本文關(guān)鍵詞： 壓電振子 共振 隔膜泵 磁力彈簧　出處：《吉林大學(xué)》2013年博士論文　論文類型：學(xué)位論文

【摘要】：隔膜泵是流體泵的一個重要種類，主要滿足小型化、低輸出性能方面的需求，近年在醫(yī)藥生物、精細(xì)化工、航空航天、微機(jī)電系統(tǒng)等領(lǐng)域的應(yīng)用越來越廣泛，顯示著良好的發(fā)展前景。目前隔膜泵主要有利用電機(jī)凸輪機(jī)構(gòu)驅(qū)動的隔膜泵(簡稱“電磁隔膜泵”)與壓電振子驅(qū)動的薄膜泵(簡稱“壓電泵”)兩大類，其中壓電泵對液體類介質(zhì)的輸出效果好，對氣體的輸出效果很差，同時存在輸出壓力低、壓電晶片易發(fā)熱、碎裂等問題，還沒有廣泛的市場應(yīng)用；電磁隔膜泵則存在結(jié)構(gòu)復(fù)雜、成本高、噪音大等問題，應(yīng)用受到一定限制。本文將壓電泵的結(jié)構(gòu)簡單的特點(diǎn)與系統(tǒng)諧振技術(shù)相結(jié)合，提出一種利用壓電振動激勵隔膜共振而形成驅(qū)動能力的新型壓電共振型隔膜泵(簡稱“壓電共振泵”)，研究這種壓電共振泵的基本原理與構(gòu)成方法，進(jìn)行相關(guān)的樣機(jī)設(shè)計與試驗(yàn)，是國家自然科學(xué)基金項(xiàng)目《壓電型氣體隔膜泵設(shè)計理論與關(guān)鍵技術(shù)研究》（項(xiàng)目編號：51175213）研究工作的一部分�？傮w內(nèi)容如下： 1.對壓電共振泵中所用圓形壓電振子平衡條件與彎曲變形撓度進(jìn)行了分析計算。通過壓電振子有限元模型的建立，獲取了其多階模態(tài)的振型；使用解析的方法求解了周邊固定支撐條件下壓電振子中心點(diǎn)的撓度公式，通過實(shí)驗(yàn)測試的方法，得到了驅(qū)動電壓對圓形壓電振子中心點(diǎn)的撓度的影響示意圖。最后對壓電振子進(jìn)行阻抗分析，測得了壓電振子的阻抗特性及其固有頻率。 2.將壓電共振泵的主要結(jié)構(gòu)劃分為激振單元和泵送單元兩部分，分別描述了兩個單元的作用與工作原理；對激振單元，建立了動力學(xué)模型并解析了各構(gòu)成部件的剛度，獲得了共振系統(tǒng)的放大倍數(shù)；對泵送單元，推導(dǎo)了隔膜膜片的撓度和及其對流體的近似輸出流量計算公式；最后對激振單元的共振頻率和振動位移進(jìn)行了試驗(yàn)測量。 3.針對壓電共振泵中圓形共振板彈簧不易換取的缺點(diǎn)，利用磁力彈簧剛度可變的特性，設(shè)計了磁力彈簧式壓電共振型隔膜泵(簡稱“磁力式壓電共振泵”)。首先對磁力彈簧的特性進(jìn)行了研究，建立了磁力彈簧的數(shù)學(xué)模型，通過計算得到了磁力彈簧軸向剛度與軸向間距的關(guān)系式，并使用電子稱與精雕機(jī)臺面搭成的試驗(yàn)臺，對磁力彈簧軸向力進(jìn)行了測量；其次，描述了磁力式壓電共振泵的工作原理，并建立了其動力學(xué)模型，從計算可知，，調(diào)整磁力彈簧的軸向間距即可改變共振泵的共振頻率；通過對磁力式壓電共振泵有限元建模分析，得知當(dāng)激振單元處于一階模態(tài)工作時，質(zhì)量塊的中心振幅最大；最后，對磁力式壓電共振泵進(jìn)行結(jié)構(gòu)設(shè)計并制作了樣機(jī)，對其激振單元進(jìn)行了共振頻率和振動位移的測量，最后對振動幅值比進(jìn)行了測量。 4.針對壓電共振泵和磁力式壓電共振泵進(jìn)行了兩部分工作，第一部分，試驗(yàn)、測試對不同粘度液體的輸出性能；首先搭建了針對液體流量測試的試驗(yàn)臺，其次選取性質(zhì)穩(wěn)定、幾乎不揮發(fā)、不會對試驗(yàn)環(huán)境產(chǎn)生污染的甘油作為配比溶液；通過實(shí)驗(yàn)的方法對兩種共振泵激振單元和泵送單元的各結(jié)構(gòu)參數(shù)進(jìn)行了最優(yōu)選擇，得到了其最大輸出流量和輸出壓力；第二部分，試驗(yàn)、測試了對氣體的輸出性能；通過構(gòu)建的氣體輸送試驗(yàn)平臺進(jìn)行了氣體的輸送實(shí)驗(yàn)，得到了對氣體的輸送流量；最后對同等工作條件下共振泵輸送液體和氣體出現(xiàn)的流量差異進(jìn)行了分析說明。 5.根據(jù)壓電共振泵的工作特性，設(shè)計了專用驅(qū)動電源，主要包括其整體結(jié)構(gòu)設(shè)計、核心處理器的選用、逆變式驅(qū)動電路的選擇等。
[Abstract]:The diaphragm pump is an important type of fluid pump, mainly to meet the miniaturization, low output performance requirements, in recent years, bio pharmaceutical, fine chemical, aerospace, and application areas of MEMS and other more widely, showing good prospects for development. The main diaphragm pump diaphragm pump motor driven by cam mechanism (referred to as the "electromagnetic diaphragm pump") membrane pump drive and piezoelectric vibrator (referred to as the "pump") two categories, of which the output effect of piezoelectric pump for liquid medium, the output effect of gas is very poor, and there is output pressure is low, the piezoelectric wafer is easy to heat, fragmentation so, has not been widely applied in the market; electromagnetic diaphragm pump has complicated structure, high cost, noise and other problems, which limits the applications. In this paper the characteristics and system structure of resonant piezoelectric pump with simple combination, using a The piezoelectric vibration diaphragm resonance formed the driving ability of the new piezoelectric resonant diaphragm pump (referred to as the "piezoelectric resonance pump"), the basic principle of the piezoelectric pump resonance and composing method, prototype design and test of the National Natural Science Fund Project "the piezoelectric type gas diaphragm pump design theory with the research on the key technology" (project number: 51175213) part of the research work. The contents are as follows:
1. of the piezodisc equilibrium condition and bending deformation are analyzed. The piezoelectric resonance pump calculated by establishing a finite element model of piezoelectric vibrator, the vibration mode of the multi order modal analysis method; using the deflection formula under the condition of fixed support points surrounding the heart of piezoelectric vibrator the solution, through experiments, the influence of driving voltage on the deflection of circular piezoelectric vibrator at the center of the map. At the end of the piezoelectric vibrator were measured by impedance analysis, piezoelectric impedance characteristics and natural frequency.
The 2. main structure of piezoelectric resonant pump as the excitation unit and pump unit are described in the two part, function and working principle of two units; the vibration unit dynamics model was established and analyzed each component's stiffness, obtained the magnification imaging system of pumping unit; that is the deflection and diaphragm membrane and its approximate formula for calculating the output flow of fluid; at the end of the exciting unit of the resonance frequency and the vibration displacement was measured.
According to the 3. piezoelectric resonance pump circular resonance plate spring is not easy to exchange for the shortcomings of using the stiffness variable magnetic spring, designed magnetic spring type piezoelectric resonant diaphragm pump (referred to as the "magnetic resonance type piezoelectric pump). The magnetic spring characteristics were studied, established the mathematical model the magnetic spring, obtained by calculating the magnetic spring axial stiffness and axial spacing between the test rig and the use of electronic and machine carved a table, on the magnetic spring axial force were measured; secondly, the working principle of magnetic resonance type piezoelectric pump is described, and its dynamic model was established. The calculation shows that the resonance frequency of the magnetic spring axial spacing can be adjusted by changing the pump resonance; piezoelectric pump resonance finite element modeling analysis of the magnetic type, that when the excitation unit in the first mode of operation, the quality of the center block vibration The amplitude is the largest. Finally, the structure of the magnetic force piezoelectric resonance pump is designed, and the prototype is made. The resonant frequency and vibration displacement of the excitation unit are measured. Finally, the vibration amplitude ratio is measured.
4. for the piezoelectric pump and magnetic resonance type piezoelectric resonance pump has two parts, the first part, test, test output performance of different viscosity of the liquid; the first step is to build the test platform of liquid flow test, then select stable, almost no volatilization, no pollution to the environment as the ratio of glycerol test solution the various structure parameters; feeding unit of two kinds of resonance vibration pump unit and the pump through the experimental method of optimal choice, to get the maximum output flow rate and pressure; the second part test on output performance of gas test; the gas transport experiment by constructing a gas conveying test platform, get the flow of gas transportation; finally on the same working conditions of resonant pump flow between liquid and gas appeared were analyzed.
5., according to the working characteristics of piezoelectric resonance pump, a special driving power is designed, including the overall structure design, the selection of core processor and the selection of inverter driving circuit.

【學(xué)位授予單位】：吉林大學(xué)
【學(xué)位級別】：博士
【學(xué)位授予年份】：2013
【分類號】：TH323

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