so on. There are still many unsolved problems. This paper makes some analysis and discussion on the equipment maintenance and scheduling problem of complex manufacturing system, which can provide useful reference and reference for the research of equipment maintenance and scheduling in related fields in the future.
【學(xué)位授予單位】：北京化工大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2012
【分類號(hào)】：TH186;O242.1

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