能動磨盤動態(tài)面形檢測研究
發(fā)布時間：2019-05-18 16:57
【摘要】：在大口徑非球面鏡加工方法中,能動磨盤加工技術具有高效率、高精度、高智能化等特點,應用此技術,一系列大口徑非球面鏡得以高效高質(zhì)量地完成。不同于傳統(tǒng)加工工藝中的剛性磨盤,能動磨盤利用彈性薄板在受到外力驅(qū)動時產(chǎn)生的規(guī)律形變進行實時變形,以保持在平移且旋轉(zhuǎn)地研拋鏡面時磨盤表面與鏡面面形實時匹配,進而在提高加工效率的同時抑制鏡面中高頻誤差。在能動磨盤被用于加工鏡面前,需要對其變形進行標定,以保證加工時對磨盤面形的精確控制。常用的標定方法為接觸式位移傳感器陣列測量法,即應用幾十個位移傳感器組成點陣,將磨盤盤面接觸傳感器陣列,分別記錄磨盤在變形前后的面形值,兩者相減即得到磨盤的面形變化。這種方法可以測量能動磨盤的靜態(tài)面形,但不能反應磨盤在加工中的實際面形變化與面形精度,本文在此已有的能動磨盤面形檢測技術的基礎之上,針對能動磨盤變形中的動態(tài)面形開展了深入研究,主要在以下幾個方面取得了突破性進展:(1)針對基于微位移傳感器的接觸式磨盤面形測量方法,分析了檢測系統(tǒng)的各項誤差及其對檢測結果的影響。得出結論,檢測系統(tǒng)中傳感器檢測時的球頭誤差屬于系統(tǒng)誤差,可以在磨盤面形數(shù)據(jù)處理時補償;而傳感器安裝位置、安裝角度誤差屬于隨機誤差,對檢測的影響在精度范圍以內(nèi);當前檢測系統(tǒng)的傳感器數(shù)目能夠以較高地精度還原面形。(2)對基于影響函數(shù)的能動磨盤面形控制方法進行了總結,應用磨盤面形檢測系統(tǒng)測量了1m能動磨盤上18個驅(qū)動器的影響函數(shù),對給定位置處能動磨盤的靜態(tài)面形進行了標定和變形驗證。基于Zernike多項式提出了磨盤變形控制過程中高頻誤差抑制方法,給出了具體的誤差補償過程,分析結果表明,經(jīng)過補償能動磨盤的控制面形精度可以提高10%~20%,并通過實驗驗證了補償方法的有效性。(3)建立了能動磨盤不同面形精度情況下的去除效率模型并進行了仿真,驗證了磨盤面形精度對加工的重要影響,證明了動態(tài)測量能動磨盤面形的重要性,并基于結構函數(shù)提出了能動磨盤的面形評價指標,推導了用于快速計算的結構函數(shù)計算公式。不同于常見的基于均方根的磨盤面形評價體系,結構函數(shù)表征方法將磨盤面形與空間尺寸聯(lián)系起來,更能夠準確地反應出磨盤的面形狀態(tài)。(4)基于FPGA和USB通信實現(xiàn)了能動磨盤面形動態(tài)檢測系統(tǒng)的研制。通過解決能動磨盤面形檢測過程中各傳感器數(shù)值與磨盤所處鏡面位置之間同步性的問題,將磨盤的面形測量由原始的靜態(tài)測量改進為變化中的動態(tài)測量。采集系統(tǒng)能夠定量的給出磨盤在加工中某位置處的動態(tài)面形,以便計算磨盤面形在任意位置處與理論面形之間的誤差,可以分析以至改善磨盤面形精度,通過實驗驗證了采集系統(tǒng)的采樣頻率可以保證對磨盤動態(tài)面形的精確采集。(5)實際測量了磨盤加工過程中的動態(tài)面形變化,得到了不同轉(zhuǎn)速情況下的磨盤面形動態(tài)變化,將測量結果與理論鏡面面形值進行比對,分析了不同轉(zhuǎn)速情況下的磨盤面形精度,為不同階段采用不同旋轉(zhuǎn)速度提供數(shù)據(jù)支撐,同時提出根據(jù)不同轉(zhuǎn)速情況下的能動磨盤面形精度提高加工效率通過本文分析,首先驗證了用于4m級主鏡加工的能動磨盤靜態(tài)面形精度可以滿足加工要求,在此基礎之上,得出了磨盤面形精度會隨其轉(zhuǎn)速的增加而稍微下降的結論,但不同于預期的結果,實驗證明磨盤在較高速旋轉(zhuǎn)加工時仍能保證較高的面形精度,說明在加工過程中可以根據(jù)不同的加工階段選擇不同的轉(zhuǎn)速,一方面可以保證不同加工階段所需的磨盤面形精度,另一方面可以提高加工效率。這為制定更智能化的加工策略提供數(shù)據(jù)支撐,有利于進一步挖掘能動磨盤的潛能。
[Abstract]:In a large-caliber non-spherical mirror proces method, that active disc processing technology has the characteristics of high efficiency, high precision, high intelligentization and the like, and the technology is applied, and a series of large-caliber non-spherical mirror can be effectively and high-quality. different from the rigid grinding disc in the traditional processing technology, the active grinding disc is subjected to real-time deformation by the regular deformation generated by the elastic thin plate when being driven by an external force, Furthermore, the high-frequency error in the mirror is suppressed while the processing efficiency is improved. The active grinding disc is used in the front of the processing mirror, and the deformation of the movable grinding disc needs to be calibrated to ensure the precise control of the surface shape of the grinding disc during the processing. The common calibration method is a contact type displacement sensor array measurement method, namely, a dot matrix is formed by applying dozens of displacement sensors, and the disc surface of the grinding disc is contacted with the sensor array, and the surface shape values of the grinding disc before and after deformation are respectively recorded, and the surface shape changes of the grinding disc are obtained by subtracting the two. The method can measure the static surface shape of the active grinding disc, but can not reflect the actual surface shape change and the surface shape precision of the grinding disc in the processing, The breakthrough progress has been made in the following aspects: (1) In view of the contact type grinding disc shape measurement method based on the micro-displacement sensor, the error of the detection system and its influence on the detection result are analyzed. It is concluded that the error of the ball head during the detection of the sensor in the detection system belongs to the system error, which can be compensated when the disc shape data is processed, and the position of the sensor installation and the installation angle error are random errors, and the influence on the detection is within the precision range; The number of sensors of the current detection system is capable of reducing the shape with a higher accuracy. (2) The shape control method of the active grinding disc based on the influence function is summarized, the influence function of the 18 actuators on the 1 m active grinding disc is measured by using the disc shape detection system, and the static surface shape of the active grinding disc at a given position is calibrated and the deformation verification is carried out. Based on Zernike polynomials, the method of high-frequency error suppression in the process of deformation control of the grinding disc is put forward, and the specific error compensation process is given. The results show that the accuracy of the control surface can be increased by 10% ~ 20%, and the effectiveness of the compensation method is verified by the experiment. (3) The efficiency model of the removal efficiency under different surface shape of the active grinding disc is established and the simulation is carried out, and the important influence of the surface shape precision on the processing is verified, and the importance of the dynamic measurement of the shape of the active grinding disc is proved. And based on the structural function, the surface shape evaluation index of the active grinding disc is put forward, and the calculation formula of the structure function for rapid calculation is derived. Different from the common root-mean-square-based grinding disc shape evaluation system, the structural function characterization method links the surface shape of the grinding disc with the space size, and can accurately reflect the surface shape state of the grinding disc. (4) The development of dynamic disc shape dynamic detection system is realized based on FPGA and USB communication. By solving the problem of the synchronism between each sensor value and the mirror position of the grinding disc during the surface shape detection of the active grinding disc, the surface shape measurement of the grinding disc is improved to the dynamic measurement in the change from the original static measurement. the collecting system can quantitatively give the dynamic surface shape of the grinding disc at a certain position in the processing, so as to calculate the error between the surface shape of the grinding disc and the theoretical surface shape at any position, and can be analyzed to improve the surface shape precision of the grinding disc, The experimental results show that the sampling frequency of the acquisition system can ensure the accurate acquisition of the dynamic shape of the grinding disc. (5) the dynamic surface shape change in the grinding disc processing process is actually measured, the surface shape dynamic change of the grinding disc under the condition of different rotating speed is obtained, the measurement result is compared with the theoretical mirror surface shape value, and the surface shape precision of the grinding disc under the condition of different rotating speeds is analyzed, in ord to provide data support for different rotation speed in different stages, and at that same time, the accuracy of the surface shape of the active grinding disc under the condition of different rotation speed is proposed, the processing efficiency is improved through the analysis, the static surface shape precision of the active grinding disc used for the processing of the 4m-level main mirror can be first verified, the processing requirement can be met, On the basis of this, it is concluded that the accuracy of the surface shape of the grinding disc will decrease slightly with the increase of the rotating speed, but different from the expected result, the experiment proves that the grinding disc can still guarantee the high surface shape precision when the grinding disc is processed at high speed. It is shown that different rotation speeds can be selected according to different processing stages in the machining process, and on the one hand, the accuracy of the surface shape required for different processing stages can be guaranteed, and the processing efficiency can be improved on the other hand. This provides data support for the development of more intelligent processing strategies, which is beneficial to further digging the potential of the active grinding disc.
【學位授予單位】：中國科學院研究生院（光電技術研究所）
【學位級別】：博士
【學位授予年份】：2015
【分類號】：TG58;TG806
[Abstract]:In a large-caliber non-spherical mirror proces method, that active disc processing technology has the characteristics of high efficiency, high precision, high intelligentization and the like, and the technology is applied, and a series of large-caliber non-spherical mirror can be effectively and high-quality. different from the rigid grinding disc in the traditional processing technology, the active grinding disc is subjected to real-time deformation by the regular deformation generated by the elastic thin plate when being driven by an external force, Furthermore, the high-frequency error in the mirror is suppressed while the processing efficiency is improved. The active grinding disc is used in the front of the processing mirror, and the deformation of the movable grinding disc needs to be calibrated to ensure the precise control of the surface shape of the grinding disc during the processing. The common calibration method is a contact type displacement sensor array measurement method, namely, a dot matrix is formed by applying dozens of displacement sensors, and the disc surface of the grinding disc is contacted with the sensor array, and the surface shape values of the grinding disc before and after deformation are respectively recorded, and the surface shape changes of the grinding disc are obtained by subtracting the two. The method can measure the static surface shape of the active grinding disc, but can not reflect the actual surface shape change and the surface shape precision of the grinding disc in the processing, The breakthrough progress has been made in the following aspects: (1) In view of the contact type grinding disc shape measurement method based on the micro-displacement sensor, the error of the detection system and its influence on the detection result are analyzed. It is concluded that the error of the ball head during the detection of the sensor in the detection system belongs to the system error, which can be compensated when the disc shape data is processed, and the position of the sensor installation and the installation angle error are random errors, and the influence on the detection is within the precision range; The number of sensors of the current detection system is capable of reducing the shape with a higher accuracy. (2) The shape control method of the active grinding disc based on the influence function is summarized, the influence function of the 18 actuators on the 1 m active grinding disc is measured by using the disc shape detection system, and the static surface shape of the active grinding disc at a given position is calibrated and the deformation verification is carried out. Based on Zernike polynomials, the method of high-frequency error suppression in the process of deformation control of the grinding disc is put forward, and the specific error compensation process is given. The results show that the accuracy of the control surface can be increased by 10% ~ 20%, and the effectiveness of the compensation method is verified by the experiment. (3) The efficiency model of the removal efficiency under different surface shape of the active grinding disc is established and the simulation is carried out, and the important influence of the surface shape precision on the processing is verified, and the importance of the dynamic measurement of the shape of the active grinding disc is proved. And based on the structural function, the surface shape evaluation index of the active grinding disc is put forward, and the calculation formula of the structure function for rapid calculation is derived. Different from the common root-mean-square-based grinding disc shape evaluation system, the structural function characterization method links the surface shape of the grinding disc with the space size, and can accurately reflect the surface shape state of the grinding disc. (4) The development of dynamic disc shape dynamic detection system is realized based on FPGA and USB communication. By solving the problem of the synchronism between each sensor value and the mirror position of the grinding disc during the surface shape detection of the active grinding disc, the surface shape measurement of the grinding disc is improved to the dynamic measurement in the change from the original static measurement. the collecting system can quantitatively give the dynamic surface shape of the grinding disc at a certain position in the processing, so as to calculate the error between the surface shape of the grinding disc and the theoretical surface shape at any position, and can be analyzed to improve the surface shape precision of the grinding disc, The experimental results show that the sampling frequency of the acquisition system can ensure the accurate acquisition of the dynamic shape of the grinding disc. (5) the dynamic surface shape change in the grinding disc processing process is actually measured, the surface shape dynamic change of the grinding disc under the condition of different rotating speed is obtained, the measurement result is compared with the theoretical mirror surface shape value, and the surface shape precision of the grinding disc under the condition of different rotating speeds is analyzed, in ord to provide data support for different rotation speed in different stages, and at that same time, the accuracy of the surface shape of the active grinding disc under the condition of different rotation speed is proposed, the processing efficiency is improved through the analysis, the static surface shape precision of the active grinding disc used for the processing of the 4m-level main mirror can be first verified, the processing requirement can be met, On the basis of this, it is concluded that the accuracy of the surface shape of the grinding disc will decrease slightly with the increase of the rotating speed, but different from the expected result, the experiment proves that the grinding disc can still guarantee the high surface shape precision when the grinding disc is processed at high speed. It is shown that different rotation speeds can be selected according to different processing stages in the machining process, and on the one hand, the accuracy of the surface shape required for different processing stages can be guaranteed, and the processing efficiency can be improved on the other hand. This provides data support for the development of more intelligent processing strategies, which is beneficial to further digging the potential of the active grinding disc.
【學位授予單位】：中國科學院研究生院（光電技術研究所）
【學位級別】：博士
【學位授予年份】：2015
【分類號】：TG58;TG806
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